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Varian HS-16 Instruction Manual - Aft 8
High Throughput Diffusion Pumps
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Summary of HS-16
Page 1
D raft 8/22/0 3 instruction manual vacuum technologies high throughput diffusion pumps hs-16 hs-20 hs-32 nhs-35 part no. 699901140 rev. A august 2003.
Page 2: Raft
D raft 8/22/03 copyright 2003 varian vacuum technologies high throughput diffusion pumps santovac ® 5 diffusion pump fluid of santovac fluids, inc. Viton ® is a registered trademark of e. I du pont de nemours and company..
Page 3: Aft 8
Iii high throughput diffusion pumps dr aft 8 / 22 /0 3 contents preface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . V declaration of conformity. . . . . . . . . . . . . . . . . . . . . Vii diffusion pump hazards . . . . . . . . . . . . . . . . . . . . . . . 1 explosion . ...
Page 4: Aft 8
High throughput diffusion pumps iv dr aft 8 / 22 /0 3 list of figures figure caption page 1 hs-20 diffusion pump . . . . . . . . . . . . . . . . . . 5 2 hs-16 speed and throughput curves, 8.1 kw 8 3 hs-20 speed and throughput curves . . . . . . 8 4 hs-32 speed and throughput curves . . . . . . 8 5 n...
Page 5: Aft 8
V high throughput diffusion pumps dr aft 8 / 22 /0 3 preface warranty products manufactured by seller are warranted against defects in materials and workmanship for twelve (12) months from date of shipment thereof to customer, and seller’s liability under valid warranty claims is limited, at the opt...
Page 6: Aft 8
High throughput diffusion pumps vi dr aft 8 / 22 /0 3 instructions for use this equipment is designed for use by professionals. The user should read this instruction manual and any other additional information supplied by varian before operating the equipment. Varian will not be held responsible for...
Page 7: Declaration Of Conformity
Varian vacuum technologies 121 hartwell avenue lexington, ma, 02421-3133 usa declare under our sole responsibility that the product, erklären, in alleniniger verantwortung, daß dieses produkt, déclarons sous notre seule responsabilité que le produit, declaramos, bajo nuestra sola responsabilidad, qu...
Page 8: Aft 8
High throughput diffusion pumps this page intentionally left blank. Dr aft 8 / 22 /0 3.
Page 9: Aft 8
1 high throughput diffusion pumps dr aft 8 / 22 /0 3 diffusion pump hazards designers of systems utilizing diffusion pumps must design out hazards wherever possible. For hazards that cannot be designed out, warnings, procedures, and instructions on proper use and servicing are provided. Please use g...
Page 10: Aft 8
High throughput diffusion pumps 2 dr aft 8 / 22 /0 3 explosion ❑ operation of the diffusion pump without continuous evacuation below 0.5 torr (0.67 mbar), or without coolant and introducing a strong oxidizer (such as air) or explosive vapors or powders or materials which may react with pumping fluid...
Page 11: Aft 8
3 high throughput diffusion pumps dr aft 8 / 22 /0 3 pressurization hazards ❑ large vacuum pumps and their components are designed for vacuum service; they are not designed to be pressurized which could cause them to burst possibly expelling shrapnel at lethal velocities. Serious accidents have been...
Page 12: Aft 8
High throughput diffusion pumps 4 dr aft 8 / 22 /0 3 high temperatures ❑ hot surfaces: boiler temperatures reach 530 °f (275 °c) which can cause serious burns. Always ensure that surfaces have cooled to near room temperature before touching them. ❑ hot cooling water and steam: the water used to cool...
Page 13: Aft 8
5 high throughput diffusion pumps dr aft 8 / 22 /0 3 diffusion pump basics diffusion pumps are used where throughput for heavy gas loads is important. The diffusion pumps begin to work at approximately 10 − 3 torr after a mechanical backing pump has exhausted most of the air in the system. Figure 1 ...
Page 14: Aft 8
High throughput diffusion pumps 6 dr aft 8 / 22 /0 3 t a b le 4 o p e ra ti n g s p ec if icat io n s spe ci fic ati on u n its h s-1 6 , 8 .1 k w h s-1 6, 9 .6 kw hs -20 h s-3 2 n h s-3 5 o p er atin g r ang e tor r mb ar 7x 1 0 − 4 to x1 0 − 8 9 .1x 10 − 4 to 7 x1 0 − 8 1x 10 − 3 to 1 0 − 8 1 .3x ...
