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SEREN R301 Operator's Manual

Manual is about: RADIO FREQUENCY POWER SUPPLY

Summary of R301

  • Page 1

    Seren industrial power systems inc. R301 radio frequency power supply operator’s manual revision: 0.05 standard configuration preliminary serial interface not implemented document number 6100130000 seren industrial power systems, inc. 1717 gallagher drive vineland, new jersey, 08360 u.S.A telephone:...

  • Page 2

    R301 rf power supply operator’s manual introduction thank you for acquiring your new seren ips product. The r301 radio frequency power supply has been designed to provide the best value, ease of operation, and reliability for plasma processing systems. This manual covers specifications, installation...

  • Page 3

    R301 rf power supply operator’s manual table of contents safety notes ………………………………………………………………………... 3 r301 rf power supply features ……………………………………………..……. 5 physical dimensions ………………………………………………………..……… 6 installation ……………………………………………………………………….… 8 front panel controls and display ………………………………………...

  • Page 4

    R301 rf power supply operator’s manual safety notes point equipotential bonding ! Ground = protective = caution = high voltage = radio frequency energy hazard = the r301 rf power supply has been designed and tested to meet strict safety requirements. These include independent lab examination and app...

  • Page 5: Caution!

    R301 rf power supply operator’s manual never push objects of any kind into the slots and openings of the r301 rf power supply’s enclosure. They may touch dangerous voltage points or short out parts, which could result in a fire or electric shock. Never spill liquid of any kind on or into the r301 rf...

  • Page 6

    R301 rf power supply operator’s manual r301 radio frequency power supply features the r301 rf power supply is intended for use with radio frequency plasma processing systems and radio frequency processing applications. The r301 rf power supply provides a 13.56mhz, level-controlled radio frequency po...

  • Page 7

    R301 rf power supply operator’s manual physical dimensions on / off r301 radio frequency power supply power o i seren industrial power systems rf 0.00 [0.00] 5.25 [133.35] 3.75 [95.25] 1.50 [38.10] 0 .0 0 [ 0. 0 0 ] 0 .3 0 [ 7. 5 7 ] 9 .5 0 [2 4 1. 3 0 ] 9 .2 0 [2 3 3. 7 6 ] front view, r301 rf powe...

  • Page 8

    R301 rf power supply operator’s manual 0.00 [0.00] 0.89 [22.50] 1.86 [47.12] 2.62 [66.47] 4.32 [109.60] 0. 00 [0 .0 0] 2. 59 [6 5. 81 ] 5. 31 [1 34 .9 5] 0. 87 [2 2. 15 ] 5.25 [133.35] 8. 00 [2 03 .2 0] a a n 1 cex out cex in o g l l power rf out a r e i s ! Dcp rear view, r301 rf power supply dimen...

  • Page 9

    R301 rf power supply operator’s manual installation: recommended mounting: the r301 rf power supply is designed for placement on a tabletop or on a shelf within an equipment rack, with another ½ rack 3u piece of equipment, in a clean environment. The table or equipment rack must be capable of suppor...

  • Page 10

    R301 rf power supply operator’s manual rf output connection: connect the r301 rf power supply’s rf output to a suitable load via a coaxial cable. Depending on the load configuration and application, several coaxial cable types may be used. Consult with the seren ips inc. Sales department, customer s...

  • Page 11

    R301 rf power supply operator’s manual front panel controls and display: buttons item name description 1 program/run toggles the r301 rf power supply between the run mode and program mode. In program mode, display line 3 changes to show programmable menu entry options. The button legend changes from...

  • Page 12

    R301 rf power supply operator’s manual display the front panel display shows the operational status of the r301 rf power supply and provides legends for the keypad. Line description 1 power display line displays power setpoint and reflected power when the rf output is disabled. Displays forward powe...

  • Page 13

    R301 rf power supply operator’s manual operation front panel operation of the r301 rf power supply is simple. This section describes the use and operation of the front panel controls in a “how to…” manner. Refer to the front panel illustration on the previous page for item references. Connect the r3...

