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Varian Turbo-V 150HT Instruction Manual

Manual is about: 969-9369;969-9370;969-9371;969-9372

Summary of Turbo-V 150HT

  • Page 1

    Turbo-v 150ht pumps model 969-9369 model 969-9370 model 969-9371 model 969-9372 manuale di istruzioni bedienungshandbuch notice de mode d’emploi manual de instrucciones manual de instruÇÕes bedrijfshandleiding instrukstionsbog bruksanvisning instruksjon manual ohjekÄsikirja odhgies crhsews instructi...

  • Page 2: Turbo-V 150Ht

    Turbo-v 150ht.

  • Page 5

    Istruzioni per l’uso .................................................................................................... 1 gebrauchsanleitung ................................................................................................. 3 mode d’emploi...............................................

  • Page 6

    Istruzioni per l’uso 1 87-900-891-01(c) informazioni generali questa apparecchiatura è destinata ad uso professionale. L'uti- lizzatore deve leggere attentamente il presente manuale di i- struzioni ed ogni altra informazione addizionale fornita dalla varian prima dell'utilizzo dell'apparecchiatura. ...

  • Page 7

    Istruzioni per l’uso 2 87-900-891-01(c) la turbopompa può essere installata in qualsiasi posizione. Fissare la turbopompa in posizione stabile collegando la flangia di ingresso della turbopompa ad una controflangia fissa capace di resistere ad una coppia di 221 nm attorno al proprio asse. La turbopo...

  • Page 8

    Gebrauchsanleitung 3 87-900-891-01(c) allgemeines dieser apparat ist für fachbetriebe bestimmt. Vor gebrauch sollte der benutzer dieses handbuch sowie alle weiteren mitge- lieferten zusatzdokumentationen genau lesen. Bei nichtbeach- tung -auch teilweise- der enthaltenen hinweise, unsachgemäßem gebra...

  • Page 9

    Gebrauchsanleitung 4 87-900-891-01(c) die turbopumpen können in jeder position installiert werden. Installiren sie die pumpe in einer stabilen position, indem sie den flansch am eingang der turbopumpe an einen festen ge- genflansch anschließen, der ein drehmoment von 221 nm um seine eigene achse aus...

  • Page 10

    Mode d'emploi 5 87-900-891-01(c) indications generales cet appareillage a été conçu en vue d'une utilisation profes- sionnelle. Il est conseillé à l'utilisateur de lire attentivement cette notice d'instructions ainsi que toute autre indication sup- plémentaire fournie par varian, avant d'utiliser l'...

  • Page 11

    Mode d'emploi 6 87-900-891-01(c) la turbopompe peut être installée dans n'importe quelle posi- tion. Fixer la turbopompe dans une position stable, en reliant la bride d'entrée de la turbopompe à une contre-bride fixe pou- vant supporter un couple de 221 nm autour de son axe. La turbopompe à bride d'...

  • Page 12

    Instrucciones de uso 7 87-900-891-01(c) informacion general este equipo se ha concebido para un uso profesional. El usuario deberá leer atentamente el presente manual de instrucciones y cualquier otra información suplementaria facilitada por varian antes de utilizar el equipo. Varian se considera li...

  • Page 13

    Instrucciones de uso 8 87-900-891-01(c) la turbobomba se puede instalar en cualquier posición. Fijar la turbobomba en posición estable acoplando la brida de entrada de la turbobomba a una falsa brida fija que pueda soportar un par de 221 nm alrededor de su eje. La turbobomba con brida de entrada iso...

  • Page 14

    InstruÇÕes para o uso 9 87-900-891-01(c) informaÇÕes gerais esta aparelhagem destina-se ao uso profissional. O utilizador deve ler atentamente o presente manual de instruções e qualquer outra informação adicional fornecida pela varian antes de usar a aparelhagem. A varian não se responsabiliza pela ...

  • Page 15

    InstruÇÕes para o uso 10 87-900-891-01(c) a turbobomba pode ser instalada em qualquer posição. Fixar a turbobomba em posição estável ligando a flange de entrada da turbobomba a uma contraflange fixa capaz de resistir a um binário de 221 nm ao redor do próprio eixo. A turbobomba com flange de entrada...

  • Page 16

    Gebruiksaanwijzingen 11 87-900-891-01(c) algemene informatie deze apparatuur is bestemd voor beroepsmatig gebruik. De gebruiker wordt verzocht aandachtig deze handleiding en alle overige door varian verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen. Varian acht zich niet ...

