Varian Turbo-V300 ICE Instruction Manual - page 5
ISTRUZIONI PER L’USO .................................................................................................... 1
GEBRAUCHSANLEITUNG ................................................................................................. 3
MODE D’EMPLOI ................................................................................................................ 5
INSTRUCCIONES DE USO ................................................................................................ 7
INSTRUÇÕES PARA O USO.............................................................................................. 9
GEBRUIKSAANWIJZINGEN ............................................................................................. 11
BRUGSANVISNING .......................................................................................................... 13
BRUKSANVISNING........................................................................................................... 15
BRUKERVEILEDNING ...................................................................................................... 17
KÄYTTÖOHJEET .............................................................................................................. 19
PDHGIES CRHSEWS ............................................................................................................ 21
INSTRUCTIONS FOR USE............................................................................................... 23
TECHNICAL INFORMATION ............................................................................................ 25
DESCRIPTION OF THE TURBOPUMP ......................................................................................25
TECHNICAL SPECIFICATION ....................................................................................................27
INLET SCREEN INSTALLATION ................................................................................................29
HEATING JACKET INSTALLATION............................................................................................30
WATER COOLING KIT INSTALLATION .....................................................................................30
VENT VALVE INSTALLATION ....................................................................................................31
VENT DEVICE INSTALLATION ..................................................................................................32
VIBRATION ISOLATOR INSTALLATION....................................................................................32
SOLID STATE FLOWMETER INSTALLATION...........................................................................33
PUMP USED WITH CORROSIVE GASES .................................................................................33
TYPICAL LAYOUT DIAGRAM.....................................................................................................34
Connection A - HIGH VACUUM FLANGE.........................................................................34
Connection configurations .................................................................................................35
Connection B - FORE-VACUUM PUMP............................................................................35
Connection C - ELECTRICAL............................................................................................35
SUGGESTED PUMP INSTALLATION ........................................................................................36
ROUGHING OPERATION ...........................................................................................................36
Pump and chamber at atmosphere ...................................................................................36
Pump under vacuum, chamber at atmosphere (chamber cleaning) .................................36
PUMP USED IN PRESENCE OF MAGNETIC FIELDS ..............................................................37
ACCESSORIES ...........................................................................................................................37