  • Page 14

    R301 rf power supply operator’s manual 2. Press the down button (item 2) or the up button (item 3) until line 3 of the display shows the current control source (panel control, analog control, or serial control). 3. Press the value up button (item 5) or the value down button (item 6) until analog con...

  • Page 15

    R301 rf power supply operator’s manual · the “voltage” (vlt) leveling mode uses an external feedback voltage (derived from a voltage probe in the processing system’s matching network or processing chamber) to regulate the rf output power. To select a leveling mode, follow the directions below: forwa...

  • Page 16

    R301 rf power supply operator’s manual 6. Press the “value up” button (item 5) or “value down” (item 6) until line 3 of the display indicates the desired power leveling mode, “load power leveling”. 7. Press the “ent” button (item 4) to save the mode selection. 8. Press the “run” button (item 1) to e...

  • Page 17

    R301 rf power supply operator’s manual basic analog interface operation refer to the rear panel controls and connections and the typical interface connections sections for detailed analog interface operation and connection information. Connect the r301’s rf output to a 50-ohm, 500 watt resistive loa...

  • Page 18

    R301 rf power supply operator’s manual note: the rfon* signal is edge triggered. A transition from a ttl “high” to ttl “low” logic state must occur to enable the rf output. This prevents accidental enabling of the rf output when the rf power supply is powered-up in the analog control mode or when th...

  • Page 19

    R301 rf power supply operator’s manual basic serial interface operation refer to the rear panel controls and connections section for serial interface connection details. Serial commands are detailed in the serial commands section. Serial interface protocol is rs-232, with 8 data bits, 1 stop bit, no...

  • Page 20

    R301 rf power supply operator’s manual d. Press the run button (item 5) to exit the programming menu. 5. Send the desired serial command to the r301 rf power supply. Serial commands the underscore character ( _ ) indicates a space, terminators are specified as carriage return– line feed or carriage ...

  • Page 21

    R301 rf power supply operator’s manual character #3: setpoint source 2 = serial interface, 1 = analog interface, 0 = front panel character #4: status flags (bit-mapped ascii) bit 3: 1 = rf on, 0 = rf off bit 2: 1 = reflected limit active, 0 = reflected limit inactive bit 1: 1 = max power limit activ...

  • Page 22

    R301 rf power supply operator’s manual command. A negative (-) polarity signal is assumed. Command: 0? Response: -xxxx dr select voltage control mode selects the analog interface connector’s feedback signal as the feedback source for regulating the rf output level. Related commands: “v?”, “0?”, and ...

  • Page 23

    R301 rf power supply operator’s manual response: s disable the rf output command: s response: w set the power setpoint command: xxxx_w where xxxx is the desired setpoint, in 1-watt increments, 1 to 4 digits. Response: v set the voltage setpoint command: xxxx_v where xxxx is the desired voltage setpo...

  • Page 24

    R301 rf power supply operator’s manual noecho disable echo mode suppresses the echo of commands. Response for accepted (acknowledged) commands is . Response for invalid commands is n command: noecho response: page 23 seren ips inc. 6100130000 rev. 0.05.

  • Page 25

    R301 rf power supply operator’s manual serial command reference chart notes: the underscore character ( _ ) indicates a space indicates carriage return - line feed terminator indicates carriage return terminator. Prompt character is the greater-than (>) symbol the letter “x” indicates a variable cha...

  • Page 26

    R301 rf power supply operator’s manual to send description/comment select voltage control mode dr sets the analog interface connector feedback signal as the feedback source for regulating the rf output level. Response: select power control mode ir sets the unit’s internal power sensor as the feedbac...

  • Page 27

    R301 rf power supply operator’s manual to send description/comment response: set the process pulse low power setpoint xxxx_lp xxxx is the process pulse low power setpoint, in watts. 1 to 4 digits. Response: set the process pulse high power setpoint xxxx_hp xxxx is the process pulse high power setpoi...

  • Page 28

    R301 rf power supply operator’s manual configuring programmable parameters navigating the programming menu to enter the programming mode, press the “pgm” button (program/run button – item 1) on the front panel. The legend above the button will change from “pgm” to “run”. To exit the programming mode...

