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Varian Turbo-V70 Instruction manual - Turbo-V 70Lp

Other manuals for Turbo-V70: Instructions Manual
Manual is about: 969-9365 series;969-9366 series;969-9367 series; 969-9368 series

Summary of Turbo-V70

  • Page 1

    Turbo-v70lp pumps 969-9365 series 969-9366 series 969-9367 series 969-9368 series manuale di istruzioni bedienungshandbuch notice de mode d’emploi manual de instrucciones manual de instruÇÕes bedrijfshandleiding instrukstionsbog bruksanvisning instruksjon manual ohjekÄsikirja odhgies crhsews instruc...

  • Page 2: Turbo-V 70Lp

    Turbo-v 70lp.

  • Page 5

    Istruzioni per l’uso .................................................................................................... 1 gebrauchsanleitung.................................................................................................. 3 mode d’emploi ..............................................

  • Page 6

    Istruzioni per l'uso 1 87-900-862-01(e) informazioni generali questa apparecchiatura è destinata ad uso professionale. L'utiliz- zatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla varian prima dell'utilizzo dell'apparecchiatura. La...

  • Page 7

    Istruzioni per l'uso 2 87-900-862-01(e) la turbopompa con flangia di ingresso iso deve essere fissata alla camera da vuoto per mezzo di morsetti doppi o morsetti singo- li. La seguente tabella descrive, per ogni dimensione flangia e tipo di morsetto, il numero di morsetti necessari e con quale coppi...

  • Page 8

    Gebrauchsanleitung 3 87-900-862-01(e) allgemeines dieser apparat ist für fachbetriebe bestimmt. Vor gebrauch sollte der benutzer dieses handbuch sowie alle weiteren mitgelieferten zusatzdokumentationen genau lesen. Bei nichtbeachtung -auch teilweise- der enthaltenen hinweise, unsachgemäßem gebrauch ...

  • Page 9

    Gebrauchsanleitung 4 87-900-862-01(e) die turbomolekularpumpen der baureihe turbo-v 70lp dürfen ausschließlich mit einer der varian-spezialsteuerungen betrieben werden (baureihen 969-9405, 969-9505, 969-9507 oder 969- 9508) und müssen an eine primärpumpe angeschlossen werden (siehe schema “technical...

  • Page 10

    Mode d’emploi 5 87-900-862-01(e) generalites cet appareillage a été conçu en vue d'une utilisation profession- nelle. Il est conseillé à l'utilisateur de lire attentivement cette notice d'instructions ainsi que toute autre indication supplémentaire four- nie par varian, avant d'utiliser l'appareil. ...

  • Page 11

    Mode d’emploi 6 87-900-862-01(e) la turbopompe devra être installée en position verticale ou en position retournée avec une inclinaison maximum de 10° par rap- port à l’axe vertical. La turbopompe peut être installée dans n'importe quelle position. Fixer la turbopompe dans une position stable en rel...

  • Page 12

    Instrucciones de uso 7 87-900-862-01(e) informacion general este equipo se ha concebido para un uso profesional. El usuario deberá leer atentamente el presente manual de instrucciones y cualquier otra información suplementaria facilitada por varian antes de utilizar el equipo. Varian se considera li...

  • Page 13

    Instrucciones de uso 8 87-900-862-01(e) la turbobomba se puede instalar en cualquier posición. Fijar la turbobomba en posición estable uniendo la brida de entrada de la turbobomba con una contrabrida fija capaz de resistir a un par de 200 nm alrededor de su eje, o utilizando el kit opcional apropiad...

  • Page 14

    InstruÇÕes para o uso 9 87-900-862-01(e) informaÇÕes gerais esta aparelhagem destina-se ao uso profissional. O utilizador deve ler atentamente o presente manual de instruções e qualquer outra informação adicional fornecida pela varian antes de usar a aparelhagem. A varian não se responsabiliza pela ...

  • Page 15

    InstruÇÕes para o uso 10 87-900-862-01(e) as bombas turbomoleculares da série turbo-v 70lp devem ser utilizadas somente com um dos controladores varian específicos (série 969-9405, 969-9505, 969-9507 ou 969-9508) e devem ser ligadas a uma bomba primária (ver esquema em "technical information"). A tu...

  • Page 16

    Gebruiksaanwijzingen 11 87-900-862-01(e) algemene informatie deze apparatuur is bestemd voor beroepsmatig gebruik. De gebruiker wordt verzocht aandachtig deze handleiding en alle overige door varian verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen. Varian acht zich niet ...

