Zeiss ?IGMA VP-FE-SEM User Manual - page 12
SEM Quick Start
Revision No.2
May 2014
Page 8 of 16
detector to be discussed is the STEM detector, which is composed of both
dark-field and bright-field components. The STEM detector collects
electrons that travel through the sample while mounted on STEM-
compatible carousel and support film. Since this detector is responsible for
detecting electrons that traverse through the sample, it is typically suited
toward higher accelerating voltages, and thus higher resolutions.
It is important to note that while the SE2 detector can be used with
or without STEM-compatible carousels and support films, the STEM
detector will not function in their absence.
1.3.2
Stage Control and Working Distance Using Analog Controls
Caution: Careless use of the stage controls can cause serious damage to
the instrument. Use the TV detector when making gross changes to the
position of the stage and always be mindful of the stage’s position relative
to other objects in the vacuum chamber.
The stage is responsible for mounting and moving the sample
carousel with its attached media. The stage is allowed to move through 5
degrees of freedom, all of which are most easily controlled by the two
control sticks found on the
SEM Stage Control
board. Assuming the
instrument was logged off correctly after its previous use, the use of these
control sticks will be disabled at startup. To enable use of the control
sticks, click on the
Stage
tab under the
SEM Control
group on the right
side-panel. Find the checkbox that says
Joystick Disable
and uncheck it.
As previously stated, the
SEM Stage Control
board is composed of
two control sticks. The narrow stick on the left of the control board is
responsible for controlling both the tilt, and the vertical height (z-axis) of
the stage. Changing the position of the stage in the z-axis effectively
changes the working distance, or the distance between the beam aperture
and the surface of the currently selected carousel. The working distance
effects both the resolution and depth of field of the final image. Here, the
general rule is that smaller working distances equate to higher resolution
and shallower depths of field, and vice versa. Per usual, the optimum
value here generally depends on the situation at hand. It is common
practice, however, to simply set the working distance as small as the