Varian SH-110 Instruction Manual - Draft 3/22/07
Manual is about: Dry Scroll Vacuum Pump
of
33
SH-110 Dry Scroll Vacuum Pump
16
DRAFT 3/22/07
zo
Figure 1 Interface Drawing with Dimensions
Figure 2 Pumping Speed Curves
SH 110 PUMPING SPEED - AIR
TEST PERFORMED IAW ISO 1607-1:1993(E)
0.00
10.00
20.00
30.00
40.00
50.00
60.00
70.00
80.00
90.00
100.00
110.00
120.00
1.E-02
1.E-01
1.E+00
1.E+01
1.E+02
1.E+03
Presure - Torr
Pu
m
p
ig
sp
eed
-
l/m
in
50Hz, 115VAC
60Hz, 115VAC