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Varian Turbo-V250SF Instruction manual

Manual is about: 969-9009 series 969-9010 series

Summary of Turbo-V250SF

  • Page 1

    Turbo-v250sf pumps 969-9009 series 969-9010 series manuale di istruzioni bedienungshandbuch notice de mode d’emploi manual de instrucciones manual de instruÇÕes bedrijfshandleiding instrukstionsbog bruksanvisning instruksjon manual ohjekÄsikirja odhgies crhsews instruction manual 87-900-881-01(b) ap...

  • Page 2: Turbo-V 250Sf

    Turbo-v 250sf.

  • Page 5

    Istruzioni per l’uso .................................................................................................... 1 gebrauchsanleitung ................................................................................................. 3 mode d’emploi...............................................

  • Page 6

    Istruzioni per l'uso 1 87-900-881-01(b) informazioni generali questa apparecchiatura è destinata ad uso professionale. L'utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla varian prima dell'utilizzo dell'apparecchiatura. La v...

  • Page 7

    Istruzioni per l'uso 2 87-900-881-01(b) la turbopompa con flangia di ingresso iso deve essere fissata alla camera da vuoto per mezzo di morsetti doppi o morsetti singoli. La seguente tabella descrive, per ogni dimensione flangia e tipo di morsetto, il numero di morsetti necessari e con quale coppia ...

  • Page 8

    Gebrauchsanleitung 3 87-900-881-01(b) allgemeines dieser apparat ist für fachbetriebe bestimmt. Vor gebrauch sollte der benutzer dieses handbuch sowie alle weiteren mitge- lieferten zusatzdokumentationen genau lesen. Bei nichtbeach- tung -auch teilweise- der enthaltenen hinweise, unsachgemä- ßem geb...

  • Page 9

    Gebrauchsanleitung 4 87-900-881-01(b) die turbomolekularpumpen der baureihe turbo-v 250sf dür- fen ausschließlich mit einer der varian-spezialsteuerungen betrieben werden (baureihen 969-9423, 969-9504, 969-9523, 969-9425 oder 969-9866) und müssen an eine primärpumpe angeschlossen werden (siehe schem...

  • Page 10

    Mode d’emploi 5 87-900-881-01(b) generalites cet appareillage a été conçu en vue d'une utilisation professionnelle. Il est conseillé à l'utilisateur de lire attentivement cette notice d'instructions ainsi que toute autre indication supplémentaire fournie par varian, avant d'utiliser l'appareil. Vari...

  • Page 11

    Mode d’emploi 6 87-900-881-01(b) les pompes turbomoléculaires de la série turbo-v 250sf ne doivent être utilisées qu’avec l’un des contrôleurs spéciaux varian (série 969-9423, 969-9504, 969-9523, 969-9425 ou 969- 9866) et doivent être connectées à une pompe primaire (cf. Schéma dans “technical infor...

  • Page 12

    Instrucciones de uso 7 87-900-881-01(b) informacion general este equipo se ha concebido para un uso profesional. El usuario deberá leer atentamente el presente manual de instrucciones y cualquier otra información suplementaria facilitada por varian antes de utilizar el equipo. Varian se considera li...

  • Page 13

    Instrucciones de uso 8 87-900-881-01(b) cuando hay campos electromagnéticos la bomba ha de protegerse mediante pantallas oportunas. Véase el apéndice “technical information” para más detalles. Las bombas turbomoleculares de la serie turbo-v 250sf han de utilizarse exclusivamente con uno de los contr...

  • Page 14

    InstruÇÕes para o uso 9 87-900-881-01(b) informaÇÕes gerais esta aparelhagem destina-se ao uso profissional. O utilizador deve ler atentamente o presente manual de instruções e qualquer outra informação adicional fornecida pela varian antes de usar a aparelhagem. A varian não se responsabiliza pela ...

  • Page 15

    InstruÇÕes para o uso 10 87-900-881-01(b) existindo campos electromagnéticos, a bomba deve ser protegida com blindagens adequadas. Ver o apêndice "technical information" para maiores detalhes. As bombas turbomoleculares da série turbo-v 250sf devem ser utilizadas somente com um dos controladores var...

  • Page 16

    Gebruiksaanwijzingen 11 87-900-881-01(b) algemene informatie deze apparatuur is bestemd voor beroepsmatig gebruik. De gebruiker wordt verzocht aandachtig deze handleiding en alle overige door varian verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen. Varian acht zich niet ...