Page 15: Aft 8
7 high throughput diffusion pumps dr aft 8 / 22 /0 3 w ar m up t im e min u te s 30 45 60 60 c ool dow n t im e w itho u t q u ic k c ool w ith q u ic k co ol min u te s 48 30 85 45 180 60 18 0 60 fl ui d c h arge qt ( u s) l it ers 3 2. 8 5 4. 7 12 11 .4 12 11 .4 r eco mme nd ed b ac ki n g pum p c...
Page 16: Aft 8
High throughput diffusion pumps 8 dr aft 8 / 22 /0 3 pump air speed and throughput the pumping function is graphically described by relating inlet pressure to both air speed and throughput . This relation- ship is shown for the large vacuum pumps in the set of graphs shown in figure 2 through figure...
Page 17: Aft 8
9 high throughput diffusion pumps dr aft 8 / 22 /0 3 physical specifications figure 6 hs-16 outline with asa flanges table 5: hs-16: dimensions and weights units hs-16 height, minimum including clearance for heater access in (mm) 51 (1142) weight lbs (kg) 500 (227) connections: body and foreline qui...
Page 18: Aft 8
High throughput diffusion pumps 10 dr aft 8 / 22 /0 3 figure 7 hs-20 outline with asa flanges table 7 hs-20: dimensions and weights units hs-20 height, minimum including clearance for heater access in (mm) 56 (1254) weight lbs (kg) 600 (272) connections: body and foreline quick cool coils in in 1/4 ...
Page 19: Aft 8
11 high throughput diffusion pumps dr aft 8 / 22 /0 3 figure 8 hs-32 outline with asa flanges table 9 hs-32: dimensions and weights units hs-32 height, minimum including clearance for heater access in (mm) 74 (1658) weight lbs (kg) 1500 (682) connections: body and foreline quick cool coils in in 3/8...
Page 20: Aft 8
High throughput diffusion pumps 12 dr aft 8 / 22 /0 3 figure 9 nhs-35 outline with asa flanges table 11 nhs-35: dimensions and weights units nhs-35 height, minimum including clearance for heater access in (mm) 80 (1795) weight lbs (kg) 1500 (682) connections: body and foreline quick cool coils in in...
Page 21: Aft 8
13 high throughput diffusion pumps dr aft 8 / 22 /0 3 unpacking varian large diffusion pumps are shipped in sturdy con- tainers that permit prolonged storage in suitably protected areas without special precautions, however, care must be taken when moving the crated pump with a fork lift to avoid exc...
Page 22: Aft 8
High throughput diffusion pumps 14 dr aft 8 / 22 /0 3 cleaning a new pump cleaning safety cleaning a diffusion pump involves the use of acetone and alcohol, both of which are toxic and explosive. Take careful note of the following information and warnings before starting a cleaning process. When hea...
Page 23: Aft 8
15 high throughput diffusion pumps dr aft 8 / 22 /0 3 system and utility connections vacuum connections the pump body must be installed vertical and plumb. Check that the mating flange on the system is horizontal ±1 o . If this condition is not met, correct the system mount before installing the pum...
Page 24: Aft 8
High throughput diffusion pumps 16 dr aft 8 / 22 /0 3 quick cool coil connection the quick cool coil at the boiler plate must be con- nected to an open drain and the feed line must be con- trolled by a separate water 3-way valve: open, closed, and vented to the atmosphere. The drain must be below th...
Page 25: Aft 8
17 high throughput diffusion pumps dr aft 8 / 22 /0 3 electrical connections terminal connections for each pump are different depending on the source voltage available, the principle difference being a y or ∆ connection of the heaters. Table 13 provides the figure number and page of the wiring diagr...
Page 26: Aft 8
High throughput diffusion pumps 18 dr aft 8 / 22 /0 3 overheating: detection by thermal switches an overheat condition is detected by two normally closed thermal cutout switches, one of which monitors the boiler temperature while the other monitors the water tempera- ture. These switches are set at ...
Page 27: Aft 8
19 high throughput diffusion pumps dr aft 8 / 22 /0 3 figure 11 hs-16 200/240/400/430/440/480 v wiring rtotl1-l2/l2-l3/l3-l1 element resistance (+10%, -5%) rtot, 8100 w rtot 9600 w 2700 w 3200 w 200 v > 10 w 200 v > 9 w 200 v > 15 w 200 v > 13 w 240 v > 14 w 240 v > 12 w 240 v > 21 w 240 v > 18 w 40...
Page 28: Aft 8
High throughput diffusion pumps 20 dr aft 8 / 22 /0 3 figure 12 hs-16 380/415 v wiring.
Page 29: Aft 8
21 high throughput diffusion pumps dr aft 8 / 22 /0 3 figure 13 hs-20 200/240/400/430/480 v wiring.
