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Varian 947 Operation And Service Manual - 1.8 Storage

Manual is about: Leak Detectors

Summary of 947

  • Page 1

    Vacuum technologies operation and service manual models 947, 948 and 960 leak detectors part no. 699909947 revision h march 2003.

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    Models 947, 948 and 960 leak detectors operations and service manual copyright 2003 varian vacuum technologies models 947, 948 and 960 leak detectors contra-flow, macrotorr, triscroll and convectorr are trademarks or registered trademarks of varian vacuum technologies. Apiezon is a registered tradem...

  • Page 3: Table Of Contents

    Iii models 947, 948 and 960 leak detectors operations and service manual table of contents declaration of conformity ............................................................................................................ Xiii warranty ...............................................................

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    Models 947, 948 and 960 leak detectors operations and service manual iv section 2. Leak detector integration .............................................................................................. 2-1 2.1 physical considerations ...................................................................

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    Models 947, 948 and 960 leak detectors operations and service manual v 4.2.4.1 removal of the spectrometer tube and preamplifier .................................. 4-12 4.2.4.2 disassembly of the spectrometer tube and preamplifier ............................ 4-14 4.2.4.3 spectrometer tube cleaning ...

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    Models 947, 948 and 960 leak detectors operations and service manual vi b.1.2 removing the top panel ...........................................................................................B-3 b.1.3 replacing all panels and covers .....................................................................

  • Page 7

    Models 947, 948 and 960 leak detectors operations and service manual vii appendix c. Communications protocol ......................................................................................... C-1 c.1 protocol (rs-232)...............................................................................

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  • Page 9: List Of Figures

    Ix models 947, 948 and 960 leak detectors operations and service manual list of figures figure description page 1-1 947 leak detector............................................................................................................... 1-2 1-2 948/960 leak detector.............................

  • Page 10

    Models 947, 948 and 960 leak detectors operations and service manual x b-8 the turbo power connection ...........................................................................................B-11 b-9 radiator clamp holding fan to turbo..................................................................

  • Page 11: List Of Tables

    Xi models 947, 948 and 960 leak detectors operations and service manual list of tables table description page 2-1 valve operation ................................................................................................................. 2-3 2-2 j120 input connections ............................

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  • Page 13: Declaration Of Conformity

    Varian vacuum technologies 121 hartwell avenue lexington, ma, 02421-3133 usa declare under our sole responsibility that the product, erklären, in alleniniger verantwortung, daß dieses produkt, déclarons sous notre seule responsabilité que le produit, declaramos, bajo nuestra sola responsabilidad, qu...

  • Page 14: Warranty

    Models 947, 948 and 960 leak detectors operations and service manual xiv warranty products manufactured by seller are warranted against defects in materials and workmanship for twelve (12) months from date of shipment thereof to customer, and seller’s liability under valid warranty claims is limited...

  • Page 15: Factory Calibration Data

    Models 947, 948 and 960 leak detectors operations and service manual xv factory calibration data model number: date: serial number: initials: your varian 947/948/960 leak detector has been thoroughly tested prior to shipment. It is shipped tuned to helium on filament no. 1. Normally, once set, the t...

  • Page 16

    Models 947, 948 and 960 leak detectors operations and service manual xvi hazard and safety information this manual uses the following standard safety protocols: warning the warning messages are for attracting the attention of the operator to a particular procedure or practice which, if not followed ...

  • Page 17

    Models 947, 948 and 960 leak detectors operations and service manual xvii solvents caution the mechanical components of leak detectors are typically cleaned with alcohol, methanol, or other solvents. When heated, sprayed, or exposed to high-temperature equipment, these solvents become flammable and ...

  • Page 18

    Models 947, 948 and 960 leak detectors operations and service manual xviii equipment, general warning the leak detector is not designed for use with hazardous gases. Verify that the system to be tested has been purged of all hazardous gases prior to using the leak detector.When testing a system that...

  • Page 19

    Models 947, 948 and 960 leak detectors operations and service manual xix warning electrical insulation must include the appropriate branch circuit (at least 20 a), with long time delay and a reliable earth ground. Do not use an extension cord. Use only the power cord that was provided with your leak...

  • Page 20

    Models 947, 948 and 960 leak detectors operations and service manual xx vacuum equipment and cleanliness cleanliness is vital when servicing the leak detector or any vacuum equipment. There are some techniques that are more important in leak detector servicing than in general vacuum work: caution do...

  • Page 21

    Models 947, 948 and 960 leak detectors operations and service manual xxi note vacusolv, included in the component and spectrometer tube cleaning kit (part no. 670029096), is recommended for cleaning the spectrometer tube components. Vacusolv can also be used for fine cleaning of other parts in the l...

  • Page 22: Varian Services

    Models 947, 948 and 960 leak detectors operations and service manual xxii varian services the following are just a few of the many services that varian offers its customers. Please see our catalog, or contact us to learn of the services that are available. Contact varian vacuum technologies customer...

  • Page 23: 960 Leak Detectors

    1-1 models 947, 948 and 960 leak detectors operations and service manual section 1. Introduction to models 947, 948 and 960 leak detectors varian vacuum technologies’ model 947, model 948 and model 960 are platform auto-test ® helium mass spectrometer leak detectors. In this manual, these leak detec...

  • Page 24

    Models 947, 948 and 960 leak detectors operations and service manual 1-2 the model 947 is shown in figure 1-1. Descriptions of the turret and operational buttons identified in figure 1-1 follow the figure. Models 948/960 are shown in figure 1-2. Figure 1-1 947 leak detector ➀ turret enclosure for se...

  • Page 25

    Models 947, 948 and 960 leak detectors operations and service manual 1-3 models 948/960 are shown in figure 1-2. The door on the working surface of the 948/960 provides access to the nitrogen cold trap. Descriptions of the turret, operational buttons, and nitrogen trap identified in figure 1-2 follo...

  • Page 26: 1.1 Platform Electronics

    Models 947, 948 and 960 leak detectors operations and service manual 1-4 1.1 platform electronics the 947/948/960 use varian vacuum technologies’ platform leak detector electronics architecture to: ❑ operate the spectrometer assembly ❑ control the mechanical and high vacuum pumps ❑ control the valve...