  • Page 17

    Gebruiksaanwijzingen 12 87-900-881-01(b) de turbomoleculaire pompen van de serie turbo-v 250sf mogen alleen gebruikt worden in combinatie met een van de speciale varian controllers (serie 969-9423, 969-9504, 969- 9523, 969-9425, of 969-9866) en moeten aangesloten zijn op een primaire pomp (zie schem...

  • Page 18

    Brugsanvisning 13 87-900-881-01(b) almene oplysninger dette materiel er beregnet til professionel anvendelse. Brugeren bedes læse denne håndbog samt enhver yderligere vejledning, varian har leveret, inden udstyret tages i brug. Varian er ikke ansvarlig, hvis vejledningen ikke er nøje fulgt, eller hv...

  • Page 19

    Brugsanvisning 14 87-900-881-01(b) turbomolekulærpumperne i v 250sf serien må kun anvendes med en af de særlige varian kontrolapparater (serie 969-9423, 969-9504, 969-9523, 969-9425 eller 969-9866) og skal forbindes med en primær pumpe (se skemaet i "technical information"). Turbopumpen kan monteres...

  • Page 20

    Bruksanvisning 15 87-900-881-01(b) allmÄn information utrustningen är avsedd för yrkesmässig användning. Användaren bör läsa denna bruksanvisning, samt övrig dokumentation från varian före användning av utrustningen. Varian tar inget ansvar för skador helt eller delvis till följd av åsidosättande av...

  • Page 21

    Bruksanvisning 16 87-900-881-01(b) turbomolekylärpumparna i serien v 250sf måste användas med en särskild styrenhet från varian (serie 969-9423, 969- 9504, 969-9523, 969-9425, eller 969-9866), och anslutas till en förpump (se schema i " technical information"). Turbopumpen kan installeras i valfri p...

  • Page 22

    Brukerveiledning 17 87-900-881-01(b) generell informasjon dette utstyret er beregnet til bruk av profesjonelle brukere. Brukeren bør lese denne brukerveiledningen og all annen informasjon fra varian før utstyret tas i bruk. Varian kan ikke holdes ansvarlig for hendelser som skjer på grunn av manglen...

  • Page 23

    Brukerveiledning 18 87-900-881-01(b) turbo-v 250sf serien turbo-molekulære pumper må kun brukes med en av de spesielle varian kontrollere (969-9423, 969-9504, 969-9523, 969-9425 eller 969-9866), og må koples til hovedpumpen (se skjema i "teknisk informasjon"). Turbopumpen kan monteres i en valgfri s...

  • Page 24

    KÄyttÖohjeet 19 87-900-881-01(b) yleisiÄ tietoja tämä laite on tarkoitettu ammattimaiseen käyttöön. Ennen laitteen käyttöönottoa tulee käyttäjän lukea huolellisesti mukana seuraava käyttöohje sekä kaikki muu varianin toimittama lisätieto. Varian ei ota vastuuta seurauksista, jotka johtuvat laitteen ...

  • Page 25

    KÄyttÖohjeet 20 87-900-881-01(b) sarjan v 250sf turbomolekyylipumppuja tulee käyttää ainoastaan niihin sopivien varian valvojien kanssa (sarja 969- 9423, 969-9504, 969-9523, 969-9425 tai 969-9866) ja niiden täytyy olla yhdistettyinä pääpumppuun (katso kaaviota osasta "technical information"). Turbop...

  • Page 26

    Odhgies crhshs odhgies crhshs odhgies crhshs odhgies crhshs 21 87-900-881-01(b) genikes plhrofories genikes plhrofories genikes plhrofories genikes plhrofories autÿ h suskeuÿ proor∂zetai gia epaggelmatikÿ crÿsh. O crÿsthj qa pr◊pei na diab£sei prosektik£ tij odhg∂ej tou parèntoj egceirid∂ou kai opoi...

  • Page 27

    Odhgies crhshs odhgies crhshs odhgies crhshs odhgies crhshs 22 87-900-881-01(b) oi tourmpomoriak◊j antl∂ej thj seir£j turbo-v250sf pr◊pei na crhsimopoioÚntai mÒno me ◊nan apÒ touj eidikoÚj el◊gcouj varian (seir£ 969-9423, 969-9504, 969-9523, 969-9425 h 969-9866) kai pr◊pei na e∂nai sundedem◊nej me m...

  • Page 28

    Instructions for use 23 87-900-881-01(b) general information this equipment is destined for use by professionals. The user should read this instruction manual and any other additional information supplied by varian before operating the equipment. Varian will not be held responsible for any events oc...