Page 30: Aft 8
High throughput diffusion pumps 22 dr aft 8 / 22 /0 3 figure 14 hs-20 380/415 v wiring.
Page 31: Aft 8
23 high throughput diffusion pumps dr aft 8 / 22 /0 3 figure 15 hs-32 200 v wiring.
Page 32: Aft 8
High throughput diffusion pumps 24 dr aft 8 / 22 /0 3 figure 16 hs-32 240 v wiring.
Page 33: Aft 8
25 high throughput diffusion pumps dr aft 8 / 22 /0 3 figure 17 hs-32 460 v wiring.
Page 34: Aft 8
High throughput diffusion pumps 26 dr aft 8 / 22 /0 3 figure 18 hs-32 380/415 v wiring.
Page 35: Aft 8
27 high throughput diffusion pumps dr aft 8 / 22 /0 3 figure 19 hs-32 480 v wiring.
Page 36: Aft 8
High throughput diffusion pumps 28 dr aft 8 / 22 /0 3 figure 20 nhs-35 240/400/440 v wiring i p = 2 0a @ 4 00 v i p = 1 8 .2 a @ 4 40 v i l = 67.8a @ 240v i l = 34.6a @ 400v i l = 31.5a @ 410v @ 2 4 0v.
Page 37: Aft 8
29 high throughput diffusion pumps dr aft 8 / 22 /0 3 figure 21 nhs-35 380/415 v wiring note: pumps operated with 380 volts line voltage operate at 84% of their full power..
Page 38: Aft 8
High throughput diffusion pumps 30 dr aft 8 / 22 /0 3 figure 22 nhs-35 480 v wiring.
Page 39: Aft 8
31 high throughput diffusion pumps dr aft 8 / 22 /0 3 initial vacuum test before charging the pump with fluid, carry out this initial vacuum test to establish the tightness of the system and its vacuum connections. Pumps and their components are designed for vacuum service; they are not designed to ...
Page 40: Aft 8
High throughput diffusion pumps 32 dr aft 8 / 22 /0 3 adding or changing pump fluid the recommended fluid charge for each pump is given in table 4 on page 6. Fluids must be stored in clean, tightly closed containers and should be clearly identified in accordance with their type. Do not mix pumping f...
Page 41: Aft 8
33 high throughput diffusion pumps dr aft 8 / 22 /0 3 to add or change pump fluid: 1. Locate the fill and drain fittings in the appropriate outline drawing. Refer to figure 6 on page 9 through figure 9 on page 12. The fittings have special viton ® elastomer sealed plugs. 2. Assure that the power to ...
Page 42: Aft 8
High throughput diffusion pumps 34 dr aft 8 / 22 /0 3 operation during initial installation, the newly installed pump fluid may be subjected to degassing. This may result in foreline pressure fluctuations that are considered normal. Warnings the following conditions increase the risk of explosion: ❑...
Page 43: Aft 8
35 high throughput diffusion pumps dr aft 8 / 22 /0 3 startup procedure to start the pump: 1. Evacuate the diffusion pump using a mechanical roughing pump to below 0.5 torr (0.67 mbar). The diffusion pump will not function unless the discharge pressure is less than the tolerable forepressure. 2. Tur...
Page 44: Aft 8
High throughput diffusion pumps 36 dr aft 8 / 22 /0 3 maintenance perform these periodic checks to assure trouble-free operation. This maintenance prevents costly down-time and cleaning procedures. Maintain a day-to-day log of pump and system performance to identify marked variations that require co...
Page 45: Aft 8
37 high throughput diffusion pumps dr aft 8 / 22 /0 3 cleaning cleaning safety cleaning a diffusion pump involves the use of acetone and alcohol, both of which are toxic and explosive. Take careful note of the following warnings before starting a cleaning process. When heated, sprayed or exposed to ...
Page 46: Aft 8
High throughput diffusion pumps 38 dr aft 8 / 22 /0 3 disassembly and reassembly procedures cold cap to disassemble the cold cap, refer to figure 24 and take the following steps. 1. Remove the female coupling, nut, follower, and gasket located at the end of the cold cap water line on the outside of ...
Page 47: Aft 8
39 high throughput diffusion pumps dr aft 8 / 22 /0 3 jet assemblies the jet assemblies of each of the pumps are discussed and shown in the following subsections. Procedures and drawings are specific to each pump model. Hs-16 jet assembly figure 25 hs-16 jet assembly to disassemble the jet assembly:...
