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Varian Turbo-V 1000 ICE Instruction Manual - Turbo-V 1000 Ice

Manual is about: E-series

Summary of Turbo-V 1000 ICE

  • Page 1

    Turbo-v 1000 ice e-series model 969-9128 manuale di istruzioni bedienungshandbuch notice de mode d’emploi manual de instrucciones manual de instruÇÕes bedrijfshandleiding instrukstionsbog bruksanvisning instruksjon manual ohjekÄsikirja odhgies crhsews instruction manual 87-900-942-01(a) april 2002.

  • Page 2: Turbo-V 1000 Ice

    Turbo-v 1000 ice e-series.

  • Page 5

    Istruzioni per l’uso .................................................................................................... 1 gebrauchsanleitung ................................................................................................. 3 mode d’emploi...............................................

  • Page 6

    Istruzioni per l’uso 1 87-900-942-01(a) informazioni generali questa apparecchiatura è destinata ad uso professionale. L'utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla varian prima dell'utilizzo dell'apparecchiatura. La v...

  • Page 7

    Istruzioni per l’uso 2 87-900-942-01(a) in presenza di campi elettromagnetici la pompa deve essere protetta tramite opportuni schermi. Vedere l'appendice "technical information" per ulteriori dettagli. Le pompe turbomolecolari della serie turbo-v1000 ice-e series devono essere utilizzate solo con un...

  • Page 8

    Gebrauchsanleitung 3 87-900-942-01(a) allgemeines dieser apparat ist für fachbetriebe bestimmt. Vor gebrauch sollte der benutzer dieses handbuch sowie alle weiteren mitgelieferten zusatzdokumentationen genau lesen. Bei nichtbeachtung -auch teilweise- der enthaltenen hinweise, unsachgemäßem gebrauch ...

  • Page 9

    Gebrauchsanleitung 4 87-900-942-01(a) die turbomolekularpumpen der baureihe turbo-v1000 ice-e series dürfen ausschließlich mit einer der varian- spezialsteuerungen betrieben werden (baureihen 969-9464 220v, 969-9564 120v) und müssen an eine primärpumpe angeschlossen werden (siehe schema “technical i...

  • Page 10

    Mode d’emploi 5 87-900-942-01(a) indications generales cet appareillage a été conçu en vue d'une utilisation professionnelle. Il est conseillé à l'utilisateur de lire attentivement cette notice d'instructions ainsi que toute autre indication supplémentaire fournie par varian, avant d'utiliser l'appa...

  • Page 11

    Mode d’emploi 6 87-900-942-01(a) les pompes turbomoléculaires de la série turbo-v1000 ice-e series ne doivent être utilisées qu’avec l’un des contrôleurs spéciaux varian (série 969-9464 220v, 969-9564 120v) et doivent être connectées à une pompe primaire (cf. Schéma dans “technical information”). La...

  • Page 12

    Instrucciones de uso 7 87-900-942-01(a) informacion general este equipo se ha concebido para un uso profesional. El usuario deberá leer atentamente el presente manual de instrucciones y cualquier otra información suplementaria facilitada por varian antes de utilizar el equipo. Varian se considera li...

  • Page 13

    Instrucciones de uso 8 87-900-942-01(a) las bombas turbomoleculares de la serie turbo-v1000 ice-e series han de utilizarse exclusivamente con uno de los controladores varian (serie 969-9464 220v, 969-9564 120v) y se conectarán a una bomba primaria (véase esquema en “technical information”). La turbo...

  • Page 14

    InstruÇÕes para o uso 9 87-900-942-01(a) informaÇÕes gerais esta aparelhagem destina-se ao uso profissional. O utilizador deve ler atentamente o presente manual de instruções e qualquer outra informação adicional fornecida pela varian antes de usar a aparelhagem. A varian não se responsabiliza pela ...

  • Page 15

    InstruÇÕes para o uso 10 87-900-942-01(a) existindo campos magnéticos, a bomba deve ser protegida com blindagens adequadas. Ver o apêndice "technical information" para maiores detalhes. Existindo campos electromagnéticos, a bomba deve ser protegida com blindagens adequadas. Ver o apêndice "technical...

  • Page 16

    Gebruiksaanwijzingen 11 87-900-942-01(a) algemene informatie deze apparatuur is bestemd voor beroepsmatig gebruik. De gebruiker wordt verzocht aandachtig deze handleiding en alle overige door varian verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen. Varian acht zich niet ...

