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EBARA EV-S100 Instruction Manual

Manual is about: MULTI-STAGE DRY VACUUM PUMP CE / SEMI / NRTL MODEL 200-220V(50/60Hz)

Summary of EV-S100

  • Page 1

    Doc.No.Evs_csn_2_e_rev. 3 instruction manual multi-stage dry vacuum pump model ev-s20 model ev-s50 model ev-s100 model ev-s200 ce / semi / nrtl model 200-220v(50/60hz) caution: please read and understand this instruction manual thoroughly before using this equipment. Be sure to keep this instrucion ...

  • Page 2

    The products described herein fall under “the goods listed in row 16 of the appended table 1 of the export trade control order of japan”, so in cases of export of such products, you need to confirm “use” and “purchaser and/or end-user” and, as case may be, obtain the approval of the minister of econ...

  • Page 3

    （ i ） environmental basic policies it is our responsibility, as people of the earth, to protect nature's irreplaceable treasures and to pass them on to future generations. As we undertake our business activities, we will establish environmental management systems and implement ongoing improvements a...

  • Page 4: Safety Information

    （ ii ） safety information it is essential that those operating this pump should have the knowledge to identify and avoid hazardous conditions associated with the pump. Inadequate or rash operation may cause dangerous and serious accidents. Before installation and operation, the operator should first...

  • Page 5: Important Prior Warnings

    （ iii ） important prior warnings danger keep out from under the pump when lifted. Only qualified personnel shall unload and lift the pump. Warning be careful not to overturn the pump when pushing and pulling it sideways, because the width of the pump is small to its height. Warning all electrical wo...

  • Page 6

    （ iv ） warning check for gas leaks after installing and maintaining the piping. Gas leaks will result in the discharge of harmful and dangerous substances and in abnormal reactions due to the ingress of air into the pump. When checking for gas leaks by pressurization, please pressurize by less than ...

  • Page 7

    （ v ） warning do not perform a withstand voltage test. Failure to comply could result in damage to the sensitive devices. Warning in model ev-s20 type pump, the bolt which is fixing the lifting bracket to a pump is m6✕12. This lifting bracket can use as fixing bracket. When you use this bracket as f...

  • Page 8: Warning

    （ vi ） following safety warning labels are attached to pump covers. 1. High temperature warning 2. Hazardous voltage warning 3. Hazardous materials warning 4. Electric charge mark 5. Hazardous weight danger 1. High temperature warning hot surface may burn or cause injury. Allow the piping and casing...

  • Page 9

    （ vii ） 3. Hazardous materials warning in case of hazardous materials are handled. Run the pump only with n2 gas purge before servicing. Take adequate measures against dangerous reaction and contact with human body. 4. Electric charge mark 5. Hazardous weight danger heavy weight may cause severe inj...

  • Page 10

    （ viii ） location, warning label1 pm10u ebara corporation.

  • Page 11

    （ ix ） location, warning label2 pm10u ebara corporation.

  • Page 12: Safety Interlocks

    （ x ） safety interlocks warning check safety interlock functions periodically (every 6 months) to confirm the interlocks will work correctly. N itrogen f low l ow a normally open flow switch breaks when nitrogen supply to the pump (oil bearing(s) and inter stage injection) drops below its factory se...

  • Page 13

    （ xi ） interlock schematic (model ev-s20) e po w e r su ppl y 3φ 3w 200v a c 50h z 3φ 3w 200-220v a c 50/60h z [ d v p 401 ] e e cp r s t b1 － [ u l 1077 ] a b c e [ mp m ot or dr ive r ] l c d co nt ro ller r es et u v w m e [ d v p 414] (c n _1 ) 3 1 mp m o t o r t hr m o + 1 2 v x 1 c pu c pu r s...

  • Page 14

    （ xii ） e po w e r su ppl y 3φ 3w 200v a c 50h z 3φ 3w 200-220v a c 50/60h z [ d v p 401 ] e e cp r s t b1 － [ u l 1077 ] a b c e [ mp m ot or dr ive r ] l c d co nt ro ller r es et u v w m e [ d v p 414] (c n _1 ) 3 1 mp m o t o r t hr m o + 1 2 v bp m o t o r t hr m o x 1 c pu c pu r s t (c n _8 )...

