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Varian Turbo-V300 ICE Instruction Manual

Summary of Turbo-V300 ICE

  • Page 1

    Turbo-v300 ice pumps model 969-9076 model 969-9083 model 969-9095 model 969-9096 manuale di istruzioni bedienungshandbuch notice de mode d’emploi manual de instrucciones manual de instruÇÕes bedrijfshandleiding instrukstionsbog bruksanvisning instruksjon manual ohjekÄsikirja odhgies crhsews instruct...

  • Page 2: Turbo-V300 Ice

    Turbo-v300 ice.

  • Page 5

    Istruzioni per l’uso .................................................................................................... 1 gebrauchsanleitung ................................................................................................. 3 mode d’emploi ..............................................

  • Page 6

    Istruzioni per l’uso 1 87-900-897-01(c) informazioni generali questa apparecchiatura è destinata ad uso professionale. L'utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla varian prima dell'utilizzo dell'apparecchiatura. La v...

  • Page 7

    Istruzioni per l’uso 2 87-900-897-01(c) la turbopompa con flangia di ingresso iso deve essere fissata alla camera da vuoto per mezzo di morsetti doppi o morsetti singoli. La seguente tabella descrive, per ogni dimensione flangia e tipo di morsetto, il numero di morsetti necessari e con quale coppia ...

  • Page 8

    Gebrauchsanleitung 3 87-900-897-01(c) allgemeines dieser apparat ist für fachbetriebe bestimmt. Vor gebrauch sollte der benutzer dieses handbuch sowie alle weiteren mitgelieferten zusatzdokumentationen genau lesen. Bei nichtbeachtung -auch teilweise- der enthaltenen hinweise, unsachgemäßem gebrauch ...

  • Page 9

    Gebrauchsanleitung 4 87-900-897-01(c) die turbopumpen können in jeder position installiert werden. Installieren sie die pumpe in einer stabilen position, indem sie den flansch am eingang der turbopumpe an einen festen gegenflansch anschließen, der ein drehmoment von 1000 nm um seine eigene achse aus...

  • Page 10

    Mode d’emploi 5 87-900-897-01(c) indications generales cet appareillage a été conçu en vue d'une utilisation professionnelle. Il est conseillé à l'utilisateur de lire attentivement cette notice d'instructions ainsi que toute autre indication supplémentaire fournie par varian, avant d'utiliser l'appa...

  • Page 11

    Mode d’emploi 6 87-900-897-01(c) la turbopompe peut être installée dans n'importe quelle position. Fixer la turbopompe dans une position stable, en reliant la bride d'entrée de la turbopompe à une contre-bride fixe pouvant supporter un couple de 1000 nm autour de son axe. La turbopompe à bride d'ent...

  • Page 12

    Instrucciones de uso 7 87-900-897-01(c) informaciÓn general este equipo se ha concebido para un uso profesional. El usuario deberá leer atentamente el presente manual de instrucciones y cualquier otra información suplementaria facilitada por varian antes de utilizar el equipo. Varian se considera li...

  • Page 13

    Instrucciones de uso 8 87-900-897-01(c) la turbobomba se puede instalar en cualquier posición. Fijar la turbobomba en posición estable acoplando la brida de entrada de la turbobomba a una falsa brida fija que pueda soportar un par de 1000 nm alrededor de su eje la turbobomba con brida de entrada iso...

  • Page 14

    InstruÇÕes para o uso 9 87-900-897-01(c) informaÇÕes gerais esta aparelhagem destina-se ao uso profissional. O utilizador deve ler atentamente o presente manual de instruções e qualquer outra informação adicional fornecida pela varian antes de usar a aparelhagem. A varian não se responsabiliza pela ...

  • Page 15

    InstruÇÕes para o uso 10 87-900-897-01(c) a turbobomba pode ser instalada em qualquer posição. Fixar a turbobomba em posição estável ligando a flange de entrada da turbobomba a uma contraflange fixa capaz de resistir a um torque de 1000 nm ao redor do próprio eixo. A turbobomba com flange de entrada...

  • Page 16

    Gebruiksaanwijzingen 11 87-900-897-01(c) algemene informatie deze apparatuur is bestemd voor beroepsmatig gebruik. De gebruiker wordt verzocht aandachtig deze handleiding en alle overige door varian verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen. Varian acht zich niet ...

  • Page 17

    Gebruiksaanwijzingen 12 87-900-897-01(c) de turbopomp kan in alle standen worden geïnstalleerd. Bevestig de turbopomp in een stabiele positie en verbind de inlaatflens van de turbopomp met een vaste contraflens die een koppel van 1000 nm rondom de eigen as kan verdragen. De turbopomp met iso inlaatf...