  • Page 27

    Models 947, 948 and 960 leak detectors operations and service manual 1-5 5. Remove any loose boxes or packages and put them aside. Keepthe original packing for re-use in the event that it is necessary to return the leak detector to varian vacuum technologies. 6. Carefully remove the front brace by r...

  • Page 28

    Models 947, 948 and 960 leak detectors operations and service manual 1-6 1.2.3 removing loose packing from interior of 947/948/960 once the 947/948/960 is off the skid, the loose packing inside the enclosure must be removed. 1. Open the front panel of the 947/948/960, which is the main access to ser...

  • Page 29

    Models 947, 948 and 960 leak detectors operations and service manual 1-7 5 system pressure bar graph displays system pressure monitored at the inlet of the spectrometer tube on a 20-segment bar graph. The green portion of the graph indicates normal operating vacuum level. 6 transfer to fine test swi...

  • Page 30

    Models 947, 948 and 960 leak detectors operations and service manual 1-8 1.4 inner door instruction label thelabel on the inside of the lockable turret door (figure 1-4) provides: ❑ an abbreviated list of leak detector operating instructions to be used when the operator is familiar with normal opera...

  • Page 31

    Models 947, 948 and 960 leak detectors operations and service manual 1-9 1.5 rear panel power connection and circuit breakers figure 1-5 shows the rear power panel of the 947/948/960. Descriptions of the rear panel elements follow the figure. Figure 1-5 rear power panel rear panel power and circuit ...

  • Page 32: 1.6 Service Pendant

    Models 947, 948 and 960 leak detectors operations and service manual 1-10 1.6 service pendant the service pendant is used to set and display parameters for the 947/948/960 leak detector. It is a handheld terminal with a 40-key keypad and a 20 character x 4 line backlit lcd display (see figure 1-6). ...

  • Page 33

    Models 947, 948 and 960 leak detectors operations and service manual 1-11 1.7 installation preparation to prepare the 947/948/960 for operation: ❑ have power and liquid nitrogen (948/960 only) available ❑ check oil level of wet pumps ❑ adhere to special installation requirements for a clean room (if...

  • Page 34

    Models 947, 948 and 960 leak detectors operations and service manual 1-12 1.7.2 liquid nitrogen (models 948/960 only) the amount of liquid nitrogen needed to keep the cold trap operational is approximately three liters per day (slightly more on initial startup). Note add liquid nitrogen to the trap ...

  • Page 35: 1.8 Storage

    Models 947, 948 and 960 leak detectors operations and service manual 1-13 1.8 storage if the leak detector is not used immediately, it can be stored as received without special precautions. A dry, relatively dust-free area is preferred. The required environmental conditions for storage are: ❑ 0% to ...

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  • Page 37: 2.1 Physical Considerations

    2-1 models 947, 948 and 960 leak detectors operations and service manual section 2. Leak detector integration although models 947/948/960 are considered stand-alone units, all the models can be incorporated into a production line connected to a host computer or plc. This section details the setup an...

  • Page 38

    Models 947, 948 and 960 leak detectors operations and service manual 2-2 in figure 2-1 and figure 2-2 on page 2-4, valves are designated by numbers in white circles ( ➀ ), other key parts of the vacuum system are designated by numbers in black circles ( ➊ ). The key parts are identified below the fi...

  • Page 39

    Models 947, 948 and 960 leak detectors operations and service manual 2-3 table 2-1 serves two purposes. In the upper portion, the valve name and type are defined. In the lower portion, table 2-1 indicates the valve state (open or closed) in relation to the system status for testing the 947/948/960. ...

  • Page 40

    Models 947, 948 and 960 leak detectors operations and service manual 2-4 in figure 2-2, numbers in white circles designate the location of valves. Other key parts of the vacuum system, represented by numbers in black circles, are identified after figure 2-2. Figure 2-2 948 flow diagram ❶ thermocoupl...

  • Page 41

    Models 947, 948 and 960 leak detectors operations and service manual 2-5 in figure 2-3, numbers in white circles designate the location of valves. Other key parts of the vacuum system, represented by numbers in black circles, are identified after figure 2-3. Figure 2-3 960 flow diagram reservoir the...

  • Page 42

    Models 947, 948 and 960 leak detectors operations and service manual 2-6 2.3 electronic considerations for the optional rear panel interface this section includes information necessary to interface the 947/948/960 with a plc or a host computer using either serial or parallel communications through t...

  • Page 43

    Models 947, 948 and 960 leak detectors operations and service manual 2-7 2.3.2 bcd j121 outputs table 2-3 provides the j121 output connections. 23 ready active high active when system is operating (inverse of “not ready”). 25 ground return for j120 only 27, 28 +24 vdc for output sourcing table 2-3 j...

  • Page 44

    Models 947, 948 and 960 leak detectors operations and service manual 2-8 2.3.3 host serial port j123 pinouts the host serial port is used to interface the 947/948/960 to a plc or host computer via an rs-232 connection. Table 2-4 provides details about the connection. J123 connections are referenced ...

  • Page 45

    Models 947, 948 and 960 leak detectors operations and service manual 2-9 2.4 optional interface connections available ports for interface connection: ❑ service rs-232 serial port for a service pendant or host computer to monitor and change parameters in the 947/948/960 platform (j1 male 9-pin d conn...

  • Page 46

    Models 947, 948 and 960 leak detectors operations and service manual 2-10 2.4.2 setup parameters relating to the operation and performance of the 947/948/960 platform are stored in eprom. These parameters can be viewed and changed via the service pendant or rear serial ports. A standard host compute...

  • Page 47

    Models 947, 948 and 960 leak detectors operations and service manual 2-11 if the i/o on j120 is used, then: ❑ +5 vdc to +24 vdc must be applied to j120, pins 27 and 28. ❑ the +5 vdc to +24 vdc return must be connected to j120, pins 1 and 25. If the i/o on j121 is used, then: ❑ +5 vdc to +24 vdc must...

  • Page 48

    Models 947, 948 and 960 leak detectors operations and service manual 2-12 2.5 operation using the optional rear panel interface once setup is complete and the 947/948/960 is warmed up, operation can be turned over to the discrete i/o by asserting the parallel enable input (j120 pin 6). Operations ca...

