Varian TriScroll 600 series Manual
Summary of TriScroll 600 series
Page 1
Draf t 2 /1 0 /0 5 vacuum technologies triscroll tm 600 series dry scroll vacuum pump manual no. 699904310 revision g december 2004 tip seal replacement manual.
Page 2: Triscroll
D r a f t 2 /1 0 /0 5 copyright 2004 vacuum technologies triscroll ™ 600 series dry scroll vacuum pump triscroll is a trademark of vacuum technologies. Loctite and pst are registered trademarks of loctite corporation. Krytox, teflon and viton are registered trademarks of e. I. Du pont de nemours and...
Page 3: Table Of Contents
Triscroll 600 dry scroll vacuum pump d r a f t 2 /1 0 /0 5 iii table of contents preface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Vi safety considerations . . . . . . . . . . . . . . . . . . . . . Vi related triscroll manuals . . . . . . . . . . . . . . . . . Viii maintena...
Page 4
Triscroll 600 dry scroll vacuum pump this page intentionally left blank. D r a f t 2 /1 0 /0 5.
Page 5
Varian, inc. Declare under our sole responsibility that the product, erklären, in alleniniger verantwortung, daß dieses produkt, déclarons sous notre seule responsabilité que le produit, declaramos, bajo nuestra sola responsabilidad, que el producto, verklaren onder onze verantwoordelijkheid, dat he...
Page 6: Preface
Vi triscroll 600 dry scroll vacuum pump d r a f t 2 /1 0 /0 5 preface this manual provides the information you need to successfully perform tip seal replacement on your vacuum technologies triscroll tm dry vacuum pump. Tip seal replacement is generally is recommended when the pump base pressure has ...
Page 7: Draft
Vii triscroll 600 dry scroll vacuum pump draft 2 /10 /0 5 all warnings and cautions must be read carefully, fully understood, and strictly observed. Consult local, state/province, and national agencies regarding specific requirements and regulations. Address any safety, operation, and/or maintenance...
Page 8: Related Triscroll Manuals
Viii triscroll 600 dry scroll vacuum pump d r a f t 2 /1 0 /0 5 related triscroll manuals manuals related to the installation and operation, pump module replacement, and major maintenance for the triscroll 600 series pumps are listed in the following table: maintenance and tool kits material and too...
Page 9: Draft
Ix triscroll 600 dry scroll vacuum pump draft 2 /10 /0 5 factory service options vacuum technologies offers factory-rebuild service or advance exchange of complete triscroll pumps or triscroll pump modules. Contact your nearest vacuum technologies sales office for price and availability information....
Page 10
Triscroll 600 dry scroll vacuum pump this page intentionally left blank. D r a f t 2 /1 0 /0 5.
Page 11: Tip Seal Replacement
Triscroll 600 dry scroll vacuum pump d r a f t 2 /1 0 /0 5 1 tip seal replacement general information vacuum technologies triscroll 600 series pumps will provide years of trouble-free service if maintenance procedures and intervals are observed. Bearing grease replenishment and tip seal replacement ...
Page 12
2 triscroll 600 dry scroll vacuum pump d r a f t 2 /1 0 /0 5 tip seal replacement kit 2-273 2-127 tip seal krytox gpl 224 grease.
Page 13: Draft
3 triscroll 600 dry scroll vacuum pump draft 2 /10 /0 5 tip seal tool kit chisel metric hex key set.
Page 14: Triscroll 600 Disassembly
4 triscroll 600 dry scroll vacuum pump d r a f t 2 /1 0 /0 5 triscroll 600 disassembly remove the intake fitting 1. Remove the two m5x16 screws from the intake assembly. 2. Remove the intake assembly from the top of the pump. 3. Remove and discard the o-ring from the groove on the underside of the i...
Page 15: Draft
5 triscroll 600 dry scroll vacuum pump draft 2 /10 /0 5 remove the outboard housing 1. Remove the three m5x16 screws that attach the cowling to the module. 2. Remove the cowling. 3. Remove the six m6x55 screws that attach the outboard housing to inboard housing. 4. Remove the outboard housing. Trisc...
Page 16
6 triscroll 600 dry scroll vacuum pump d r a f t 2 /1 0 /0 5 5. Remove and discard the o-ring. 6. Remove and discard the tip seals from the outboard housing. Triscroll 600 disassembly (continued).
Page 17: Draft
7 triscroll 600 dry scroll vacuum pump draft 2 /10 /0 5 remove the inboard housing and orbiting plate assembly 1. Remove the four m5x15 screws that attach the inboard housing to the frame. 2. Remove the inboard housing from the frame. Locate the rubber spider that mounts between the motor shaft coup...