  • Page 18

    Brugsanvisning 13 87-900-897-01(c) generel information dette materiel er beregnet til professionel anvendelse. Brugeren bedes læse denne håndbog samt enhver yderligere vejledning, varian har leveret, inden udstyret tages i brug. Varian er ikke ansvarlig, hvis vejledningen ikke er nøje fulgt, eller h...

  • Page 19

    Brugsanvisning 14 87-900-897-01(c) turbopumpen kan monteres i hvilken som helst stilling. Den fastspændes ved, at turbopumpens indgangsflange fastgøres til en fast modflange, der er i stand til at modstå et drejningsmoment på 1000 nm omkring aksen. Turbopumperne med iso indløbsflange skal fastspænde...

  • Page 20

    Bruksanvisning 15 87-900-897-01(c) allmÄn information utrustningen är avsedd för yrkesmässig användning. Användaren bör läsa denna bruksanvisning, samt övrig dokumentation från varian före användning av utrustningen. Varian tar inget ansvar för skador helt eller delvis till följd av åsidosättande av...

  • Page 21

    Bruksanvisning 16 87-900-897-01(c) turbopumpen kan installeras i valfri position. Fäst turbopumpen i ett stabilt läge genom att ansluta pumpens intagsfläns till en fast fläns som måste tåla ett vridmoment på 1000 nm runt den genomgående axeln. Turbopumpen med iso-intagsfläns ska fästas i vakuumkamma...

  • Page 22

    Brukerveiledning 17 87-900-897-01(c) generell informasjon dette utstyret er beregnet til bruk av profesjonelle brukere. Brukeren bør lese denne brukerveiledningen og all annen informasjon fra varian før utstyret tas i bruk. Varian kan ikke holdes ansvarlig for hendelser som skjer på grunn av manglen...

  • Page 23

    Brukerveiledning 18 87-900-897-01(c) turbopumpen kan monteres i en valgfri stilling. Fest turbopumpen i en stabil stilling med inngangsflensen festet mot en koplingsflens med et dreiemoment på 1000 nm rundt aksen. Turbopumpene med iso innløpsflens skal festes til vakuumkammeret med dobble eller enkl...

  • Page 24

    KÄyttÖohjeet 19 87-900-897-01(c) yleisiÄ tietoja tämä laite on tarkoitettu ammattimaiseen käyttöön. Ennen laitteen käyttöönottoa tulee käyttäjän lukea huolellisesti mukana seuraava käyttöohje sekä kaikki muu varianin toimittama lisätieto. Varian ei ota vastuuta seurauksista, jotka johtuvat laitteen ...

  • Page 25

    KÄyttÖohjeet 20 87-900-897-01(c) turbopumppu voidaan asentaa mihin tahansa asentoon. Turbopumppu tulee kiinnittää vakaaseen asentoon liittämällä turbopumpun sisääntulolaippa kiinteään vastalaippaan,joka kannattaa 1000 nm momenttia akselinsa ympärillä, tai käyttäen tarkoitukseen sopivia lisävarusteit...

  • Page 26

    Odhgies crhshs 21 87-900-897-01(c) genikes plhrofories autˇ h suskeuˇ proor∂zetai gia epaggelmatikˇ crˇsh. O crˇsthj qa pr◊pei na diab£sei prosektik£ tij odhg∂ej tou parÒntoj egceir∂diou kai opoiadˇpote £llh prÒsqeth plhrofor∂a pou d∂nei h varian, prin apÒ th crhsimopo∂hsh thj suskeuˇj. H varian den...

  • Page 27

    Odhgies crhshs 22 87-900-897-01(c) h tourmpoantl∂a mpore∂ na egkatastaqe∂ se opoiadˇpote q◊sh. Stereèste thn tourmpoantl∂a se staqerˇ q◊sh enènontaj th fl£ntza eisÒdou me m∂a staqerˇ kÒntrofl£ntzaikanˇ na sugkratˇsei ◊na zeÚgoj 1000 nm gÚrw apÒ ton £xon£ thj. H tourmpoantl∂a me fl£ntza eisÒdou iso p...

  • Page 28

    Instructions for use 23 87-900-897-01(c) general information this equipment is destined for use by professionals. The user should read this instruction manual and any other additional information supplied by varian before operating the equipment. Varian will not be held responsible for any events oc...

  • Page 29

    Instructions for use 24 87-900-897-01(c) the turbopump with iso inlet flange must be fixed to the vacuum chamber by means of clamps or claws. The following table shows, for each flange and fixing device, the necessary number of clamps or claws and the relevant fixing torque. Flange fixing device n. ...