  • Page 49: Section 3. Operation

    3-1 models 947, 948 and 960 leak detectors operations and service manual section 3. Operation to obtain accurate readings using the 947/948/960 leak detectors, follow the operational procedures listed in this section. The 947/948/960 measure the leak rate in atm cc/sec. The procedures explain how to...

  • Page 50

    Models 947, 948 and 960 leak detectors operations and service manual 3-2 during operation, the led functions are illuminated to indicate the operation being performed. The definitions of the operations are as follows: vent illuminates when the vent valve is open. The led is off when the valve is clo...

  • Page 51

    Models 947, 948 and 960 leak detectors operations and service manual 3-3 3.2 initial system parameter setup the 947/948/960 performs functions and tests based upon parameter values. Some parameters are entered and set when the system is assembled and tested. Some parameters are calculated and change...

  • Page 52

    Models 947, 948 and 960 leak detectors operations and service manual 3-4 range stop the range stop feature configures the 947/948/960 so that it only auto-ranges down to the pre-selected decade entered in the range stop variable field. For example, if range stop is enabled and set to − 07, then the ...

  • Page 53

    Models 947, 948 and 960 leak detectors operations and service manual 3-5 reject set points the reject set points are used to alert the operator that a mea- sured leak rate has exceeded the set value. There are four set points available. Each set point must be enabled before they are opera- tional. C...

  • Page 54

    Models 947, 948 and 960 leak detectors operations and service manual 3-6 a pass condition is indicated by the system reverting to the vent mode upon completion of the test cycle. A fail condition results in reject being displayed in the led display area, and a reject set point activation upon comple...

  • Page 55

    Models 947, 948 and 960 leak detectors operations and service manual 3-7 test time the test time variable determines the amount of time that the leak detector remains in test before it compares the measured leak rate with the selected reject set point. Sufficient time must be allowed for the leak ra...

  • Page 56: 3.3 Start-Up

    Models 947, 948 and 960 leak detectors operations and service manual 3-8 3.3 start-up to operate the 947/948/960, you need: ❑ test fixtures appropriate to the unit under test ❑ helium tank with spray gun or hook up for auto test (helium for the 948/960) figure 3-2 shows the important 947/948/960 ope...

  • Page 57

    Models 947, 948 and 960 leak detectors operations and service manual 3-9 ➀ power switch/circuit breaker main power switch and circuit breaker. ➁ rough pump switch powers the rough pump. ➂ detector switch powers the backing pump and high vacuum pump. ➃ start button starts the 947/948/960 testing rout...

  • Page 58

    Models 947, 948 and 960 leak detectors operations and service manual 3-10 3.3.1 startup procedure to perform the start-up procedure: 1. Locate the main power switch/circuit breaker ➀ on the back of the lower cabinet and turn it on. 2. Turn on the rough ➁ pump switch. 3. Turn on the detector ➂ switch...

  • Page 59

    Models 947, 948 and 960 leak detectors operations and service manual 3-11 3.4 calibration and sensitivity checks at the beginning of each workday or shift, or as conditions require, verify 947/948/960 integrity by performing the calibration and sensitivity check procedure. Compliance with this proce...

  • Page 60

    Models 947, 948 and 960 leak detectors operations and service manual 3-12 3.4.1 calibration and sensitivity checks to perform calibration and sensitivity checks: 1. Warm up the 947/948/960 for 30 minutes. 2. Place the test port plug in the test port opening ➅ . Refer to figure 3-2 on page 3-8. 3. Se...

  • Page 61: 3.5 Operating Procedures

    Models 947, 948 and 960 leak detectors operations and service manual 3-13 9. Be sure the test led is on, and press the auto cal button. Do not continue if a condition code is displayed. Consult the not ready condition code chart table 3-1 on page 3-11 and follow instructions. ❑ the std leak led is o...

  • Page 62

    Models 947, 948 and 960 leak detectors operations and service manual 3-14 3.5.1 auto ranging to use auto ranging for outside-in testing: 1. Press the vent button. Securely attach the new unit under test to the test port while the 947/948/960 is in vent mode. ❑ the test led goes off. ❑ the vent led i...

  • Page 63

    Models 947, 948 and 960 leak detectors operations and service manual 3-15 5. Press and hold the vent button approximately 1 second until the 947/948/960 is in vent mode. ❑ test led goes off. ❑ vent led illuminates. 6. Remove the unit under test from the test port. ❑ vent led is on. Auto ranging proc...

  • Page 64: 3.6 Standby

    Models 947, 948 and 960 leak detectors operations and service manual 3-16 7. Press and hold the vent button for approximately 1 second until the unit switches to the vent mode. ❑ the test led turns off. ❑ the vent led illuminates. Note if the vent button is pressed for less than one second, the leak...

  • Page 65

    Models 947, 948 and 960 leak detectors operations and service manual 3-17 3.8 using the pendant for parameter setup the service pendant is stored in the turret and is connected to models 947/948/960 at j1 in the turret for parameter changes, monitoring, or diagnostics. The pendant must be connected ...

  • Page 66: 3.9 Optional Discrete I/o

    Models 947, 948 and 960 leak detectors operations and service manual 3-18 several parameters relating to the operation and performance of the 947/948/960 platform are stored in eprom. These parameters are viewed and changed via the service or rear serial ports. Some parameters are set when the syste...

  • Page 67: Section 4. Maintenance

    4-1 models 947, 948 and 960 leak detectors operations and service manual section 4. Maintenance like other sensitive test equipment, a mass spectrometer leak detector requires periodic maintenance to ensure continued reliable operation. After prolonged use, the leak detector accumulates contaminants...

  • Page 68

    Models 947, 948 and 960 leak detectors operations and service manual 4-2 cleanliness is vital when servicing the leak detector or any vacuum equipment. The following are especially important in the servicing of leak detectors: caution do not use silicone oil or silicone grease. Use powder-free butyl...

  • Page 69

    Models 947, 948 and 960 leak detectors operations and service manual 4-3 due to the effective cleaning nature of vacusolv solvent and its residue-free properties, varian vacuum technologies’ component and spectrometer tube cleaning kit (varian p/n 670029096), used in accordance with the kit instruct...