  • Page 17

    Gebruiksaanwijzingen 12 87-900-862-01(e) de turbomoleculaire pompen van de serie turbo-v 70lp mogen alleen gebruikt worden in combinatie met een van de speciale varian controllers (serie 969-9405, 969-9505, 969-9507, of 969- 9508) en moeten aangesloten zijn op een primaire pomp (zie schema in “techn...

  • Page 18

    Brugsanvisning 13 87-900-862-01(e) almene oplysninger dette materiel er beregnet til professionel anvendelse. Brugeren bedes læse denne håndbog samt enhver yderligere vejledning, varian har leveret, inden udstyret tages i brug. Varian er ikke ans- varlig, hvis vejledningen ikke er nøje fulgt, eller ...

  • Page 19

    Brugsanvisning 14 87-900-862-01(e) turbomolekulærpumperne i v 70lp serien må kun anvendes med en af de særlige varian kontrolapparater (serie 969-9405, 969- 9505, 969-9507 eller 969-9508) og skal forbindes med en primær pumpe (se skemaet i "technical information"). Turbopumpen kan monteres i hvilken...

  • Page 20

    Bruksanvisning 15 87-900-862-01(e) allmÄn information utrustningen är avsedd för yrkesmässig användning. Användaren bör läsa denna bruksanvisning, samt övrig dokumentation från varian före användning av utrustningen. Varian tar inget ansvar för skador helt eller delvis till följd av åsidosättande av...

  • Page 21

    Bruksanvisning 16 87-900-862-01(e) turbomolekylärpumparna i serien v 70lp måste användas med en särskild styrenhet från varian (serie 969-9405, 969-9505, 969- 9507- eller 969-9508), och anslutas till en förpump (se schema i " technical information"). Turbopumpen kan installeras i valfri position. Fä...

  • Page 22

    Brukerveiledning 17 87-900-862-01(e) generell informasjon dette utstyret er beregnet til bruk av profesjonelle brukere. Brukeren bør lese denne brukerveiledningen og all annen informasjon fra varian før utstyret tas i bruk. Varian kan ikke holdes ansvarlig for hendelser som skjer på grunn av manglen...

  • Page 23

    Brukerveiledning 18 87-900-862-01(e) turbo-v 70lp serien turbo-molekulære pumper må kun brukes med en av de spesielle varian kontrollere (969-9405, 969-9505, 969-9507 eller 969-9508), og må koples til hovedpumpen (se skjema i "teknisk informasjon"). Turbopumpen kan monteres i en valgfri stilling. Fe...

  • Page 24

    KÄyttÖohjeet 19 87-900-862-01(e) yleisiÄ tietoja tämä laite on tarkoitettu ammattimaiseen käyttöön. Ennen laitteen käyttöönottoa tulee käyttäjän lukea huolellisesti mukana seuraava käyttöohje sekä kaikki muu varianin toimittama lisätieto. Varian ei ota vastuuta seurauksista, jotka johtuvat laitteen ...

  • Page 25

    KÄyttÖohjeet 20 87-900-862-01(e) turbopumppu voidaan asentaa mihin tahansa asentoon. Turbopumppu tulee kiinnittää vakaaseen asentoon liittämällä turbopumpun sisääntulolaippa kiinteään vastalaippaan, joka kannattaa 200 nm paria akselinsa ympärillä, tai käyttäen tarkoitukseen sopivia lisävarusteita se...

  • Page 26

    Odhgies crhshs 21 87-900-862-01(e) genikes plhrofories aut ÿ h suskeu ÿ proor ∂ zetai gia epaggelmatik ÿ cr ÿ sh. O cr ÿ sthj qa pr ◊ pei na diab£sei prosektik£ tij odhg ∂ ej tou parèntoj egceirid ∂ ou kai opoiad ÿ pote £llh prÒ sqeth plhrofor ∂ a pou d ∂ nei h varian , prin apÒ th crhsimopo ∂ hsh t...

  • Page 27

    Odhgies crhshs 22 87-900-862-01(e) oi tourmpomoriak ◊ j antl ∂ ej thj seir£j turbo-v70lp pr ◊ pei na crhsimopoioÚ ntai mÒ no me ◊ nan apÒ touj eidikoÚ j el ◊ gcouj varian (seir£ 969-9405, 969-9505, 969-9507 h 969-9508 ) kai pr ◊ pei na e ∂ nai sundedem ◊ nej me m ∂ a prwteÚ ousa antl ∂ a (bl ◊ pe sc...

  • Page 28

    Instructions for use 23 87-900-862-01(e) general information this equipment is destined for use by professionals. The user should read this instruction manual and any other additional in- formation supplied by varian before operating the equipment. Varian will not be held responsible for any events ...