  • Page 17

    Gebruiksaanwijzingen 12 87-900-942-01(a) bij aanwezigheid van magnetische velden moet de pomp op passende wijze afgeschermd worden. Zie de bijlage “technical information” voor meer informatie. De turbomoleculaire pompen van de serie turbo-v1000 ice-e series mogen alleen gebruikt worden in combinatie...

  • Page 18

    Brugsanvisning 13 87-900-942-01(a) almene oplysninger dette materiel er beregnet til professionel anvendelse. Brugeren bedes læse denne håndbog samt enhver yderligere vejledning, varian har leveret, inden udstyret tages i brug. Varian er ikke ansvarlig, hvis vejledningen ikke er nøje fulgt, eller hv...

  • Page 19

    Brugsanvisning 14 87-900-942-01(a) hvis der findes magnetfelter må pumpen afskærmes. Se bilag “technical information” for yderligere detaljer. Turbomolekulærpumperne i v1000 ice-e series serien må kun anvendes med en af de særlige varian kontrolapparater (serie 969-9464 220 v, 969-9564 120v) og skal...

  • Page 20

    Bruksanvisning 15 87-900-942-01(a) allmÄn information utrustningen är avsedd för yrkesmässig användning. Användaren bör läsa denna bruksanvisning, samt övrig dokumentation från varian före användning av utrustningen. Varian tar inget ansvar för skador helt eller delvis till följd av åsidosättande av...

  • Page 21

    Bruksanvisning 16 87-900-942-01(a) i närvaro av magnetfält skall pumpen skyddas med en särskild skärm. Se bilagan “technical information“ för ytterligare upplysningar. Turbomolekylärpumparna i serien v1000 ice-e series måste användas med en särskild styrenhet från varian (serie 969- 9464 220v, 969-9...

  • Page 22

    Brukerveiledning 17 87-900-942-01(a) generell informasjon dette utstyret er beregnet til bruk av profesjonelle brukere. Brukeren bør lese denne brukerveiledningen og all annen informasjon fra varian før utstyret tas i bruk. Varian kan ikke holdes ansvarlig for hendelser som skjer på grunn av manglen...

  • Page 23

    Brukerveiledning 18 87-900-942-01(a) ved magnetfelt må pumpen beskyttes av dertil egnede skjermer. Se “teknisk informasjon” for detaljer. Turbo-v1000 ice-e series serien turbo-molekulære pumper må kun brukes med en av de spesielle varian kontrollere (serie 969-9464 220v, 969-9564 120v), og må koples...

  • Page 24

    KÄyttÖohjeet 19 87-900-942-01(a) yleisiÄ tietoja tämä laite on tarkoitettu ammattimaiseen käyttöön. Ennen laitteen käyttöönottoa tulee käyttäjän lukea huolellisesti mukana seuraava käyttöohje sekä kaikki muu varianin toimittama lisätieto. Varian ei ota vastuuta seurauksista, jotka johtuvat laitteen ...

  • Page 25

    KÄyttÖohjeet 20 87-900-942-01(a) mikäli magneettikenttijä on läsnä pumppu tulee suojata tähän tarkotukseen olevilla suojilla. Lidä tietoja löytyy “technical information”-liitteestä. Sarjan v1000 ice-e series turbomolekyylipumppuja tulee käyttää ainoastaan niihin sopivien varian valvojien kanssa (sar...

  • Page 26

    Odhgies crhshs odhgies crhshs odhgies crhshs odhgies crhshs 21 87-900-942-01(a) genikes plhrofories genikes plhrofories genikes plhrofories genikes plhrofories aut ÿ h suskeu ÿ proor ∂ zetai gia epaggelmatik ÿ cr ÿ sh. O cr ÿ sthj qa pr ◊ pei na diab£sei prosektik£ tij odhg ∂ ej tou parÒntoj egceir ...

  • Page 27

    Odhgies crhshs odhgies crhshs odhgies crhshs odhgies crhshs 22 87-900-942-01(a) se parous ∂ a hlektromagnhtikèn ped ∂ wn h antl ∂ a pr ◊ pei na prostateÚetai me kat£llhla prokalÚmmata . Bl ◊ pe to par£rthma øtecnik ◊ j plhrofor ∂ ejø gia perissÒterej leptom ◊ reiej. Oi tourmpomoriak ◊ j antl ∂ ej th...

  • Page 28

    Instructions for use 23 87-900-942-01(a) general information this equipment is destined for use by professionals. The user should read this instruction manual and any other additional information supplied by varian before operating the equipment. Varian will not be held responsible for any events oc...

  • Page 29

    Instructions for use 24 87-900-942-01(a) the turbo - v 1000 ice-e series series pumps must only be used with one of the special varian controllers (series 969- 9464 220v, 969-9564 120v) and must be connected to a pri- mary pump (see "technical information"). The turbopump can be installed in any pos...