  • Page 70

    Models 947, 948 and 960 leak detectors operations and service manual 4-4 on-demand maintenance functions are listed in table 4-2. Table 4-2 as-required maintenance most common symptom refer to trap almost empty, nearly 14 hours without a refill. “liquid nitrogen cold trap (models 948/960 only)” on p...

  • Page 71: 4.1 Daily Maintenance

    Models 947, 948 and 960 leak detectors operations and service manual 4-5 4.1 daily maintenance 4.1.1 calibration check to perform a calibration check: 1. Press the std leak button. 2. Compare the value displayed on the 947/948/960 to the value of the known calibrated leak listed on the label on the ...

  • Page 72

    Models 947, 948 and 960 leak detectors operations and service manual 4-6 4.1.1.2 general suggestions for leak checking the following suggestions apply whether leak checking components, systems, or the leak detector itself: 1. When spraying suspected leak locations: ❑ always apply helium sparingly. ❑...

  • Page 73: 4.2 Yearly Maintenance

    Models 947, 948 and 960 leak detectors operations and service manual 4-7 4.2 yearly maintenance 4.2.1 replacing the calibrated leak 4.2.2 re-calibrate the internal calibrated leak helium calibrated leaks typically degrade at 3 percent per year. The calibrated leak supplied with your 947/948/960 must...

  • Page 74

    Models 947, 948 and 960 leak detectors operations and service manual 4-8 to remove the internal calibrated leak: 1. Disconnect the mains power supply and make sure all pumps are off. Warning disconnect power from the 947/948/960 before performing any maintenance procedure that requires physically di...

  • Page 75

    Models 947, 948 and 960 leak detectors operations and service manual 4-9 4.2.2.2 replacing the internal calibrated leak to replace the calibrated leak: 1. Wipe the o-ring with a lint-free cloth to ensure that no foreign matter is present. Caution varian recommends replacing all used o-rings. Do not ...

  • Page 76

    Models 947, 948 and 960 leak detectors operations and service manual 4-10 4.2.3 liquid nitrogen cold trap (models 948/960 only) the trap should be refilled with liquid nitrogen (ln 2 ) as needed. A typical time frame for refilling is every 14 hours, depending on usage. During normal usage of the 948...

  • Page 77

    Models 947, 948 and 960 leak detectors operations and service manual 4-11 4.2.4 spectrometer tube overhaul spectrometer tube overhaul consists of removing, cleaning, and re-installing the 947/948/960 spectrometer tube assembly. Warning liquid nitrogen causes burns upon contact. Use appropriate prote...

  • Page 78

    Models 947, 948 and 960 leak detectors operations and service manual 4-12 4.2.4.1 removal of the spectrometer tube and preamplifier refer to figure 4-2 for the removal of the 947/948/960 spectrometer tube. Warning liquid nitrogen causes burns upon contact. Use appropriate protective devices, includi...

  • Page 79

    Models 947, 948 and 960 leak detectors operations and service manual 4-13 6. Disconnect all four electrical connections to the spectrometer tube ➀ . Note to remove the locking connector shown in figure 4-2, both metal tabs at the left of the connector must be pushed to unlock the connector, then pul...

  • Page 80

    Models 947, 948 and 960 leak detectors operations and service manual 4-14 4.2.4.2 disassembly of the spectrometer tube and preamplifier to disassemble the spectrometer tube: 1. Remove the four screws on the spectrometer tube (figure 4-3), noting the placement of the grounding strap ➀ . The grounding...

  • Page 81

    Models 947, 948 and 960 leak detectors operations and service manual 4-15 figure 4-3 spectrometer tube disassembly warning store the ion source in a cool, dry area in a tightly sealed container. Wash hands thoroughly after handling the ion source and especially before smoking or eating. Caution do n...

  • Page 82

    Models 947, 948 and 960 leak detectors operations and service manual 4-16 4.2.4.3 spectrometer tube cleaning to clean the spectrometer tube: 1. Use the scotch-brite ™ flexible abrasive pads from the spectrometer cleaning kit to remove heavy deposits from the ground slit plate, and spectrometer tube ...

  • Page 83

    Models 947, 948 and 960 leak detectors operations and service manual 4-17 6. Put the heater cartridge ➀ back in its cavity (figure 4-5). Figure 4-5 spectrometer tube reassembly (ground slit plate) 7. With the new o-rings on each of the two deflection pole pieces ➁ , insert the pole pieces into the s...

  • Page 84

    Models 947, 948 and 960 leak detectors operations and service manual 4-18 10. Fit the magnet assembly ➅ back onto the spectrometer tube body. 11. With the grounding strap ➆ attached to the same screw from which it was removed, replace and tighten the four screws that fit into the magnet assembly. 12...

  • Page 85

    Models 947, 948 and 960 leak detectors operations and service manual 4-19 4.2.4.5 reinstallation of the spectrometer tube warning liquid nitrogen causes burns upon contact. Use appropriate protective devices, including heavy loose gloves and eye or face shields. Note models 948/960 only: before serv...

  • Page 86

    Models 947, 948 and 960 leak detectors operations and service manual 4-20 4. Models 948/960 only: fill the liquid nitrogen cold trap using the procedure described in “liquid nitrogen cold trap (models 948/960 only)” on page 4-10, steps 5 and 6. 5. Reconnect power and start the leak detector and refe...

  • Page 87

    Models 947, 948 and 960 leak detectors operations and service manual 4-21 4.2.6 spectrometer tube exchange the spectrometer tube replaceable parts consist chiefly of the ion source, the preamplifier, the magnetic poles, and the spectrometer tube as a complete assembly. Note because of the complexity...

  • Page 88

    Models 947, 948 and 960 leak detectors operations and service manual 4-22 3. Hold the spectrometer tube against the centering ring, attach the nw25 clamp, and tighten the clamp fully. 4. Reconnect the ion source connector, the preamplifier locking d-sub connector, the molex connector to the heater, ...

  • Page 89

    Models 947, 948 and 960 leak detectors operations and service manual 4-23 4.2.7 tc1 and tc2 gauge replacement and calibration 4.2.7.1 replacement of the tc1 gauge in the main valve block assembly figure 4-10 shows the valve block removed from the system. Note it is not necessary to remove the valve ...