  • Page 15

    （ xiii ） standard limited warranty the terms of this warranty limit the liability of ebara corporation. Please read it carefully. Duration for new pumps, the warranty period shall be one (1) year from the date of commencing operation by user or 18 months from shipment by ebara, whichever comes first...

  • Page 16

    （ xiv ） pm10u ebara corporation.

  • Page 17

    （ xv ） contents environmental basic policies ........................................................................... I safety information ............................................................................................ Ii important prior warnings.........................................

  • Page 18

    （ xvi ） model ev-s100p / ev-s 100n outline drawing ........................... 19 model ev-s200 outline drawing .................................................. 20 model ev-s200p / ev-s 200n outline drawing ........................... 21 model ev-s20 outline drawing（option） ..........................

  • Page 19

    （ xvii ） 5.3.6 setting the pump n2 flow low warning threshold .................... 65 5.3.7 setting the back pressure high warning threshold ................. 66 5.4 dip switch ........................................................................................... 67 5.5 dip switch setting displ...

  • Page 20

    P.1 1. Foreword we appreciate that you have selected an ebara model ev-s series dry vacuum pumps. These pumps have been manufactured with much care and attention so that it can be operated safely and satisfactorily. Incorrect operation will result in lack of performance and cause accidents and injur...

  • Page 21

    P.2 caution do not stack the pump. Pump must be placed in an upright position. When the pump is overturned, lubricating oil inside a pump may leak to a rotor room, and it may cause trouble to operation. 2.2 environmental concerns handling or operating the unit other than specified may induce adverse...

  • Page 22

    P.3 3. Product description 3.1 outline these pumps have a compact design and includes various sensors and controls to enhance reliability and operation. 3.1.1 pump module the pump is roots type vacuum pump which rotates a pair of non-contact multi-stage rotors synchronized by timing gears. The timin...

  • Page 23

    P.4 3.1.3 cooling water because the pump compresses gas from a vacuum to atmospheric pressure, compression heat is generated. Therefore cool the pump with cooling water. The cooling water connector takes the form of a coupler for easy connection and disconnection. 3.1.4 exhaust a check valve is buil...

  • Page 24

    P.5 when an alarm output is suddenly generated, while the plant unit is operational, a warning signal will be generated to ensure that the plant operation is not discontinued. This enables the operator to check the pump after the equivalent of one cycle has been completed. Be sure to contact ebara c...

  • Page 25

    P.6 3.3.2 moving method move pump slowly by pushing eye bolt toward direction a. Be sure not to be caught by toes. If pump needs to be moved toward direction b in order to be set at a corner or narrow spaces, two persons shall move the pump by pushing its terminal portion alternately as directed bel...

  • Page 26

    P.7 3.4 release and shut off residual internal energy warning to avoid dangers potentially encountered during maintenance, transportation or storage, follow instructions below to shut off power. Warning capacitors within the control panel retain residual energy after interruption of power supply. Wa...

  • Page 27

    P.8 3.4.2 cooling water 1. Close [facility] water supply to stop water supply to the pump, then close water return valve. Follow [facility] procedures for locking these valves in the off position. 2. Push the knurled outer ring of the quick-connect couplers toward the pump to disconnect the water ho...

  • Page 28

    P.9 3.5 detailed specifications the following tables and figures should be consulted for pump specification, dimension and performance details. 3.5.1 model description ev – s 20 p mark description 20 1670 l/min 50 5000 l/min 100 10000 l/min 200 20000 l/min - standard / without n2 purge unit p standa...

  • Page 29

    P.10 3.5.2 model spectications table 3.1 specifications (model ev-s20 / ev-s20p / ev-s20n) model model ev-s20 model ev-s20p model ev-s20n pumping speed 1670 l/min ultimate pressure 3.0 pa 5.0 pa connection gas inlet nw50 gas outlet nw25 approx. Power at ultimate pressure (max. Power) 0.4 kw (2.2 kw)...

  • Page 30

    P.11 table 3.2 specifications (model ev-s50 / ev-s50p / ev-s50n) model model ev-s50 model ev-s50p model ev-s50n pumping speed 5000 l/min ultimate pressure 0.5 pa connection gas inlet nw50 gas outlet nw25 approx. Power at ultimate pressure (max. Power) 0.55 kw (3.6 kw) utili- ty cooling water connect...

