Operation and maintenance manual series 902 piezo transducer.
Series 902 piezo part # 100014434 series 902 piezo transducer.
Series 902 piezo part # k___________ please fill in the transducer part and flange type numbers in the space above and have them readily available when calling for service or additional information. (the part number can be found on your packing slip. Both the part number and serial number are locate...
Series 902 piezo table of contents package contents ..................................................................... 7 symbols used in this manual .................................................... 8 safety precautions .................................................................... 9 gen...
Series 902 piezo manufacturer – mf ........................................................................... 23 model – md ..................................................................................... 23 pressure reading – pr1 ..................................................................
Series 902 piezo 7 before unpacking the 902 piezo transducer, check all surfaces of the packing material for shipping damage. Confirm that the 902 piezo package contains these items: ♦ 1 902 piezo transducer ♦ 1 902 piezo transducer operation and maintenance manual inspect the components for visible...
8 series 902 piezo caution: refer to the manual. Failure to heed the message could result in personal injury, serious damage to the equipment, or both. Calls attention to important procedures, practices, or conditions. Symbols used in this manual.
Series 902 piezo 9 safety precautions do not substitute parts or modify instrument. Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an kurt j. Lesker calibration and service center for service and repair to ensure that all of the s...
10 series 902 piezo general specifications 0.1 to 1000 torr 1 to 1000 torr 0 to 5 vdc 0 to 10 vdc 2000 torr 1.0% reading ± 0.03% fs ± 0.02% fs/ o c ± 0.02% fs/ o c 50 milliseconds 12 to 30 vdc 0.5 watts 1a @ 30 vac/vdc 304 stainless steel, 316 stainless steel stainless steel, aluminum 0.21 in 3 (3.4...
Series 902 piezo 11 902 piezo user access is through the 9-pin d-sub connector. The zero adjust button allows the user to manually perform a zero calibration. The user can perform zero calibration whenever the pressure is below 10 mtorr. See calibration commands in the rs-485 command set section for...
12 series 902 piezo the 902 piezo measures chamber pressures directly as a force or pressure is applied to the 902 piezo’s diaphragm. Once integrated into the vacuum system, the 902 piezo’s functions are computer-controlled, requiring little manual intervention by the user. This enables the system t...
Series 902 piezo 13 typical applications for the 902 piezo ♦ atmospheric and sub-atmospheric pressure sensing. ♦ measure fore and roughing pressures generated by mechanical vacuum pumps. ♦ alarms to warn of abnormal pressures. ♦ start or stop system processes with a relay set point. ♦ monitor backfi...
14 series 902 piezo transducer installation location locate the 902 where it can measure chamber or manifold pressure. Orientation the 902 can be mounted in any orientation without change of output or calibration. Contamination locate and orient the piezo where contamination is least likely. For exa...
Series 902 piezo 15 ensure a low impedance electrical connection between the 902 sensor body and the grounded vacuum system to shield the sensor from external electromagnetic sources. Input/output wiring the figure and the 902 piezo electrical connections table on the following page identify the pin...
16 series 902 piezo the values of the capacitance c and the resistance r can be calculated by the following equations: c = i 2 /(1 x 10 7 ) r = e/ i a where: c is in farads r is in ohms i is dc or ac peak load current in amperes e is dc or ac peak source voltage in volts a = 1 + (50/ e) note that r ...
Series 902 piezo 17 piezo display module connection the piezo display module (pdm) attaches to the 902 through the d-sub connector. The pdm has a through connector to attach the combined pdm and 902 unit to the rest of the system. The following figure shows how to connect the pdm to the 902. Use the...
18 series 902 piezo operation the 902 piezo operation parameters are preset at the factory. The table below shows the factory default settings. Use the user interface and the commands described on the following pages to change parameter settings as necessary. The user interface to the 902 piezo is t...
Series 902 piezo 19 rs-485 protocol the 902 supports 2400, 4800, 9600, and 19200 baud rates (factory default: 9600). The data format is 8 data bits, no parity, and one stop bit. Standard addresses valid addresses are 1 to 253 (factory default: 253). Universal addresses the 902 receives and responds ...
20 series 902 piezo response syntax (ack/nak) the ascii characters 'ack' or 'nak' preface the query or command response string. The ack sequence signifies the message was processed successfully. The nak sequence indicates there was an error. The response to a query or a successful command is: @ack;f...