  • Page 90

    Models 947, 948 and 960 leak detectors operations and service manual 4-24 6. Examine the o-ring for wear. If necessary, use a new o-ring, otherwise clean the o-ring. Note before re-using o-rings or installing new o-rings, wipe them down with a lint-free cloth before installation to ensure that no fo...

  • Page 91

    Models 947, 948 and 960 leak detectors operations and service manual 4-25 4.2.7.2 replacement of the tc2 gauge in the service block assembly warning liquid nitrogen causes burns upon contact. Use appropriate protective devices, including heavy loose gloves and eye or face shields. Note models 948/96...

  • Page 92

    Models 947, 948 and 960 leak detectors operations and service manual 4-26 7. Clean the centering ring and adapter with acetone. Making sure all traces of pipe sealant are removed from the threads of the adapter. 8. Examine the o-ring for wear. If necessary, use a new o-ring, otherwise clean the o-ri...

  • Page 93

    Models 947, 948 and 960 leak detectors operations and service manual 4-27 4.2.7.3 thermocouple gauge calibration procedures use the service pendant to perform a calibration on either the system pressure thermocouple (tc2) or the test port thermocouple gauge (tc1). Refer to section a, “service pendan...

  • Page 94

    Models 947, 948 and 960 leak detectors operations and service manual 4-28 4.2.7.4.2 atmospheric calibration calibration of the system pressure thermocouple (tc2) gauge to atmosphere is only required if the system tc2 gauge is replaced or if the calibration appears to be off. Note do not replace the ...

  • Page 95

    Models 947, 948 and 960 leak detectors operations and service manual 4-29 4.2.7.5 test port pressure gauge (tc1) calibration this procedure allows for calibration of the test port pressure thermocouple gauge (tc1). Both the vacuum and atmospheric calibrations procedures must be performed in the orde...

  • Page 96

    Models 947, 948 and 960 leak detectors operations and service manual 4-30 9. Type xyzzy, then 100 init-tptczero. ❑ the system should respond ok. ❑ the test port pressure on the test port pressure bar graph should read 1.0e-01 torr. A failed response on the pc is an indication that the calibration wa...

  • Page 97

    Models 947, 948 and 960 leak detectors operations and service manual 4-31 4.2.8 rough pump and forepump oil level check (oil-sealed mechanical pumps) both the rough pump and forepump are equipped with an oil level sight glass that can be viewed when the front lower panel cover is removed (figure 4-1...

  • Page 98

    Models 947, 948 and 960 leak detectors operations and service manual 4-32 4.2.8.1 condition of oil (oil-sealed mechanical pumps) excess water in the oil of the rough pump or the forepump is indicated by a milky or frothy appearance. Refer to your pump manual for instructions. 4.2.9 cleaning the test...

  • Page 99

    Models 947, 948 and 960 leak detectors operations and service manual 4-33 2. Remove the test port compression ring and o-ring from the top of the test port (figure 4-14). Figure 4-14 remove the test port compression ring and o-ring 4.2.9.2 examining and cleaning the test port to perform this procedu...

  • Page 100: 4.3 Spare Parts

    Models 947, 948 and 960 leak detectors operations and service manual 4-34 4.2.9.3 replacing the test port to replace the test port: 1. Place the o-ring into the groove of the compression ring. 2. Place the compression ring and o-ring onto the top of the test port (figure 4-15). Figure 4-15 placing t...

  • Page 101

    Models 947, 948 and 960 leak detectors operations and service manual 4-35 table 4-4 lists the exchange assembly parts. 4.3.9.5 replacement parts table 4-5 lists the spare parts available for the 947/948/960. Table 4-4 exchange assembly parts section description part number spectrometer tube re-gauss...

  • Page 102

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  • Page 103: Section 5. Troubleshooting

    5-1 models 947, 948 and 960 leak detectors operations and service manual section 5. Troubleshooting this section explains how to solve common problems with your leak detector, by listing symptoms, possible causes, and actions that will correct the problem. The system automatically shows error condit...

  • Page 104: 5.1 Error Condition Codes

    Models 947, 948 and 960 leak detectors operations and service manual 5-2 5.1 error condition codes use table 5-1 to identify the problem by condition code or figure 5-2 to identify the symptom. Note a c6 condition code means that maintenance of this leak detector may soon be necessary. Notify varian...

  • Page 105

    Models 947, 948 and 960 leak detectors operations and service manual 5-3 5.2 troubleshooting symptoms and solutions table 5-2 lists the particular symptoms encountered when troubleshooting the leak detector. For every symptom, there is a list of possible causes and actions you can take to remedy the...

  • Page 106

    Models 947, 948 and 960 leak detectors operations and service manual 5-4 call varian vacuum technologies customer service for any other problems. Note varian vacuum technologies will not accept any part for return without both a properly completed return materials authorization (rma) and a health an...

  • Page 107: A.1 Keypad Functions

    A-1 models 947, 948 and 960 leak detectors operations and service manual appendix a. Service pendant keypad functions a.1 keypad functions figure a-1 shows the service pendant keypad. “glossary of function keys” on page a-3 explains the keys that perform special functions when entering information. ...

  • Page 108

    Models 947, 948 and 960 leak detectors operations and service manual a-2 a.1.1 using the service pendant each function is printed in black in the center of the key (for example, rej#). Some functions require the input of a number before the function key is pressed. Other functions, such as queries, ...

  • Page 109

    Models 947, 948 and 960 leak detectors operations and service manual a-3 a.2 glossary of function keys shift performs the red function on the key pressed after the shift key. Lk rate e enters the e for exponential notation inputs such as reject set point. [shift] lk rate e displays the current leak ...

  • Page 110

    Models 947, 948 and 960 leak detectors operations and service manual a-4 a.3 glossary of input and data keys the keys listed below start at the top of the keypad and continue from left to right. Set rng st show displays the value of the range stop, the lowest decade that the leak detector will show ...

  • Page 111

    Models 947, 948 and 960 leak detectors operations and service manual a-5 [shift] emis show gain displays the value of the emission current in the ion source. Turbo show ion v displays the value of the ion voltage in the ion source. [shift] turbo show ion v displays the status of the turbo pump in th...

  • Page 112

    Models 947, 948 and 960 leak detectors operations and service manual a-6 note system tc being at atmosphere is not a normal state for the leak detector. The turbo pump must be turned off, and the spectrometer tube must be vented by operating the valves or by opening the vent screw on the turbo pump....

