Varian 969-8901 Instruction Manual - page 17
TECHNICAL INFORMATION
60/63
87-900-983-01(D)
Then screw the vent valve into the pump and
tighten it using a 16 mm hexagonal spanner with a
torque of 2.5 Nm.
!
CAUTION
Do not overtighten the valve as this may damage
the thread on the pump.
Then connect the cable from the valve to the suit-
able connector on the controller.
VIBRATION ISOLATOR INSTALLATION
Two vibration isolators for ISO and CFF inlet
flange version pumps are available as accesso-
ries.
The two model part numbers are the following:
− model 969-9375 for ISO 63 flange;
− model 969-9376 for CFF 4.5” flange.
They typically reduce the vibration transmitted
from the Turbo-V 81-M to the system by a factor of
20.
Please refer to the relevant instruction manual.
TYPICAL LAYOUT DIAGRAM
With Navigator Controller
1. Turbo-V Navigator controller
2. Vent
valve
3. Vacuum pump shut-off valve (optional)
4. System vent valve (optional)
5. Vacuum
chamber
6. Ionization
gauge
7. Fore-vacuum pump connecting flange
8. Oil mist eliminator
9. Fore-vacuum pump with internal one-way valve
10. Fore-vacuum pump control relay
11. Connection for water cooling
12. Roughing line with valve (optional)
13. Turbopump
14. Fan
15. Flexible connection