Series 902 piezo 21 rs-485 command set the query and command formats shown in this section are examples; the values may vary for the user’s installation. Set up commands address – ad the ad command returns or sets the 902 address. Note: if multiple devices are installed on the system, an address que...
22 series 902 piezo factory default – fd the fd command sets all 902 parameter values to the factory default settings shown in the 902 piezo factory defaults table (page 18). Note: the fd command overrides all parameter values the user sets; use with caution! The address and baud rate reset to 253 a...
Series 902 piezo 23 hardware version – hv the hv command returns the 902 hardware version. Query: @001hv?;ff query response: @001acka;ff manufacturer – mf the mf command returns the 902 manufacturer. Query: @001mf?;ff query response: @001ackhps;ff model – md the md command returns the 902 model numb...
24 series 902 piezo set point commands set point value – sp1 the sp1 command returns or sets the set point value. The set point value is the pressure either below or above which the set point relay will be energized (i.E., n.O. And common contacts will be closed). The direction of the set point (abo...
Series 902 piezo 25 enable set point – en1 the en1 command returns enable status or enables the set point relay. Values: off, on (default: off) query: @001en1?;ff query response: @001ackoff;ff command: @001en1!On;ff command: @001ackon;ff set point status – ss1 the ss1 command returns the status of t...
26 series 902 piezo analog output the 902 analog voltage signal are pins 5 (+) and 8 (-). Connect them to a differential input voltmeter or analog-to-digital converter (adc). The standard 902 analog transducer provides an analog output of 0 to 10 vdc. Users can select either linear or logarithmic an...
Series 902 piezo 27 902 linear analog output (0 - 10 volt scale) 0.001 0.010 0.100 1.000 10.000 0.1 1.0 10.0 100.0 1000.0 pressure (torr) voltage the following graphs show examples of the linear and logarithmic analog output. The pressure to voltage table, following the analog output graphs, shows t...
28 series 902 piezo linear 5 the graph below shows the correlation of linear analog output to pressure on a 0 to 5 volt scale. This is the output the user will see if the analog output format – dac value is linear5. To receive analog output for linear5, the converter must have a 5 volt scale. The li...
Series 902 piezo 29 logarithmic 10 the following graph shows the correlation of logarithmic analog output to pressure on a 2 to 10 volt scale. This is the output the user will see if the analog output format – dac value is log10. To receive analog output for log10, the converter must have a 10 volt ...
30 series 902 piezo logarithmic 5 the following graph shows the correlation of logarithmic analog output to pressure on a 1 to 5 volt scale. This is the output the user will see if the analog output format – dac value is log5. To receive analog output for log5, the converter must have a 5 volt scale...
Series 902 piezo 31 pressure to voltage table pressure linear10 log10 linear5 log5 (torr) (volts) (volts) (volts) (volts) power off 0.0000 0.0000 0.0000 0.0000 0.0 0.0000 2.0000 0.0000 1.0000 0.1 0.0010 2.0000 0.0005 1.0000 0.2 0.0020 2.6021 0.0010 1.3010 0.3 0.0030 2.9542 0.0015 1.4771 0.4 0.0040 3...
32 series 902 piezo maintenance and troubleshooting maintenance and troubleshooting table m o t p m y s y d e m e r / e s u a c e l b i s s o p o t e s n o p s e r o n s d n a m m o c 5 8 4 - s r g n i s s i m ) @ ( r e t c a r a h c n o i t n e t t a - t c e r r o c n i s s e r d d a - g n i s s i ...
Series 902 piezo 33 accessories and part replacement description part number 902, display module, 1000 torr, red led k902001 cable, 9-pin d-sub, 10 feet k31706s cable 9-pin d-sub, 25 feet k31707s cable 9-pin d-sub, 50 feet k31708s operation and maintenance manual 100014434.
34 series 902 piezo extent of the warranty mks instruments, inc. (mks), hps ® products, warrants the hps ® products series 902 piezo transducer and its accessories to be free from defects in materials and workmanship for one (1) year from the date of shipment by mks or authorized representative to t...
Series 902 piezo 35 appendix: how the 902 piezo transducer works the 902 sensor consists of a bridge of piezoresistive elements on a diaphragm, which change their resistance proportional to the pressure applied to the sensor. The resistance change in a monocrystalline semiconductor (piezoelectric ef...
36 series 902 piezo.
Series 902 piezo.
Series 902 piezo.