  • Page 113

    Models 947, 948 and 960 leak detectors operations and service manual a-7 [shift] set tst tm show sets the value of the auto sequencer test time. Enter xxx (the desired value), followed by the shift key, then the function key. Set ruf tm show displays the value of the auto sequencer roughing time. [s...

  • Page 114

    Models 947, 948 and 960 leak detectors operations and service manual a-8 [shift] set std lk show sets the leak rate value to which the leak detector calibrates. Enter x.Xe-x (the desired value), followed by the shift key, then the function key. Rej3 set rej 1 sets the leak rate value for reject set ...

  • Page 115: B.1 Removing The Covers

    B-1 models 947, 948 and 960 leak detectors operations and service manual appendix b. Parts replacement this appendix contains the following parts replacement procedures: ❑ “removing the covers” on page b-1 ❑ “replacing the ion source” on page b-6 ❑ “turbo pump” on page b-9 ❑ “replacing the rough pum...

  • Page 116

    Models 947, 948 and 960 leak detectors operations and service manual b-2 b.1.1 opening the turret the turret opens by unlocking and lifting its cover. To remove the top cover, you must remove the shelf that the service pendant sits on. B.1.1.1 removing the service pendant shelf to remove the service...

  • Page 117

    Models 947, 948 and 960 leak detectors operations and service manual b-3 b.1.2 removing the top panel the top panel is one piece that includes the turret and its door, a covering of the sides of the control and display panel, and the stainless steel top of the 947/948/960. To remove the 947/948/960 ...

  • Page 118

    Models 947, 948 and 960 leak detectors operations and service manual b-4 6. Remove the three, 5-16 screws from under the front of the top cover (figure b-4). Figure b-4 the top panel from the front of the 947/948/960 7. Lift the top panel from the chassis. B.1.3 replacing all panels and covers b.1.3...

  • Page 119

    Models 947, 948 and 960 leak detectors operations and service manual b-5 b.1.3.2 replacing the top panel warning ❑ be sure power is disconnected from the leak detector before attempting to replace the top cover. The start button could be pressed while maneuvering the cover into place and the leak de...

  • Page 120

    Models 947, 948 and 960 leak detectors operations and service manual b-6 b.2 replacing the ion source if the ion source needs replacement (figure b-5), replace it during spectrometer tube cleaning. Adjustment is required after replacement is complete. Refer to “calibration and sensitivity checks” on...

  • Page 121

    Models 947, 948 and 960 leak detectors operations and service manual b-7 2. Remove the four phillips head screws that hold the flange cap ➀ onto the body of the spectrometer tube ➁ (figure b-5). 3. Firmly but gently separate the flange cap from the ion source ➂ . 4. Remove the ion source. Examine it...

  • Page 122

    Models 947, 948 and 960 leak detectors operations and service manual b-8 11. When installing the ground slit plate, be sure that the snap prongs are facing up. Align the slit at 90° with the side wall of the spectrometer tube and concentrically align the circular hole in the plate with the smaller g...

  • Page 123

    Models 947, 948 and 960 leak detectors operations and service manual b-9 b.3 replacing the turbo pump models 947/948/960 have one turbo pump and two mechanical pumps: a forepump and a rough pump. B.3.1 turbo pump the turbo pump (figure b-6) is located in the middle front of the main cabinet. You mus...

  • Page 124

    Models 947, 948 and 960 leak detectors operations and service manual b-10 b.3.1.1 removing the turbo pump to replace the turbo pump: 1. Disconnect the mains power supply and make sure that all pumps are off. Warning disconnect power from the 947/948/960 before performing any maintenance procedure th...

  • Page 125

    Models 947, 948 and 960 leak detectors operations and service manual b-11 4. Follow the power wire from the fan to two pink connectors labeled 1 + and 2 − . If the connections are not fully labeled, label them now (figure b-8). Figure b-8 the turbo power connection 5. Loosen the radiator clamp screw...

  • Page 126

    Models 947, 948 and 960 leak detectors operations and service manual b-12 6. Loosen the wing nut and remove the nw25 clamp that connects the foreline to the turbo (figure b-7 on page b-10). 7. Remove the centering ring and o-ring and place them on a clean surface. Caution at this point the pump is h...

  • Page 127

    Models 947, 948 and 960 leak detectors operations and service manual b-13 3. Before re-using o-rings or installing new o-rings, wipe them down with a lint-free cloth to ensure that no foreign matter is present to impair the seal. Caution remove o-rings carefully with your fingers. Do not use metal t...

  • Page 128

    Models 947, 948 and 960 leak detectors operations and service manual b-14 7. Place the foreline against the turbo flange centering ring and o-ring. Note gently pivot the turbo pump until it is in the position to make the connection without placing stress on the manifold. The claw clamps should be lo...

  • Page 129

    Models 947, 948 and 960 leak detectors operations and service manual b-15 b.4 replacing the rough pump b.4.1 wet systems this discussion includes procedures for replacing rough pumps in wet systems (“removing the wet system rough pump” on page b-16) and rough pumps in dry systems (“removing the dry ...

  • Page 130

    Models 947, 948 and 960 leak detectors operations and service manual b-16 b.4.1.1 removing the wet system rough pump to perform this procedure: 1. Disconnect the mains power supply and make sure that all pumps are off. Warning disconnect power from the 947/948/960 before performing any maintenance p...

  • Page 131

    Models 947, 948 and 960 leak detectors operations and service manual b-17 8. Remove the centering ring and o-ring and place all connections where the oil will not contaminate other parts. 9. Remove the nw16 clamp from the exhaust connection. 10. Remove the exhaust fitting. 11. If desired, remove the...

  • Page 132

    Models 947, 948 and 960 leak detectors operations and service manual b-18 b.4.1.1.3 re-installing the wet system rough pump warning to avoid injury, use proper lifting techniques when moving pumps. Your system may have pumps that require two people to move them safely. To perform this procedure: 1. ...

  • Page 133

    Models 947, 948 and 960 leak detectors operations and service manual b-19 7. Place the nw25 clamp onto the connection and tighten fully. 8. Place the centering ring and o-ring against the pump outlet on the right side. 9. Place the exhaust manifold against the centering ring and o-ring. 10. Place th...