  • Page 17

    Gebruiksaanwijzingen 12 87-900-891-01(c) de turbopomp kan in alle standen worden geïnstalleerd. Bevestig de turbompomp in een stabiele positie en verbind de inlaatflens van de turbopomp met een vaste contraflens die een koppel van 221 nm rondom de eigen as kan verdragen. De turbopomp met iso inlaatf...

  • Page 18

    Brugsanvisning 13 87-900-891-01(c) almene oplysninger dette materiel er beregnet til professionel anvendelse. Brugeren bedes læse denne håndbog samt enhver yderligere vejledning, varian har leveret, inden udstyret tages i brug. Varian er ikke ansvarlig, hvis vejledningen ikke er nøje fulgt, eller hv...

  • Page 19

    Brugsanvisning 14 87-900-891-01(c) turbopumpen kan monteres i hvilken som helst stilling. Den fastspændes ved, at turbopumpens indgangsflange fastgøres til en fast modflange, der er i stand til at modstå et drejningsmoment på 221 nm omkring aksen. Turbopumperne med iso indløbsflange skal fastspændes...

  • Page 20

    Bruksanvisning 15 87-900-891-01(c) allmÄn information utrustningen är avsedd för yrkesmässig användning. Användaren bör läsa denna bruksanvisning, samt övrig dokumentation från varian före användning av utrustningen. Varian tar inget ansvar för skador helt eller delvis till följd av åsidosättande av...

  • Page 21

    Bruksanvisning 16 87-900-891-01(c) turbopumpen kan installeras i valfri position. Fäst turbopumpen i ett stabilt läge genom att ansluta pumpens intagsfläns till en fast fläns som måste tåla ett vridmoment på 221 nm runt den genomgående axeln. Turbopumpen med iso-intagsfläns ska fästas i vakuumkammar...

  • Page 22

    Brukerveiledning 17 87-900-891-01(c) generell informasjon dette utstyret er beregnet til bruk av profesjonelle brukere. Brukeren bør lese denne brukerveiledningen og all annen informasjon fra varian før utstyret tas i bruk. Varian kan ikke holdes ansvarlig for hendelser som skjer på grunn av manglen...

  • Page 23

    Brukerveiledning 18 87-900-891-01(c) nei! Turbopumpen kan monteres i en valgfri stilling. Fest turbopumpen i en stabil stilling med inngangsflensen festet mot en koplingsflens med et dreiemoment på 221 nm rundt aksen. Turbopumpene med iso innløpsflens skal festes til vakuumkammeret med dobble eller ...

  • Page 24

    KÄyttÖohjeet 19 87-900-891-01(c) yleisiÄ tietoja tämä laite on tarkoitettu ammattimaiseen käyttöön. Ennen laitteen käyttöönottoa tulee käyttäjän lukea huolellisesti mukana seuraava käyttöohje sekä kaikki muu varianin toimittama lisätieto. Varian ei ota vastuuta seurauksista, jotka johtuvat laitteen ...

  • Page 25

    KÄyttÖohjeet 20 87-900-891-01(c) ei! Turbopumppu voidaan asentaa mihin tahansa asentoon. Turbopumppu tulee kiinnittää vakaaseen asentoon liittämällä turbopumpun sisääntulolaippa kiinteään vastalaippaan,joka kannattaa 221 nm momenttia akselinsa ympärillä, tai käyttäen tarkoitukseen sopivia lisävarust...

  • Page 26

    Odhgie odhgie odhgie odhgies crhshs s crhshs s crhshs s crhshs 21 87-900-891-01(c) genikes plhrofories genikes plhrofories genikes plhrofories genikes plhrofories autÿ h suskeuÿ proor∂zetai gia epaggelmatikÿ crÿsh. O crÿsthj qa pr◊pei na diab£sei prosektik£ tij odhg∂ej tou parèntoj egceirid∂ou kai o...

  • Page 27

    Odhgie odhgie odhgie odhgies crhshs s crhshs s crhshs s crhshs 22 87-900-891-01(c) se magnhtik£ ped∂a Òpou h ◊ntash uperba∂nei ta 10 mt e∂nai anagka∂a h k£luyh thj antl∂aj me ◊na sidhromagnhtikÒ k£lumma. Leptomere∂j plhrofor∂ej d∂nontai sto par£rthma " tecnik◊j plhrofor∂ej ". Oi tourmpomoriak◊j antl...

  • Page 28

    Instruction manual 23 87-900-891-01(c) general information this equipment is destined for use by professionals. The user should read this instruction manual and any other additional information supplied by varian before operating the equipment. Varian will not be held responsible for any events occu...