  • Page 31

    P.12 table 3.3 specifications (model ev-s100 / ev-s100p / ev-s100n) model model ev-s100 model ev-s100p model ev-s100n pumping speed 10000 l/min ultimate pressure 0.5 pa connection gas inlet nw80 gas outlet nw40 approx. Power at ultimate pressure (max. Power) 0.65 kw (4.6 kw) utili- ty cooling water ...

  • Page 32

    P.13 table 3.4 specifications (model ev-s200 / ev-s200p / ev-s200n) model model ev-s200 model ev-s200p model ev-s200n pumping speed 20000 l/min ultimate pressure 0.5 pa connection gas inlet nw100 gas outlet nw40 approx. Power at ultimate pressure (max. Power) 0.75 kw (5.1 kw) utili- ty cooling water...

  • Page 33

    P.14 3.5.3 outline drawing model ev-s20 outline drawing pm10u ebara corporation.

  • Page 34

    P.15 model ev-s20p / ev-s 20n outline drawing pm10u ebara corporation.

  • Page 35

    P.16 model ev-s50 outline drawing pm10u ebara corporation.

  • Page 36

    P.17 model ev-s50p / ev-s50n outline drawing pm10u ebara corporation.

  • Page 37

    P.18 model ev-s100 outline drawing pm10u ebara corporation.

  • Page 38

    P.19 model ev-s100p / ev-s 100n outline drawing pm10u ebara corporation.

  • Page 39

    P.20 model ev-s200 outline drawing pm10u ebara corporation.

  • Page 40

    P.21 model ev-s200p / ev-s 200n outline drawing pm10u ebara corporation.

  • Page 41

    P.22 model ev-s20 outline drawing（option） pm10u ebara corporation.

  • Page 42

    P.23 model ev-s20p / ev-s 20n outline drawing(option) pm10u ebara corporation.

  • Page 43

    P.24 model ev-s50 outline drawing(option) pm10u ebara corporation.

  • Page 44

    P.25 model ev-s50p / ev-s50n outline drawing(option) pm10u ebara corporation.

  • Page 45

    P.26 model ev-s100 outline drawing(option) pm10u ebara corporation.

  • Page 46

    P.27 model ev-s100p / ev-s 100n outline drawing(option) pm10u ebara corporation.

  • Page 47

    P.28 model ev-s200 outline drawing(option) pm10u ebara corporation.

  • Page 48

    P.29 model ev-s200p / ev-s 200n outline drawing(option) pm10u ebara corporation.

  • Page 49

    P.30 3.5.4 performance curve 0.1 1 10 100 1000 10000 1 10 100 1000 10000 100000 inlet pressure (pa) p um p ing s p eed ( l /m in) ev-s20/ev-s20p ev-s20n ev-s20 ev-s20p/ev-s20n fig 3.1 model ev-s20(p/n) performance curve 0.1 1 10 100 1000 10000 0.1 1 10 100 1000 10000 100000 inlet pressure (pa) p um ...

  • Page 50

    P.31 0.1 1 10 100 1000 10000 100000 0.1 1 10 100 1000 10000 100000 inlet pressure (pa) p um p ing s p eed ( l /m in) ev-s100 ev-s100p ev-s100n fig 3.3 model ev-s100(p/n) performance curve 0.1 1 10 100 1000 10000 100000 0.1 1 10 100 1000 10000 100000 inlet pressure (pa) p um p ing s p eed ( l /m in) ...

  • Page 51

    P.32 check valve power gas inlet control circuit gas outlet pump n 2 gas flow sensor n 2 selector valve pressure gauge p regulator n 2 gas motor driver 1 motor 1 main pump （ＭＰ） motor driver 2 control connector circuit protector lcd controller cooling water flow seneor water ft2 ft1 booster pump （ＢＰ）...

  • Page 52

    P.33 4. Installation be sure to take the following cautions and instructions into account when installing the pump. 4.1 movement and fixation 4.1.1 location these pumps are designed for indoor installation. To install the pump, select a place with little exposure to dust and humidity and not subject...

  • Page 53

    P.34 warning be careful not to overturn the pump when pushing and pulling it sideways, because the width of the pump is small to its height. Caution the neck portion of the casters will vibrate during caster movement. Be sure to keep your fingers and feet out. Caution do not step on the pump or plac...