  • Page 134

    Models 947, 948 and 960 leak detectors operations and service manual b-20 b.4.2 dry systems b.4.2.1 removing the dry system rough pump to perform this procedure: 1. Disconnect the mains power supply and make sure that all pumps are off. Warning disconnect power from the 947/948/960 before performing...

  • Page 135

    Models 947, 948 and 960 leak detectors operations and service manual b-21 b.4.2.2 replacing the dry system rough pump before you replace the mechanical pump, examine and clean all o-rings centering rings, clamps and the manifold. B.4.2.2.1 examining and cleaning centering rings, o-rings and manifold...

  • Page 136

    Models 947, 948 and 960 leak detectors operations and service manual b-22 12. Replace the front panel. 13. Replace the side panel. 14. Reconnect the mains power supply. 15. Turn the leak detector on and wait for the system to be ready. Allow the pumps to warm up if the detector has been off for some...

  • Page 137

    Models 947, 948 and 960 leak detectors operations and service manual b-23 b.5.1.1 removing the wet system forepump to perform this procedure: 1. Disconnect the mains power supply and make sure that all pumps are off. Warning disconnect power from the 947/948/960 before performing any maintenance pro...

  • Page 138

    Models 947, 948 and 960 leak detectors operations and service manual b-24 b.5.1.2 replacing the wet system forepump before you replace the forepump, examine and clean all o-rings, centering rings, clamps, and manifold. Caution there may be oil on these parts. Take care not to place them where other ...

  • Page 139

    Models 947, 948 and 960 leak detectors operations and service manual b-25 9. Place the centering ring and o-ring against the pump outlet on the right side. 10. Place the exhaust fitting against the centering ring. 11. Place the nw16 clamp onto the connection and tighten fully. 12. Working from under...

  • Page 140

    Models 947, 948 and 960 leak detectors operations and service manual b-26 b.5.2 dry system b.5.2.1 removing the dry system forepump to perform this procedure: 1. Disconnect the mains power supply and make sure that all pumps are off. Warning disconnect power from the 947/948/960 before performing an...

  • Page 141

    Models 947, 948 and 960 leak detectors operations and service manual b-27 b.5.2.1.2 removing the nitrogen purge connection from pump note an electrician or electrical technician is required for proper removal and installation. If only maintenance is being performed, the pump can be removed with the ...

  • Page 142

    Models 947, 948 and 960 leak detectors operations and service manual b-28 b.5.2.2.2 re-installing the dry system forepump warning to avoid injury, use proper lifting techniques when moving pumps. Your system may have pumps that require two people to move them safely. To perform this procedure: 1. En...

  • Page 143

    Models 947, 948 and 960 leak detectors operations and service manual b-29 b.5.2.2.5 replacing the exhaust fitting to perform this procedure: 1. Place the centering ring and o-ring against the right side pump outlet. 2. Place the exhaust manifold against the centering ring. 3. Place the nw16 clamp on...

  • Page 144

    Models 947, 948 and 960 leak detectors operations and service manual this page intentionally left blank..

  • Page 145: C.1 Protocol (Rs-232)

    C-1 models 947, 948 and 960 leak detectors operations and service manual appendix c. Communications protocol this appendix defines the technical specifications for the rs-232 protocol to be used with the 947/948/960 leak detection system optional rear panel interface. C.1 protocol (rs-232) the rs-23...

  • Page 146

    Models 947, 948 and 960 leak detectors operations and service manual c-2 table c-1 through table c-4 outline the available control and query commands. ❑ table c-1 lists inquiries used to determine internal operating parameters. All inquiries, except ver, begin with ? And end with . ❑ table c-2 on pa...

  • Page 147

    Models 947, 948 and 960 leak detectors operations and service manual c-3 ?Leak an eight-character number consisting of a three-digit leak rate mantissa with decimal point after the first digit followed by e–, then a two-digit number, which is the leak rate range exponent (e.G., 1.35e-07). ?Nreject a...

  • Page 148

    Models 947, 948 and 960 leak detectors operations and service manual c-4 ?Setup eight lines that report a summary of setup parameters. Each line begins with a . The format is as follows: first line reports the turbo pump speed as high, low, or off. Second line reports the least sensitive leak rate r...

  • Page 149

    Models 947, 948 and 960 leak detectors operations and service manual c-5 table c-2 lists the commands used to set non-volatile operating parameters. The current value of the operating parameter is changed to a new value. If parallel enable is asserted, the response is cant . Table c-2 non-volatile o...

  • Page 150

    Models 947, 948 and 960 leak detectors operations and service manual c-6 table c-3 lists the commands used to cause an immediate change in the spectrometer operating parameters. These commands do not change the non-volatile operating parameters. Init-rangestop sets the most sensitive range exponent ...

  • Page 151

    Models 947, 948 and 960 leak detectors operations and service manual c-7 table c-4 lists the commands used to cause leak detection actions. Table c-4 command parameters for leak detection actions command action calibrate adjusts the ion source parameters to cause a maximum response to helium, then a...

  • Page 152

    Models 947, 948 and 960 leak detectors operations and service manual this page intentionally left blank..

  • Page 153

    D-1 models 947, 948 and 960 leak detectors operations and service manual appendix d. Inputs and outputs the table d-1 through table d-5 list the signals available on the connector in the turret, and the various connectors of the optional rear panel interface. D.1 service serial interface (j1) the se...

  • Page 154

    Models 947, 948 and 960 leak detectors operations and service manual d-2 6 parallel enable active high enables rear panel plc interface. Input 7 zero 200 msec high pulse begins auto zero routine. Input 9 auto cal 200 msec high pulse begins auto calibrate. Input 10 decrement 200 msec high pulse decre...

  • Page 155

    Models 947, 948 and 960 leak detectors operations and service manual d-3 d.2.2 bcd discrete output parallel interface (j121) the discrete i/o db25 connector is used to control operations via a plc. Table d-3 provides the j121 db25 bcd connections. Table d-3 optional bcd discrete output parallel inte...

  • Page 156

    Models 947, 948 and 960 leak detectors operations and service manual d-4 d.2.3 interface (j122) for optional universal remote control the optional universal remote control connects to j122, a db9 connector. The serial communication cable from the universal remote control is connected to j122 on the ...