  • Page 29

    Instruction manual 24 87-900-891-01(c) the turbopump can be installed in any position. Fix the tur- bopump in a stable position connecting the inlet flange of the turbopump to a fixed counter-flange capable of withstanding a torque of 221 nm around its axis. The turbopump with iso inlet flange must ...

  • Page 30

    Technical information 25 87-900-891-01(c) description of the turbopump the turbo-v150ht pump is available in four mod- els. The four models, which differ only in the high vacuum flange, are: − model 969-9369 with iso 100 high vacuum flange − model 969-9370 with iso 63 external diameter high vacuum f...

  • Page 31

    Technical information 26 87-900-891-01(c) technical specification the following figure shows the turbo-v 150ht outline drawing. Dimensions are in inches [mm]. Pumping speed n 2 : he: h 2 : iso 100: 130 l/s 120 l/s 110 l/s iso 63: 100 l/s 105 l/s 100 l/s compression ratio n 2 : 3 x 10 8 he: 8 x 10 5 ...

  • Page 32

    Technical information 27 87-900-891-01(c) pump fed by standard controller pump fed by controller model 969-9436, 969-9536 graph of nitrogen pumping speed vs inlet pressure pump fed by standard controller pump fed by controller model 969-9436, 969-9536 graph of compression ratio vs foreline pressure ...

  • Page 33

    Technical information 28 87-900-891-01(c) inlet screen installation the inlet screens mod. 969-9300 and 969-9302 prevent the blades of the pump from being dam- aged by debris greater than 2 mm diameter. The inlet screen, however, will reduce the pumping speed by about 10%. The inlet screen is fitted...

  • Page 34

    Technical information 29 87-900-891-01(c) water cooling installation two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient. The two model part numbers are: 969-9337 (metal- lic model), and 969-9347 (plastic m...

  • Page 35

    Technical information 30 87-900-891-01(c) air cooling kit installation a fan kit model 969-9314 is available for air cooling the pump. Fan specification: − air flow: 59 l/s (120 cfm) − input voltage: 120 vac 50-60 hz − maximum power: 17 w − dimensions: 127 x 127 mm (5 x 5 inches) position the fan on...

  • Page 36

    Technical information 31 87-900-891-01(c) and then screw the gas purge valve (with a torque of 2.5 nm) as shown in the following figure. Vent valve installation the vent valve mod. 969-9833 allows to avoid un- desired venting of the pump during a temporary power failure (5 sec maximum), and enables ...

  • Page 37

    Technical information 32 87-900-891-01(c) vent device installation the vent device mod. 969-9831 allows to avoid undesired venting of the pump during a temporary power failure (adjustable time up to 36 min.), and enables an automatic vent operation. Unscrew and remove the threaded plug (see figure b...

  • Page 38

    Technical information 33 87-900-891-01(c) connection a - high vacuum flange to connect the turbo pump to the iso inlet flange, remove the outer ring and position the centering ring as shown in the figure. Then fix the two flanges with the clamps or claws as shown in the figure. For conflat flange co...

  • Page 39

    Technical information 34 87-900-891-01(c) connection b - fore-vacuum pump a flange kf 10 nw is available to connect the tur- bopump to the fore-vacuum pump. A hose or vac- uum approved pipe can be used. If a rigid pipe is used, any vibration generated by the mechanical pump must be eliminated throug...

  • Page 40

    Technical information 35 87-900-891-01(c) pump used in presence of magnetic fields magnetic fields induce eddy currents in the rotor of a turbomolecular pump that tend to oppose to its rotation. The result is increased electrical power consump- tion by the motor, most of which is dissipated in the r...

  • Page 41

    Request for return 1. A return authorization number (ra#) will not be issued until this request for return is completely filled out, signed and returned to varian customer service. 2. Return shipments shall be made in compliance with local and international shipping regulations (iata, dot, un). 3. T...

  • Page 42

    Request for return failure report turbo pumps and turbocontrollers position parameters does not start noise vertical power: rotational speed: does not spin freely vibrations horizontal current: inlet pressure: does not reach full speed leak upside-down temp 1: foreline pressure: mechanical contact o...

  • Page 43

    Sales and service offices argentina varian argentina ltd. Sucursal argentina av. Ricardo balbin 2316 1428 buenos aires argentina tel: (54) 1 783 5306 fax: (54) 1 786 5172 australia varian australia pty ltd. 679-701 springvale road mulgrave, victoria zz 3170 australia tel: (61) 395607133 fax: (61) 39...