  • Page 54

    P.35 fig. 4.2 how to stack pumps warning in model ev-s20 type pump, the bolt which is fixing the fixing bracket to a pump is m6✕16. This fixing bracket can use as lifting bracket. When you use this bracket as lifting bracket, you use m6✕12 bolts for fixing this bracket to the upper side of the pump....

  • Page 55

    P.36 4.1.4 pump fixation (option) the pumps are provided with casters for easy transportation and foot adjustments for anchoring and height adjusting, as described in section 4.1.2. The pump, however, may unexpectedly move or fall down when an earthquake occurs. To prevent such events, ev-s dry pump...

  • Page 56

    P.37 ev-s20 location,fixture pm10u ebara corporation.

  • Page 57

    P.38 ev-s50 location,fixture pm10u ebara corporation.

  • Page 58

    P.39 ev-s100 location,fixture pm10u ebara corporation.

  • Page 59

    P.40 ev-s200 location,fixture pm10u ebara corporation.

  • Page 60

    P.41 4.2 piping 4.2.1 vacuum and exhaust piping connect the vacuum and exhaust pipes to the suction and exhaust flanges. A narrow clearance is maintained in the pump for rotor rotation. The ingress of foreign objects into the pump interior will therefore prevent the pump from operating. Be sure ther...

  • Page 61

    P.42 warning the pump casing, inlet piping and exhaust piping become extremely hot during operation and for some time after stopping. Be sure that pump and exhaust piping do not come in contact with humans or inflammable substances. Do not remove the pump cover during operation. Caution the exhaust ...

  • Page 62

    P.43 caution even when the cooling water flow rate drops, the pump will continue to operate until the pump part reach a temperature corresponding to the safety limit. The material selected for the water piping of facility side should have a heat resistance so that it can withstand a maximum temperat...

  • Page 63

    P.44 body front ferrule back ferrule nut 1 + 1/4 rotation fig. 4.2 tube fitting assembly caution for safety, be sure to use n 2 gas which purity is more than 99.999%. Impurities of n 2 gas may cause an accident when the pump is used for exhausting toxic and/or inflamable gases. 4.2.4 ventilation duc...

  • Page 64

    P.45 4.3 electrical wiring warning be sure to keep the power supply to the pump turned off and lock-outed until you have finished the wiring and connecting work. Also interrupt the circuit protector (cp) during this. Warning electrical wiring shall be carried out only by qualified electricians. Caut...

  • Page 65

    P.46 4.3.1 power supply wiring fig4.3.1,2,3 show the power supply connector and a control singnal connector position on the control panel. ・ model ev-s20 fig 4.3.1 power supply and control signal connects position ・ model ev-s50 fig 4.3.2 power supply and control signal connects position ext.Il lan ...

  • Page 66

    P.47 ・ model ev-s100/200 fig 4.3.3 power supply and control signal connects position warning be sure to connect the grounding wire. Caution use the correct wiring materials and size to match the operating conditions in accordance with the power consumption rating and ambient air temperature of the p...

  • Page 67

    P.48 table 4.2 pin assignment of power supply receptacle fig 4.4 power supply receptacle (as seen from connecting side) table 4.3 receptacle specification pump model model ev-s20 receptacle type c016 20c003 100 12 recep. Manufacturer amphenol adapted plug type c016 20d003 100 12 suitable wire awg #1...

  • Page 68

    P.49 4.3.2 control signal wiring connect wires to the control connector for remote operation and remote monitoring. Tables 4.6, 4.7, 4.8 and 4.9 and figs. 4.6 and 4.7 show the pin assignment. Table 4.6 receptacle specification connector no. Connector type cn-z 15 pin d sub-miniature female receptacl...

  • Page 69

    P.50 fig. 4.6 15 pin d sub-miniature female receptacle (as seen from connecting side) table 4.7 control connector pin assignment (cn-z: in accordance with semi-e73) pin. No. Signal name i/o signal type 1 mp start (+) in run:close, alternate 2 bp start (+) in run:close, alternate 3 mp start status (+...

  • Page 70

    P.51 fig. 4.7 25 pin d sub-miniature female receptacle (as seen from connecting side) table 4.8 control connector pin assignment (cn-y) pin no. Signal name i/o signal type 1 reset (+) in reset:close 2 saving energy control (+) in saving energy mode:close, alternate 3 reserved (+) in 4 reserved (+) i...