  • Page 29

    R301 rf power supply operator’s manual level parameter display line 3 option 6 output power range select high range low range 0-300w output* 0-30w output 7 exciter mode (frequency source) select exciter- master exciter- slave internal source* external cex input 8 maximum output power enter max power...

  • Page 30

    R301 rf power supply operator’s manual programmable parameter details: level parameter detail control source: selects the interface used as the control source for the r301 rf power supply. Panel control selects the front panel keypad as the control source. Rf on/off and power setpoint commands from ...

  • Page 31

    R301 rf power supply operator’s manual level parameter detail power control: uses the r301’s internal power sensor as the feedback source for regulating the rf output level. Line 1 of the front panel display indicates forward power setpoint, in watts, when the rf output is off, indicates forward or ...

  • Page 32

    R301 rf power supply operator’s manual level parameter detail 7 exciter mode (frequency source) select: exciter- master: the unit uses its internal frequency source to generate the rf output signal. In “master” mode, the internal frequency source is available at the cex out connector on the rear pan...

  • Page 33

    R301 rf power supply operator’s manual level parameter detail 12 dc voltage control gain factory default setting is 100% matching network preset mode: enables or disables the matching network preset feature and configures the behavior of the analog interface connector rfenabled* signal (pin 8) when ...

  • Page 34

    R301 rf power supply operator’s manual level parameter detail factory default setting is 50% 15 tune capacitor preset position: sets the tune capacitor preset position voltage output for an external matching network. Adjustable from 0% (0.0vdc output) to 100% (+5.0vdc), in 1% (50mv) increments. With...

  • Page 35

    R301 rf power supply operator’s manual rear panel controls and connections 4 6 5 2 1 7 3 9 a a n 1 cex out cex in o g l l power rf out a r e i s ! Dcp 8 1. Rf output type “n” female rf connector. Connect a 50-ohm coaxial cable from the rf output connector to a 50-ohm load (50-ohm 300 watt resistive ...

  • Page 36

    R301 rf power supply operator’s manual connect the supplied power cord to the power inlet and connect to mains power. If the power cord is lost or damaged, replacement cords are available from seren ips inc. Or can be purchased locally. When purchasing a power cord from a local vendor, ensure the re...

  • Page 37

    R301 rf power supply operator’s manual when in slave mode, the r301 rf power supply uses the common exciter input as its frequency source. 7. Fan exhaust keep fan exhaust free of obstructions, dust and dirt. When the r301 rf power supply is mounted in an enclosure or equipment rack, ensure there is ...

  • Page 38

    R301 rf power supply operator’s manual pin signal name description this signal is active in panel, analog, or serial control modes 2 interlock external interlock. Ttl – compatible input, active low, with an internal pull-up resistor. A contact closure between pin 2 and pin 15 or a ttl “low” signal a...

  • Page 39

    R301 rf power supply operator’s manual pin signal name description 7 gate external pulse train input. Toggles output power between setpoint value and 0 watts. Ttl - compatible input with internal pull-up resistor. An open circuit or ttl “high” signal applied to pin 7 holds the rf output to the setpo...

  • Page 40

    R301 rf power supply operator’s manual pin signal name description pre-position seren ips inc. At-series matching networks. Refer to “matching network preset mode”, “tune capacitor preset position”, and “load capacitor preset position” in the programmable parameters section. Measure monitor voltage ...

  • Page 41

    R301 rf power supply operator’s manual pin signal name description chassis ground. 18 gndi ground return for pins 3,4,5,6,7,8,13,19. Internally connected to chassis ground. 19 rl-in remote limit input. Analog input, 0 to +5vdc range. Use pin 16,17,18, or 21 (gndi) for return reference. Used in dual-...

  • Page 42

    R301 rf power supply operator’s manual typical interface circuits figures 1 through 5 illustrate the typical circuits used in the r301 rf power supply’s analog interface. Rfenabled* output circuit: rf output status signal. Active low, open collector output. 12vdc maximum, 15ma maximum current sink, ...

  • Page 43

    R301 rf power supply operator’s manual figure 2: ttl-compatible input circuits setpoint input circuit high-impedance, high common-mode rejection ratio, differential analog input. Input voltage range is software selectable 0 to +5.0vdc or 0 to +10.0vdc via the front panel controls. Note: the setpoint...