  • Page 30

    Technical information 25 87-900-942-01(a) description of the turbopump the turbo-v1000 ice e-series pump is available with an iso 200 high vacuum flange. The turbo-v1000 ice e-series pump consists of a high frequency motor driving a turbine fitted with 15 bladed stages. The turbine rotates in an ant...

  • Page 31

    Technical information 26 87-900-942-01(a) technical specification pumping speed n 2 : 950 l/s he: 870 l/s h 2 : 900 l/s compression ratio n 2 : 5 x 10 9 he: 8 x 10 6 h 2 : 2 x 10 5 base pressure* minimum with recommended forepump: -10 mbar ( -10 torr) inlet flange iso 200 foreline flange kf 40 nw ro...

  • Page 32

    Technical information 27 87-900-942-01(a) graph of nitrogen pumping speed vs inlet pressure graph of compression ratio vs foreline pressure graph of inlet pressure vs foreline pressure with fixed inlet flow (ar).

  • Page 33

    Technical information 28 87-900-942-01(a) graph of inlet pressure vs foreline pressure with fixed inlet flow (n2) inlet screen installation the inlet screens mod. 969-9316 prevents the blades of the pump from being damaged by debris greater than 1.4 mm diameter. The inlet screen, however, will reduc...

  • Page 34

    Technical information 29 87-900-942-01(a) heating jacket installation the heating jacket model 969-9819 can be used to heat the pump casing when a condensable proc- ess by-products are present. It is applied on the lower part of the pump casing with the provided set of springs, as shown in the fig- ...

  • Page 35

    Technical information 30 87-900-942-01(a) the water cooling kit 969-9338 has to be con- nected to a 3/8" internal diameter flexible water line. The water cooling kit 969-9348 has to be con- nected to a 6x8 (internal diameter x external di- ameter) metric flexible water line. Cooling may be carried o...

  • Page 36

    Technical information 31 87-900-942-01(a) vent device installation the vent device mod. 969-9831 allows to avoid undesired venting of the pump during a temporary power failure (adjustable time up to 36 min.), and enables an automatic vent operation. Unscrew and remove the vent port threaded plug (se...

  • Page 37

    Technical information 32 87-900-942-01(a) solid state flowmeter installation a gas purge valve is integrated to protect the pump bearings against particulate and corrosive gases that could move into the pump. To the purge valve can be connected a solid state flowmeter model 969-9114 (see the followi...

  • Page 38

    Technical information 33 87-900-942-01(a) typical layout diagram 1. Turbo-v controller 2. Vent valve 3. Vacuum pump shut-off valve (optional) 4. System vent valve (optional) 5. Vacuum chamber 6. Ionisation gauge 7. Fore-vacuum pump connecting flange 8. Oil mist eliminator 9. Fore-vacuum pump with in...

  • Page 39

    Technical information 34 87-900-942-01(a) connection a - high vacuum flange to connect the turbo pump to the iso inlet flange, remove the outer ring and position the centering ring as shown in the figure. Then fix the two flanges with the clamps or claws as shown in the figure. Connection configurat...

  • Page 40

    Technical information 35 87-900-942-01(a) the turbopump is connected to the controller through an 8-pin connector. Pins b, c and d are the 3-phase supply to the motor, pins a, f and g are connected to the temperature sensors (ntc type, 30 k Ω resistance at 20° c) and pin e is con- nected to the pump...

  • Page 41

    Technical information 36 87-900-942-01(a) pump used in presence of magnetic fields magnetic fields induce eddy currents in the rotor of a turbomolecular pump that tend to oppose to its rotation. The result is increased electrical power consump- tion by the motor, most of which is dissipated in the r...

  • Page 42

    Request for return 1. A return authorization number (ra#) will not be issued until this request for return is completely filled out, signed and returned to varian customer service. 2. Return shipments shall be made in compliance with local and international shipping regulations (iata, dot, un). 3. T...

  • Page 43

    Request for return failure report turbo pumps and turbocontrollers position parameters does not start noise vertical power: rotational speed: does not spin freely vibrations horizontal current: inlet pressure: does not reach full speed leak upside-down temp 1: foreline pressure: mechanical contact o...

  • Page 44

    Sales and service offices argentina varian argentina ltd. Sucursal argentina av. Ricardo balbin 2316 1428 buenos aires argentina tel: (54) 1 783 5306 fax: (54) 1 786 5172 australia varian australia pty ltd. 679-701 springvale road mulgrave, victoria zz 3170 australia tel: (61) 395607133 fax: (61) 39...