  • Page 71

    P.52 table 4.9 cn-z & cn-y signal contacts input signal output signal 12vdc 1kΩ open collector pump side circuit customer's connection dry contact 10ma min. 100ma max. Pump side circuit customer's connection open collector 4vdc-27vdc dry contact 100ma max. 4vdc-27vdc ems [ option] pm10u ebara corpor...

  • Page 72

    P.53 caution do not wire vacant pins. Caution apply a 12v dc power for input signals on the pump side. Do not apply this voltage on the equipment side. The output signals are generated from an open collector output. Please use it by the equipment side, impressing the power supply of dc4v to dc27v. C...

  • Page 73

    P.54 (3) operation control ・ push ems button to stop dry pump push red ems button (alternate) motor driver output is turned off and pump stops 6-19 pin at dsub-25 pins (cn- y) connector : close → open (see figure 4.7 and table 4.8) the following alarm is shown on lcd controller. ・ release ems check ...

  • Page 74

    P.55 4.4 safety interlock connector (connector ext.Il) hard interlock signal is output as the final safety protection byext.Il connector. Please intercept the power supply of the pump when hard interlock signal is open. (see 9. For semi s2 standard) plug hirose df1b-2ep-2.5rc plug pin (suitable wire...

  • Page 75

    P.56 5. Lcd controller 5.1 lcd outline [buttons] start for start of mp and bp stop for stop of mp and bp ▲ ▼ for changing lcd indication reset for resetting warning and alarm bz. Off for "buzzer mute in warning / alarm " prg. For changing screen of pump status and dip switch selection enter for usin...

  • Page 76

    P.57 5.2 lcd indication the operating status of the pump is displayed on the lcd of the controller. For details of display, see tables 5.1. Table 5.1 lcd controller indication no item indication 1 power b p : # # . # # k w m p : # # . # # k w 2 control mode pump running mode c o n t r o l : l o c a ...

  • Page 77

    P.58 lower row "$$$$$$" displays details of warning/alarm. 5. Total pump operating time gives the total hours of operation after shipment from the factory. 6. The display will return to the motor current indication when no operation takes place after the lapse of 1 minute. 7. Use the display select ...

  • Page 78

    P.59 power bp：##．## kw mp：##．## kw alarm：casing temp．high alarm/warning history？ enter warning：bp motor temp．high ev-s20 ***v &&&&&&&& ope．time #### h control：local mode：normal control mode: local, remote pump operational mode: normal (rated), s. Energy (energy-saving) 001 06 00 #### 020901 12：23：21...

  • Page 79

    P.60 table 5.2 alarm code list code code alarm name 1st code 2nd code warning name 1st cod e 2nd code mp casing temp. 50 01 cooling water flow low 00 01 bp motor temp. 51 00 mp casing temp. 05 01 mp motor temp. 52 00 high board inner temp. 13 00 water leakage ( ▲) 53 00 pump n2 flow low 18 01 emerge...

  • Page 80

    P.61 5.3 setting the operational mode this section describes how to set the operational mode. In the normal state, the lcd controller displays pump status. To display the operational mode setting screen, press the key “prg.” for three seconds or longer. Pressing the key for one second or longer agai...

  • Page 81

    P.62 set control mode? Set dip sw? Set running mode? Set normal speed？ set s.Energy speed? ▼ ▲ bp : ##.# kw mp : ##.# kw prg. Press the for 3 sec. Or more. ▼ ▲ ▼ ▲ ▼ ▲ • status display • setting the pump operation control mode • setting the dip switch • setting the pump running mode • setting the no...

  • Page 82

    P.63 5.3.1 setting the pump operation control mode a case of display if local mode selected. Remote mode : enables the remote operation (start/stop with external signals) local mode : enables the local operation (start/stop with the lcd controller) com mode : enables the communication operation (sta...

  • Page 83

    P.64 5.3.3 setting the pump running mode s.Energy mode: enables the energy-saving operation normal mode: enables the rated operation. The mode which is currently not set is displayed. If you do not need to set, press the key prg. To go back to the previous screen. 5.3.4 setting the rotational speed ...