  • Page 29

    Instructions for use 24 87-900-862-01(e) the turbopump can be installed in any position. Fix the turbopump in a stable position connecting the inlet flange of the turbopump to a fixed counter-flange capable of withstanding a torque of 200 nm around its axis, or use the optional base fixing kit the t...

  • Page 30

    Technical information description of the turbopump the turbine is made of high-strength, light alumin- ium alloy, and is machined from a single block of aluminium. The turbine blades have five different angles, from 44 ° to 12 ° , while the macrotorr stages are in the form of discs. The turbine roto...

  • Page 31

    Technical information technical specification pumping speed (l/s) with cf 4.5” or iso 63: n 2 : 68 l/s he: 60 l/s h 2 : 45 l/s with cf 2.75” or kf 40 nw: n 2 : 45 l/s he: 50 l/s h 2 : 41 l/s compression ratio n 2 : 5 x 10 8 he: 8 x 10 4 h 2 : 7 x 10 4 base pressure* with recommended mechanical fore ...

  • Page 32

    Technical information graph of nitrogen pumping speed against inlet pressure graph of compression ratio against foreline pressure graph of nitrogen throughput against inlet pressure using the recommended mechanical forevacuum pump 27 87-900-862-01(e).

  • Page 33

    Technical information inlet screen installation the inlet screens mod. 969-9300 and 969-9309 prevent the blades of the pump from being dam- aged by debris greater than 0.7 mm diameter. The inlet screen, however, does reduce the pump- ing speed by about 10%. The inlet screen is fitted in the upper pa...

  • Page 34

    Technical information 29 87-900-862-01(e) heater band installation the heater band model 969-9801 and 969-9802 can be used to heat the pump casing when a bakeout is needed. The heater band is applied to the upper part of the pump envelope, as shown in the figure, and heats it to a temperature of abo...

  • Page 35

    Technical information 30 87-900-862-01(e) water cooling kit installation two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient. The two model part numbers are: 969-9337 (me- tallic model), and 969-9347 (plast...

  • Page 36

    Technical information 31 87-900-862-01(e) base fixing kit installation the kit mod. 969-9326 enables the pump to be fixed at the base. Open the package containing the feet and respec- tive screws. Insert the three grub screws in the three feed from the rear, as shown in the diagram, and screw them i...

  • Page 37

    Technical information air cooling kit installation side mounting a fan kit model 969-9310 is available for air cool- ing the pump, when natural air convenction is in- sufficient. Fan specification: the fan can also be mounted under the pump as shown in the figure. − air flow: 9 l/s (10 cfm) − input ...

  • Page 38

    Technical information 33 87-900-862-01(e) vent valve installation the vent valve mod. 969-9833 enables undesired pump areation during a temporary power failure (5 sec maximum) to be avoided, and enables an automatic vent operation. Unscrew the threaded plug. Screw the adapter (1) into the vent hole ...

  • Page 39

    Technical information screw the flange mod. 969-9109 on the pump, taking care of the o-ring right position. Typical layout diagram assemble the seal ring and lock the vent device in position using the kf klamp. 1. Turbo-v controller vibration isolator installation 2. Vent valve a vibration damper mo...

  • Page 40

    Technical information 35 87-900-862-01(e) for conflat flange connections we recommend using varian hardware. To facilitate assembly and dismantling, apply fel- pro c-100 high temperature lubricant to the screw threads protruding from the flange and between the nuts and flange. Note that the 2.75” cf...

  • Page 41

    Technical information connection b - fore-vacuum pump a flange kf 16 nw is available to connect the turbo-v 70lp to the fore-vacuum pump. A hose or vacuum approved pipe can be used. If a rigid pipe is used, any vibration generated by the me- chanical pump must be eliminated through the use of bellow...

  • Page 42

    Request for return 1. A return authorization number (ra#) will not be issued until this request for return is completely filled out, signed and returned to varian customer service. 2. Return shipments shall be made in compliance with local and international shipping regulations (iata, dot, un). 3. T...

  • Page 43

    Request for return failure report turbo pumps and turbocontrollers position parameters does not start noise vertical power: rotational speed: does not spin freely vibrations horizontal current: inlet pressure: does not reach full speed leak upside-down temp 1: foreline pressure: mechanical contact o...

  • Page 44

    Sales and service offices argentina varian argentina ltd. Sucursal argentina av. Ricardo balbin 2316 1428 buenos aires argentina tel: (54) 1 783 5306 fax: (54) 1 786 5172 australia varian australia pty ltd. 679-701 springvale road mulgrave, victoria zz 3170 australia tel: (61) 395607133 fax: (61) 39...