  • Page 44

    R301 rf power supply operator’s manual monitor output circuit analog output, selectable 0 to +5vdc or 0 to +10vdc range via front panel controls. Normal function is forward or reflected power monitoring, but can be configured to pre- position seren ips inc. At-series matching networks. See the progr...

  • Page 45

    R301 rf power supply operator’s manual 9. Serial interface connector the serial interface provides remote control and monitoring of the r301 rf power supply via a computer. Serial interface protocol is rs-232. Baud rates are selected via the front panel. Connector type: 9 pin “d” female for serial o...

  • Page 46

    R301 rf power supply operator’s manual typical interface connections analog control there are many possible analog interface wiring schemes. Basic analog interface connections are diagrammed below. Refer to the analog interface connector pin list in the rear panel controls and connections section fo...

  • Page 47

    R301 rf power supply operator’s manual external feedback with probe inverter option the r301 rf power supply’s external feedback input (feedback, analog interface connector pins 12 and 24) only accepts a positive (+) polarity signal. The probe inverter feature allows the r301 rf power supply to util...

  • Page 48

    R301 rf power supply operator’s manual external feedback with seren ips at-series matching networks external feedback is also available when using a seren ips inc. At-series automatic impedance matching network (purchased separately). In this application, there is no connection between the r301’s an...

  • Page 49

    R301 rf power supply operator’s manual typical system configuration a basic plasma processing system configuration is diagrammed below. Other system configurations are possible. For assistance with system configuration issues, contact the seren ips inc. Customer service department or a seren ips inc...

  • Page 50

    R301 rf power supply operator’s manual maintenance the r301 radio frequency power supply is designed to be maintenance free. There are no user maintainable assemblies inside the unit. The r301 rf power supply is designed for use in a clean environment. Periodically check the air inlets and exhaust f...

  • Page 51

    R301 rf power supply operator’s manual problem solving problem solving chart the following chart lists some conditions that may occur and the recommended solutions. Follow the suggested solutions until the problem is corrected. If the problem persists, please contact seren ips inc. Customer service ...

  • Page 52

    R301 rf power supply operator’s manual condition suggested solution source signal. Ensure the setpoint signal is connected to the analog interface connector with shielded cable. The text “ext” is shown on line 2 of the front panel display the analog interface “interlock” signal is at a ttl “high” st...

  • Page 53

    R301 rf power supply operator’s manual technical data ac mains input power voltage taps: 98v, 115v, 208v, or 220v; single-phase, factory configured. Specify desired ac mains voltage at time of order. Voltage taps are set to the most appropriate setting at the factory. Frequency: 47-63 hz power requi...

  • Page 54

    R301 rf power supply operator’s manual spurious radiation: designed to meet or exceed fcc requirements. Harmonics: -50dbc noise, hum, and ripple: -50dbc environment: operating temperature, ambient: 0 to +40°c operating relative humidity: 10% to 90%, non-condensing cooling: forced air, 110 cfm interf...

  • Page 55

    R301 rf power supply operator’s manual seren 1 year limited warranty seren ips inc. Products are warranted to the original purchaser against defects in material and workmanship for a period of one year from the date of delivery. Seren ips inc. Will repair or replace, at its option, all defective pro...

  • Page 56

    R301 rf power supply operator’s manual glossary of terms a amperes, a measurement unit of current ac alternating current anlg abbreviation, “analog” chamber industry term for a vacuum chamber used in plasma processing equipment. Common exciter (cex) a method of using an external frequency source to ...

  • Page 57

    R301 rf power supply operator’s manual rf radio frequency rf generator industry term for radio frequency power supply ttl transistor-transistor logic tuner industry term for an impedance matching network vac volts, alternating current vdc volts, direct current vlt abbreviation, “voltage” voltage con...

  • Page 58

    R301 rf power supply operator’s manual page 57 seren ips inc. 6100130000 rev. 0.05 revision history: revision date revision description 0.01 1019/03 preliminary 0.02 10/27/03 updated table of contents, analog interface, and technical data sections. 0.03 12/18/03 deleted “a” from model number, update...