  • Page 84

    P.65 5.3.5 setting the rotational speed in the s. Energy mode use the up and down arrow keys to change the setting value. △ : increase the setting speed by 0.1 kmin -1 . ▽ : decrease the setting speed by 0.1 kmin -1 upper limit mp/bp : the value lower than the set value for the rated speed lower lim...

  • Page 85

    P.66 5.3.7 setting the back pressure high warning threshold use the up and down arrow keys to change the setting value. △ ： increase the setting speed by 0.5 kpa ▽ ： decrease the setting speed by 0.5 kpa upper limit : 30.0 kpa lower limit : 5.0 kpa use the keys, ”▲” and ”▼” to set. Set point back pr...

  • Page 86

    P.67 5.4 dip switch set the dip switches to select the operating modes as shown in table 5.4 / 5.5 / 5.6. Table 5.4 dip switch-a settings no. Mode off on 1 data length 7 bits 8 bits 2 cooling water & n2 monitoring constant only during operation 3 buzzer not used used 4 operation switched to remote a...

  • Page 87

    P.68 dip sw-a. No. 2 this switch allows you to select out of “constant” or “only during operation ” for the cooling water and n2 monitoring. When “only during operation” is selected for the cooling water monitoring, monitoring will be continued for 15 minutes after the pump operation has stopped for...

  • Page 88

    P.69 [ note ] it takes ten odd seconds until the flow has stabilized after you have operated the n 2 gas selector valve. Dip sw-a. No. 8 when dip switch-a no. 8 has been set to the remote (remote operation) position, it is possible to operate the booster pump (bp) by selecting "automatic operation" ...

  • Page 89

    P.70 5.5 dip switch setting display fig 5.4 lcd controller key functions will be as follows on the setting display. Start : invalid stop this stops pump operation. Reset this resets warning and alarm. Bz.Off this switches the dip switch numbers. ▲ this sets the selected dip switch on. ▼ this sets th...

  • Page 90

    P.71 [note] when parameter setting of the dip switches, other than dip switch-a no.3 (buzzer) and b-8 (initializes the lcd screen), is performed, the lcd controller counts down 10 seconds, the same as at the power on state, right after the completion of the parameter setting. [note] if any warning o...

  • Page 91

    P.72 6. Operation 6.1 before starting (1) turn on the cooling water supply and check that there are no leaks at the pipe connections. Caution without sufficient cooling water, the pump temperature will rise and problems such as rotor contact will occur. [ note ] the pump unit itself has no cooling w...

  • Page 92

    P.73 operate the n 2 gas selector valve in accordance with the dilution n2 mode set by dip switch-a no. 7. If dip switch is set to off open valve. If dip switch is set to on close valve. [note] for normal operation, open the n2 gas selector valve. To save n2 gas set close the valve when the producti...

  • Page 93

    P.74 (7) when the warning/alarm display appears on the lcd controller or when any abnormal symptoms are found other than the display, take action in accordance with 10. "troubleshooting." even when the cause of the warning/alarm display has been removed, it is maintained until the reset signal is en...

  • Page 94

    P.75 6.2 start/stop the dip switches can be set at any time to select the remote/local/ communication modes and buzzer enabled function. Set in accordance with the operating conditions. (see 5.3. Setting the operational mode.) warning the pump and exhaust piping will remain at a high temperature dur...

  • Page 95

    P.76 when dip switch-a no. 4 is placed into the on position and this switch is changed from the local to the remote setting the pump will stop regardless of the external signal input. Pm10u ebara corporation.

  • Page 96

    P.77 6.2.1 local (pump side) start/stop a) start press the start button on the controller. The main pump (mp) will start and the mp run lamp on the controller will light. After this, the booster pump (bp) will start automatically and the b.P. Run lamp on the controller will light. The current is ind...

  • Page 97

    P.78 6.2.3 communication start/stop a) start input the "mp" start command from the comunication connector. The mp will start. In the case of dip sw a-8 ⇒ off : “mp” rotation reaches 3000 min-1, “bp” will start automatically. In the case of dip sw a-8 ⇒ on : “mp” rotation reaches 3000 min-1, input th...

  • Page 98

    P.79 7. Maintenance and inspection 7.1 internal energies following items show internal energies that shall be considered before start service maintenance. 7.1.1 power source this pump is supplied with ac200v power source. Aside from the pump, the accessory power source locating in the vicinity of th...