  • Page 30

    Technical information 25 87-900-897-01(c) description of the turbopump the turbo-v300 ice pump is available in four ver- sions which differ only in their inlet flange. They are: − model 969-9076 with iso 100 high vacuum flange − model 969-9083 with iso 160 high vacuum flange − model 969-9095 with cf...

  • Page 31

    Technical information 26 87-900-897-01(c) technical specification pumping speed with iso 160 or cff 8”: n 2 : 280 l/s he: 230 l/s h 2 : 210 l/s with iso 100 or cff 6”: n 2 : 250 l/s he: 220 l/s h 2 : 220 l/s compression ra- tio n 2 : >2 x 10 8 he: 1 x 10 5 h 2 : 2 x 10 4 base pressure* with recommen...

  • Page 32

    Technical information 27 87-900-897-01(c) graph of nitrogen pumping speed vs inlet pressure graph of compression ratio vs foreline pressure graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump.

  • Page 33

    Technical information 28 87-900-897-01(c) inlet screen installation the inlet screens mod. 969-9302 and 969-9304 prevent the blades of the pump from being dam- aged by debris greater than 0.7 mm diameter. The inlet screen, however, does reduce the pump- ing speed by about 10%. The inlet screen is fi...

  • Page 34

    Technical information 29 87-900-897-01(c) heating jacket installation the heating jacket model 969-9818 can be used to heat the pump casing when a condensable proc- ess by-products are present. It is applied on the lower part of the pump casing with the provided set of springs, as shown in the fig- ...

  • Page 35

    Technical information 30 87-900-897-01(c) the metallic model is assembled as shown in the figure. Two 6 mm (1/4") internal diameter rubber or plastic hoses from the water supply must be fitted to the two nozzles. Note these hoses must be held on the respective noz- zles using hose clips to avoid tha...

  • Page 36

    Technical information 31 87-900-897-01(c) vent device installation the vent device mod. 969-9831 allows to avoid undesired venting of the pump during a temporary power failure (adjustable time up to 36 min.), and enables an automatic vent operation. Unscrew and remove the threaded plug (see figure b...

  • Page 37

    Technical information 32 87-900-897-01(c) solid state flowmeter installation a gas purge valve is integrated to protect the pump bearings against particulate and corrosive gases that could move into the pump. To the purge valve can be connected a solid state flowmeter model 969-9114 (see the followi...

  • Page 38

    Technical information 33 87-900-897-01(c) typical layout diagram 1. Turbo-v controller 2. Vent valve 3. Vacuum pump shut-off valve (optional) 4. System vent valve (optional) 5. Vacuum chamber 6. Ionization gauge 7. Fore-vacuum pump connecting flange 8. Oil mist eliminator 9. Fore-vacuum pump with in...

  • Page 39

    Technical information 34 87-900-897-01(c) connection configurations connection b - fore-vacuum pump a flange kf 25 nw is available to connect the turbo-v300 ice to the fore-vacuum pump. A hose or vacuum approved pipe can be used. If a rigid pipe is used, any vibration generated by the me- chanical p...

  • Page 40

    Technical information 35 87-900-897-01(c) suggested pump installation the following figure shows a suggested pump in- stallation. 1. Vacuum chamber 2. Rough line 3. Heater jacket 4. Ice turbo pump 5. Heater cable 6. Pump cable 7. Pump controller 8. Gas purge valve 9. Solid state flowmeter v1 gate va...

  • Page 41

    Technical information 36 87-900-897-01(c) pump used in presence of magnetic fields magnetic fields induce eddy currents in the rotor of a turbomolecular pump that tend to oppose to its rotation. The result is increased electrical power consump- tion by the motor, most of which is dissipated in the r...

  • Page 42

    Request for return 1. A return authorization number (ra#) will not be issued until this request for return is completely filled out, signed and returned to varian customer service. 2. Return shipments shall be made in compliance with local and international shipping regulations (iata, dot, un). 3. T...

  • Page 43

    Request for return failure report turbo pumps and turbocontrollers position parameters does not start noise vertical power: rotational speed: does not spin freely vibrations horizontal current: inlet pressure: does not reach full speed leak upside-down temp 1: foreline pressure: mechanical contact o...

  • Page 44

    Sales and service offices argentina varian argentina ltd. Sucursal argentina av. Ricardo balbin 2316 1428 buenos aires argentina tel: (54) 1 783 5306 fax: (54) 1 786 5172 australia varian australia pty ltd. 679-701 springvale road mulgrave, victoria zz 3170 australia tel: (61) 395607133 fax: (61) 39...