Turbo-v 81-m models: 969-8901 969-8902 969-8903 969-8904 87-900-983-01(d) february 2008 (i) manuale di istruzioni (d) bedienungshandbuch (f) notice de mode d’emploi (e) manual de instrucciones (p) manual de instruÇÕes (nl) bedrijfshandleiding (dk) instrukstionsbog (s) bruksanvisning (n) instruksjon ...
Turbo-v 81-m.
Istruzioni per l’uso ...................................................................................................................................1 gebrauchsanleitung ..................................................................................................................................
Instructions for use 49/63 87-900-983-01(d) safety guideline for turbomolecular pumps turbomolecular pumps as described in the following operating manual contain a large amount of kinetic energy due to the high rotational speed in combination with the specific mass of their rotors. In case of a malf...
Instructions for use 50/63 87-900-983-01(d) general information this equipment is destined for use by professionals. The user should read this instruction manual and any other additional information supplied by varian before operating the equipment. Varian will not be held responsible for any events...
Instructions for use 51/63 87-900-983-01(d) the turbo-v 81-m pumps must be used in conjunction with one of the suitable varian controller and they must be connected to a primary pump (see "technical information"). The available controllers are the following: - rack controller 81-ag: 969-8988 - rack ...
Technical information 52/63 87-900-983-01(d) description of the turbo-v 81-m the turbo-v 81-m pump is available in four ver- sions. The difference among the four versions lies purely in the high vacuum connection. The four versions are: − model 969-8901 with iso 63 high vacuum flange; − model 969-89...
Technical information 53/63 87-900-983-01(d) technical specification pumping speed with iso 63 or cff 4.5” n 2 : 77 l/s he: 65 l/s h 2 : 50 l/s with kf 40 nw or cff 2.75” n 2 : 50 l/s he: 56 l/s h 2 : 46 l/s compression ratio n 2 : 3 x 10 8 he: 8 x 10 4 h 2 : 7 x 10 3 base pressure * (with recommend...
Technical information 54/63 87-900-983-01(d) turbo-v 81-m outline the following figure shows the turbo-v 81-m outlines (dimensions are in inches [mm]). Turbo-v 81-m outline.
Technical information 55/63 87-900-983-01(d) graph of pumping speed vs inlet pressure with a 8 m 3 /h mechanical pump graph of compression ratio vs foreline pressure.
Technical information 56/63 87-900-983-01(d) inlet screen installation the inlet screens mod. 969-9300 and 969-9309 prevent the blades of the pump from being dam- aged by debris greater than 0.7 mm diameter. The inlet screen, however, does reduce the pump- ing speed by about 10%. The inlet screen is...
Technical information 57/63 87-900-983-01(d) heater band installation the heater band model 969-9801 and 969-9802 can be used to heat the pump casing when a bakeout is needed. The heater band is applied to the upper part of the pump casing, as shown in the figure, and heats it to a temperature of ab...
Technical information 58/63 87-900-983-01(d) water cooling kit installation two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient. The two model part numbers are: 969-9823 (me- tallic model), and 969-9824 (pl...
Technical information 59/63 87-900-983-01(d) 1. Connect the plate to the pump bottom with four screws m3x20 2. Assemble the metal or the plastic kit as shown. Cooling may be carried out either through an open circuit with eventual discharge of the water, or us- ing a closed circuit cooling system. T...
Technical information 60/63 87-900-983-01(d) then screw the vent valve into the pump and tighten it using a 16 mm hexagonal spanner with a torque of 2.5 nm. ! Caution do not overtighten the valve as this may damage the thread on the pump. Then connect the cable from the valve to the suit- able conne...
Technical information 61/63 87-900-983-01(d) with standard rack controller 1. Turbo-v standard rack controller 2. Vent valve 3. Vacuum pump shut-off valve (optional) 4. System vent valve (optional) 5. Vacuum chamber 6. Ionization gauge 7. Fore-vacuum pump connecting flange 8. Oil mist eliminator 9. ...
Technical information 62/63 87-900-983-01(d) connection configurations connection b - fore-vacuum pump a flange kf 16 nw is available to connect the turbo-v 81-m pump to the fore-vacuum pump. A hose or vacuum approved pipe can be used. If a rigid pipe is used, any vibration generated by the mechanic...
Technical information 63/63 87-900-983-01(d) pump used in presence of magnetic fields magnetic fields induce eddy currents in the rotor of a turbomolecular pump that tend to oppose to its rotation. The result is increased electrical power consump- tion by the motor, most of which is dissipated in th...
Request for return 1. A return authorization number (ra#) will not be issued until this request for return is completely filled out, signed and returned to varian customer service. 2. Return shipments shall be made in compliance with local and international shipping regulations (iata, dot, un). 3. T...
Request for return failure report turbo pumps and turbocontrollers position parameters does not start noise vertical power: rotational speed: does not spin freely vibrations horizontal current: inlet pressure: does not reach full speed leak upside-down temp 1: foreline pressure: mechanical contact o...
Sales and service offices france and benelux varian s.A. 7 avenue des tropiques z.A. De courtaboeuf - b.P. 12 les ulis cedex (orsay) 91941 france tel: (33) 1 69 86 38 84 fax: (33) 1 69 86 29 88 from benelux tel: (31) 118 67 15 70 from benelux fax: (31) 118 67 15 69 canada central coordination throug...