  • Page 99

    P.80 7.2 routine inspection check periodically that alarm signal is not output on the lcd controller or remote output. Table 7.1 typical check items no. Item how to check interval (recommended) １ motor power lcd 1 time/week 2 n 2 gas flow(ev-s**p / ev-s**p) lcd 3 vibration / noise ----- 4 cooling wa...

  • Page 100

    P.81 caution the pump will not stop when an warning signal is generated. When pump operation is continued in this condition an alarm signal will be generated or a serious breakdown will occur. Be sure therefore to check the pump in accordance with the instructions of section 10. "troubleshooting" af...

  • Page 101

    P.82 warning be sure to check for gas leaks after you have finished pipe maintenance work. Leaks will cause serious danger due to the discharge of harmful and hazardous substances and the occurrence of unpredictable reactions associated with the admission of air into the pump. When checking for gas ...

  • Page 102

    P.83 7.4 lubricating oil if the oil level is lower than the lower limit line of the oil level gauge in typical check and maintenance, supply the oil is needed. Follow the steps below to supply the oil. (1) stop the pump and remove the closing board (lcd connector side ) on the pump. (see figs. 7.1) ...

  • Page 103

    P.84 fig. 7.2 oil filler inlet, oil level gauge, and oil drain port positions fig. 7.3 oil level gauge caution be sure only to use the lubricant oils listed in specification table 3.1. Caution waste oil shall be disposed of by industrial waste disposal dealer in accordance with material safety data ...

  • Page 104

    P.85 caution when the lubrication oil level exceeds the upper limit, the oil may leak to the pump side. Thus, be sure no to exceed the upper limit line when adding the oil. Caution when the lubrication oil level is lower than the lower limit line, serious failure may be caused. If you find out the s...

  • Page 105

    P.86 7.6 list of wastes during maintenance table 7.4 lists wastes from general user maintenance. Dispose the wastes properly according to your local waste disposal regulations in each area. Table 7.4 list of wastes during maintenance part equipped on remarks lubricant oil inside of pump module. See ...

  • Page 106

    P.87 8. Disconnection and transportation warning when the pump has been used for exhausting highly toxic gases such as arsenic and mercury compounds, be sure to contact ebara corporation before you return the pump. Caution in the interest of safety during the transportation, disassembly and cleaning...

  • Page 107

    P.88 (6) put the lcd controller on the upper part of the pump. Fix it with the tape. (7) wrap the pump in a vinyl sheet. (8) use the lifting brackets provided on the pump for slinging the pump to load and unload. Fasten lifting brackets completely and push in until flush with the seating surface. Fo...

  • Page 108

    P.89 9. For semi s2 standard additional electrical parts required for semi application are shown in table 9.1. The process tool panel may provide these items or they may appear in an auxiliary control panel mounted on the pump or remotely. Table 9.1 necessary parts for semi s2 standard parts name co...

  • Page 109

    P.90 10. Troubleshooting warning interrupt circuit protector (cp) before starting on wiring and maintenance work. Do not switch on the power supply to the pump until work is completed. Warning the pump casing and exhaust piping become extremely hot during operation and for some time after stopping. ...

  • Page 110

    P.91 10.1 troubleshooting (1) basic trouble abnormal symptom check item corrective action circuit protector is activated. Incorrect wiring check wiring. Short circuit replace or overhaul pump. Nothing appears on lcd no power supply to pump. Check power supply. Connector is not connected. Connect pow...

  • Page 111

    P.92 10.2 troubleshooting (2) warning display symptom check item corrective action warn: water flow low water flow is reduced. Coupler is disconnected. Connect coupler. Pressure is not sufficient. Apply sufficient pressure. Root valve is closed. Open valve. Water pipe is clogged. Clean or replace pi...

  • Page 112

    P.93 10.3 troubleshooting (3) alarm display symptom check item corrective action alarm: water flow low water flow is reduced. Coupler is disconnected. Connect coupler. Pressure is not sufficient. Apply sufficient pressure. Root valve is closed. Open valve. Water pipe is clogged. Clean or replace pip...

  • Page 113

    P.94 10.4 troubleshooting (4) option display symptom check item corrective action alarm: water leakage water leakage tube fittings are loosened. Re-tighten. Instrument failure replace instrument. Alarm : back press.High exhaust pressure rises. Exhaust valve is closed. Check exhaust pipe. Accumulatio...