Page 48: Aft 8
High throughput diffusion pumps 40 dr aft 8 / 22 /0 3 hs-20 jet assembly figure 26 hs-20 jet assembly to disassemble the jet assembly: 1. Remove the cold cap or halo baffle as described in “cold cap” on page 38. 2. Unscrew the jet cap from the coupling assembly. 3. Remove the orifice plug. 4. Withdr...
Page 49: Aft 8
41 high throughput diffusion pumps dr aft 8 / 22 /0 3 to reassemble the jet assembly: 1. Replace the fourth stage jet on the jet base. 2. Replace and tighten the securing screws between the fourth stage and the jet base uniformly and in a cyclical pattern. 3. Replace the third stage jet on the fourt...
Page 50: Aft 8
High throughput diffusion pumps 42 dr aft 8 / 22 /0 3 hs-32 jet assembly figure 28 hs-32 jet assembly to disassemble the jet: 1. Unscrew and remove the hex nut holding the cold cap in place. Note its orientation prior to removal 2. Remove the cold cap (or halo baffle) as described in “cold cap” on p...
Page 51: Aft 8
43 high throughput diffusion pumps dr aft 8 / 22 /0 3 to reassemble the jet: 1. If the center jet rod was removed or loosened during disassembly, thread the rod back into the boilerplate. The top of the rod should be roughly 1/16" to 1/8" below the top surface of the inlet flange (inlet plane of the...
Page 52: Aft 8
High throughput diffusion pumps 44 dr aft 8 / 22 /0 3 nhs-35 jet assembly figure 29 nhs-35 jet assembly to disassemble the jet: 1. Unscrew and remove the hex nut holding the cold cap in place. Note its orientation prior to removal 2. Remove the cold cap (or halo baffle) as described in “cold cap” on...
Page 53: Aft 8
45 high throughput diffusion pumps dr aft 8 / 22 /0 3 heater replacement procedure figure 30 shows the components of the heater element assembly. The heater replacement procedure is the same for all large diffusion pumps*. Figure 30 heater element assembly to replace a heater: 1. Use an ohmmeter at ...
Page 54: Aft 8
High throughput diffusion pumps 46 dr aft 8 / 22 /0 3 troubleshooting leakage if leakage is the suspected cause of poor system perfor- mance, first check the following items: ❑ inlet and foreline connections ❑ drain and fill plugs ❑ other compression fittings, such as high-vacuum gauges in the syste...
Page 55: Aft 8
47 high throughput diffusion pumps dr aft 8 / 22 /0 3 poor pump or system performance table 15 lists the faults, the probable causes and corrective actions to take if you have a problem with a large diffusion pump. Table 15 troubleshooting guide fault probable cause corrective action poor system pre...
Page 56: Aft 8
High throughput diffusion pumps 48 dr aft 8 / 22 /0 3 replacement parts table 16 hs-16 replacement parts part number description 79299301 cold cap assembly, includes no.10-32 sst rd hd screw and no. 10-32 sst hex nut) l8839301 cold cap gasket set l8840301 cold cap nut and follower set 83612401 jet a...
Page 57: Aft 8
49 high throughput diffusion pumps dr aft 8 / 22 /0 3 table 17 hs-20 replacement parts part number description 84358301 cold cap assembly, includes no.10-32 sst rd hd screw and no. 10-32 hex nut sst 660811494 cold cap gasket f2622001 cold cap follower, brass 75786001 cold cap nut 622445026 cold cap ...
Page 58: Aft 8
High throughput diffusion pumps 50 dr aft 8 / 22 /0 3 table 18 hs-32 replacement parts part number description 77252801 cold cap assembly, includes no.10-32 sst rd hd screw and no. 10-32 hex nut sst 660811494 cold cap grommet f2622001 cold cap follower (brass) 75786001 cold cap nut 622445026 cold ca...
Page 59: Aft 8
51 high throughput diffusion pumps dr aft 8 / 22 /0 3 table 19 nhs-35 replacement parts part number description 81437301 cold cap assembly (includes no.10-32 sst rd hd screw and no. 10-32 hex nut) sst 660811494 cold cap gasket f2622001 cold cap follower (brass) 75786001 cold cap nut 622445026 cold c...
Page 60: Aft 8
High throughput diffusion pumps this page intentionally left blank. Dr aft 8 / 22 /0 3.
Page 62
Sales and service offices 07/03 argentina varian argentina ltd. Sucursal argentina av. Ricardo balbin 2316 1428 buenos aires argentina tel: (54) 1 783 5306 fax: (54) 1 786 5172 benelux varian vacuum technologies rijksstraatweg 269 h, 3956 cp leersum the netherlands tel: (31) 343 469910 fax: (31) 343...