  • Page 29

    Instructions for use 24 87-900-881-01(b) the turbopump with iso inlet flange must be fixed to the vacuum chamber by means of clamps or claws. The following table shows, for each flange and fixing device, the necessary number of clamps or claws and the relevant fixing torque. Flange fixing device n. ...

  • Page 30

    Technical information 25 87-900-881-01(b) description of the turbopump the turbo-v250sf pump is available in two ver- sions. The difference between the two versions lies purely in the high vacuum connection. The two versions are: − model 969-9009 with iso 100 high vacuum flange − model 969-9010 with...

  • Page 31

    Technical information 26 87-900-881-01(b) technical specification pumping speed (l/s) main port: side port: n 2 : 250 l/s n 2 : 10 l/s he: 220 l/s he: 10 l/s h 2 : 200 l/s h 2 : 8 l/s compression ratio n 2 : 1 x 10 7 he: 7 x 10 3 h 2 : 2 x 10 3 maximum differen- tial pressure ratio n 2 : 1 x 10 5 ba...

  • Page 32

    Technical information 27 87-900-881-01(b) graph of nitrogen pumping speed against inlet pressure graph of compression ratio against foreline pressure graph of nitrogen throughput against inlet pressure using the recommended mechanical forevacuum pump.

  • Page 33

    Technical information 28 87-900-881-01(b) inlet screen installation the inlet screens mod. 969-9302 prevents the blades of the pump from being damaged by debris greater than 0.7 mm diameter. The inlet screen, however, does reduce the pump- ing speed by about 10%. The inlet screen is fitted in the up...

  • Page 34

    Technical information 29 87-900-881-01(b) water cooling kit installation two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient. The two model part numbers are: 969-9337 (metal- lic model), and 969-9347 (plast...

  • Page 35

    Technical information 30 87-900-881-01(b) base fixing kit installation the kit mod. 969-9326 enables the pump to be fixed at the base. Open the package containing the feet and respec- tive screws. Insert the three grub screws in the three feed from the rear, as shown in the diagram, and screw them i...

  • Page 36

    Technical information 31 87-900-881-01(b) air cooling kit installation two fan kits are available for air cooling the pump, when natural air convenction is insufficient. Specification for small fan (mod. 969-9310): − air flow: 9 l/s (10 cfm) − input voltage: 24 vdc − maximum power: 2.16 w − dimensio...

  • Page 37

    Technical information 32 87-900-881-01(b) vent valve installation the vent valve mod. 969-9833 enables undesired venting of the pump during a temporary power fail- ure (5 sec maximum) to be avoided, and enables an automatic vent operation. Unscrew the threaded plug. Screw the vent valve into the pum...

  • Page 38

    Technical information 33 87-900-881-01(b) vent device installation the vent device mod. 969-9831 allows to avoid undesired venting of the pump during a temporary power failure (adjustable time up to 36 min.), and enables an automatic vent operation. Unscrew and remove the threaded plug. Screw the fl...

  • Page 39

    Technical information 34 87-900-881-01(b) typical connections high vacuum flange connection to connect the turbo-v250sf pump to the iso inlet flange, remove the outer ring and position the centering ring as shown in the figure. Then fix the two flanges with the clamps or claws as shown in the figure...

  • Page 40

    Technical information 35 87-900-881-01(b) fore-vacuum pump connection a flange kf 16 nw is available to connect the turbo-v250sf to the fore-vacuum pump. A hose or vacuum approved pipe can be used. If a rigid pipe is used, any vibration generated by the me- chanical pump must be eliminated through t...

  • Page 41

    Technical information 36 87-900-881-01(b) pump used in presence of magnetic fields magnetic fields induce eddy currents in the rotor of a turbomolecular pump that tend to oppose to its rotation. The result is increased electrical power consump- tion by the motor, most of which is dissipated in the r...

  • Page 42

    Request for return 1. A return authorization number (ra#) will not be issued until this request for return is completely filled out, signed and returned to varian customer service. 2. Return shipments shall be made in compliance with local and international shipping regulations (iata, dot, un). 3. T...

  • Page 43

    Request for return failure report turbo pumps and turbocontrollers position parameters does not start noise vertical power: rotational speed: does not spin freely vibrations horizontal current: inlet pressure: does not reach full speed leak upside-down temp 1: foreline pressure: mechanical contact o...

  • Page 44

    Sales and service offices argentina varian argentina ltd. Sucursal argentina av. Ricardo balbin 2316 1428 buenos aires argentina tel: (54) 1 783 5306 fax: (54) 1 786 5172 australia varian australia pty ltd. 679-701 springvale road mulgrave, victoria zz 3170 australia tel: (61) 395607133 fax: (61) 39...