Page 18
8 triscroll 600 dry scroll vacuum pump d r a f t 2 /1 0 /0 5 disassemble the inboard housing and the orbiting plate assembly 1. Remove the m8x12 screw and washer that attaches the counterweight to the inboard housing. 2. Lift the counterweight off of the inboard housing. The counterweight is keyed t...
Page 19: Draft
9 triscroll 600 dry scroll vacuum pump draft 2 /10 /0 5 3. Remove the inboard housing from the crankshaft and orbiting plate. 4. Remove and discard the tip seals from the inboard housing. Triscroll 600 disassembly (continued).
Page 20
10 triscroll 600 dry scroll vacuum pump d r a f t 2 /1 0 /0 5 5. Remove and discard the tip seals from both sides of the orbiting plate. Triscroll 600 disassembly (continued).
Page 21: Draft
11 triscroll 600 dry scroll vacuum pump draft 2 /10 /0 5 scroll cleaning 1. Carefully scrape with a chisel to loosen the tip seal dust from the: ❑ orbiting plate ❑ inboard housing ❑ outboard housing if seal debris is attached to the sides of the scroll walls, use a razor blade or exacto knife to scr...
Page 22: Triscroll 600 Reassembly
12 triscroll 600 dry scroll vacuum pump d r a f t 2 /1 0 /0 5 triscroll 600 reassembly 1. Insert the new tip seal into the scroll tip grooves on the inboard housing side of the orbiting plate. 2. Cut the seal to the correct length at the end of each groove. Leave a gap of 1/4" (6 mm) from the outer ...
Page 23: Draft
13 triscroll 600 dry scroll vacuum pump draft 2 /10 /0 5 5. Place the scroll in the vertical position and reinstall the inboard housing onto the crankshaft. Placing the scroll in the vertical position keeps the tip seals from falling out of the grooves during reassembly. 6. Ensure that the scroll wa...
Page 24
14 triscroll 600 dry scroll vacuum pump d r a f t 2 /1 0 /0 5 10. Install the rubber spider into motor shaft coupling. 11. Align the motor coupling to properly mate with the fan hub coupling. 12. Install the inboard housing onto the frame. Triscroll 600 reassembly (continued) rubber spider installed.
Page 25: Draft
15 triscroll 600 dry scroll vacuum pump draft 2 /10 /0 5 13. Secure the inboard housing assembly to the frame using the four m5x15 screws. 14. Insert the tip seal into the scroll tip grooves on the orbiting plate. 15. Cut the seal to the correct length at the end of each groove. Leave a gap of 1/8" ...
Page 26
16 triscroll 600 dry scroll vacuum pump d r a f t 2 /1 0 /0 5 16. Squeeze a dot of krytox gpl 224 grease into each of the three needle bearings. 17. Smear grease over the needles. 18. Coat the lips of all three seals with grease. 19. Lightly grease the new 2-273 o-ring (large) and install it around ...
Page 27: Draft
17 triscroll 600 dry scroll vacuum pump draft 2 /10 /0 5 20. Insert the tip seals into the grooves on the outboard housing. 21. Cut the seal to the correct length at the end of each groove. Leave a gap of 1/8" (3mm) from the outer end to allow for thermal growth. 22. Install the outboard housing ove...
Page 28
18 triscroll 600 dry scroll vacuum pump d r a f t 2 /1 0 /0 5 24. Install the cowling over the pump module. 25. Secure with the three m5x16 screws. Triscroll 600 reassembly (continued).
Page 29: Draft
19 triscroll 600 dry scroll vacuum pump draft 2 /10 /0 5 26. Lightly grease the new 2-127 o-ring and insert it into the groove on the intake fitting. 27. Place the intake fitting assembly into the outboard housing. 28. Secure the fitting with the two m5x16 screws. Triscroll 600 reassembly (continued...
Page 30
20 triscroll 600 dry scroll vacuum pump d r a f t 2 /1 0 /0 5 put the pump back into service the triscroll 600 pump can be placed into service immediately after maintenance is complete. However, 24 hours of run time is required before base pressure of 7 mtorr can be achieved. This figure illustrates...
Page 31
Request for return health and safety certification 1. Return authorization numbers (ra#) will not be issued for any product until this certificate is completed and returned to a varian, inc. Customer service representative. 2. Pack goods appropriately and drain all oil from rotary vane and diffusion...
Page 32
Request for return health and safety certification failure report (please describe in detail the nature of the malfunction to assist us in performing failure analysis): t urbo p umps and t urbocontrollers i on p umps / controllers v alves / components l eak d etectors i nstruments a ll o ther v aria...
Page 34
Sales and service offices 12/04 canada central coordination through: varian, inc. 121 hartwell avenue lexington, ma 02421 usa tel: (781) 861 7200 fax: (781) 860 5437 toll free: (800) 882 7426 china varian technologies - beijing room 1201, jinyu mansion no. 129a, xuanwumen xidajie xicheng district be...