  • Page 157: Appendix E.

    E-1 models 947, 948 and 960 leak detectors operations and service manual appendix e. 947/94 8 spec if ic ations ta ble e- 1 cont ains t h e spec if ic ati ons f o r m ode ls 947/ 948/ 960. T a b le e-1 947/ 948/96 0 speci fi cat ions p la tf o rm 94 7 948/ 960 high v a c uum p u mp t y pe : air -c o...

  • Page 158

    Models 947, 948 and 960 leak detectors operations and service manual e-2 a u to m a ti c v a lv e s e que nc in g m ic ro pr oc e s s o r- c o nt ro lled v a lv e op er a tio n p rov ides a u to m a ti c s y s te m c y c lin g. T he te s t a n d r o u ghi ng v a lv e s ar e v a c u um -a c ti v at e...

  • Page 159

    E-3 models 947, 948 and 960 leak detectors operations and service manual ta ble e- 2 cont ains t h e 947/ 948/9 60 model type s and p art n u m b er s. T abl e e- 2 947 /948/ 960 m o del t ypes a nd par t num ber s v a cu u m s yst em p u mp t y p e s m a in s s upply 50/6 0 hz 1 1 5 va c 2 3 0 va c...

  • Page 160

    Models 947, 948 and 960 leak detectors operations and service manual e-4 96 0 w it h co ld t rap l9 602 020 0t 120 l 960 202 00t 22 0 v 7 0 sd- 2 01 l9 600 920 0t 120 l 960 092 00t 22 0 v 7 0 sd- 2 01 sd- 9 1 l9 600 930 0t 120 l 960 093 00t 22 0 v 7 0 sd- 3 01 sd- 9 1 d96 035 350 t 120 d 960 3535 0t...

  • Page 161: Appendix F. Accessories

    F-1 models 947, 948 and 960 leak detectors operations and service manual appendix f. Accessories the accessories listed below can be purchased separately for use with the 947/948/960. Call varian vacuum technologies for further information at 1-800-8varian. * factory installed option table f-1 947/9...

  • Page 162

    Models 947, 948 and 960 leak detectors operations and service manual this page intentionally left blank..

  • Page 163

    G-1 models 947, 948 and 960 leak detectors operations and service manual appendix g. Leak detection theory g.1 leak testing—why is it needed? Even with today's complex technology it is, for all practical purposes, impossible to manufacture a sealed enclosure or system that can be guaranteed leak pro...

  • Page 164: G.3 Terminology

    Models 947, 948 and 960 leak detectors operations and service manual g-2 g.3 terminology the following terminology has application throughout this manual: flow atm cc/sec one cubic centimeter of gas per second at a pressure differential of one standard atmosphere (760 torr at 0 °c). Std cc/sec one c...

  • Page 165

    Models 947, 948 and 960 leak detectors operations and service manual g-3 g.4 various methods of testing for leaks there are many methods of testing for leaks in enclosures, systems or containers. The more commonly used methods and their accuracy ranges are listed below: water immersion (air bubble o...

  • Page 166

    Models 947, 948 and 960 leak detectors operations and service manual g-4 g.5 helium mass spectrometer leak detection (msld) helium is an excellent trace gas because it is the lightest of the inert gases and as a consequence readily penetrates small leaks. In addition, its presence in the atmosphere ...

  • Page 167: G.6 Leak Detection Methods

    Models 947, 948 and 960 leak detectors operations and service manual g-5 g.5.4 facts about leak rates visualizing leaks in everyday terms 10 − 5 atm cc/sec: approximately 1 cc/day 10 − 7 atm cc/sec: approximately 3 cc/year audible or visual detection by observer a. Bubbles rising in water 10 − 4 atm...

  • Page 168

    Models 947, 948 and 960 leak detectors operations and service manual g-6 g.6.1 test piece evacuated the object to be tested is evacuated by the leak detector roughing pump, then valved into the spectrometer vacuum system (see figure g-1 and figure g-2). The surface of the test object is then probed ...

  • Page 169

    Models 947, 948 and 960 leak detectors operations and service manual g-7 a sampling probe is connected to the leak detector. The object to be tested is filled with helium at the desired test pressure and the probe is moved over its surface. Some of the helium escaping from a leak is captured through...

  • Page 170

    Models 947, 948 and 960 leak detectors operations and service manual g-8 g.7 mass spectrometer leak detector—simplified description the 947/948/960 consist of an analytical sensing tube called a spectrometer tube, electronics to operate the tube, and a vacuum system to maintain a very high vacuum wi...

  • Page 171: Index

    I-1 models 947, 948 and 960 leak detectors operations and service manual index a accessories available f-1 air filter replacement 4-21 atm vs. Std g-2 atmospheric calibration 4-28 system pressure gauge 4-28 test port 4-31 audio volume control 3-5 auto cal routine indicator 3-2 auto ranging 3-13 auto...

  • Page 172

    Models 947, 948 and 960 leak detectors operations and service manual i-2 h hazard and safety information 1-iv helium for sealing g-7 helium mass spectrometer leak detection g-4 hermetic enclosures g-1 systems g-1 hold mode indicator 3-2 host serial port interface (option) d-4 host serial port j123 p...

  • Page 173

    Models 947, 948 and 960 leak detectors operations and service manual i-3 tools and parts required 4-11 manual ranging 3-14 manual tuning 4-5 mass spectrometer leak detector g-8 mass spectrometry principles g-4 model specifications e-1 model types and part numbers e-3 monitoring leak rate with the se...

  • Page 174

    Models 947, 948 and 960 leak detectors operations and service manual i-4 s scheduled maintenance 4-3 sealing with helium g-7 sensitivity checks 3-12 serial communications protocol b-1, c-1 service block assembly 4-26 service menu selection screen gauge cal 4-27 service pendant 1-10, 2-9, 3-16, a-1, ...

  • Page 176

    Varian vacuum technologies sales and service offices 01/03 argentina varian argentina ltd. Sucursal argentina av. Ricardo balbin 2316 1428 buenos aires argentina tel: (54) 1 783 5306 fax: (54) 1 786 5172 benelux varian vacuum technologies rijksstraatweg 269 h, 3956 cp leersum the netherlands tel: (3...