Varian SH-110 Instruction Manual - Draft 3/22/07
SH-110 Dry Scroll Vacuum Pump
24
DRAFT 3/22/07
7. Carefully replace the Scroll Housing making sure to
line up the Locating Pins. Be sure that the Tip Seal has
not fallen out of its groove.
8. Reinstall (4) M5 bolts (item 4). Torque the (4) M5 bolts
to 4 N-m (40 in-lbs).
9. Place the front cowling in place and replace the M8
bolts.
10. Reinstall the exhaust valve.
11. Reconnect the pump to the electrical power mains.
Figure 6 Exploded View of Pump Body
To test the pump:
1. Run the pump for about 5 seconds. Verify that the
front fan is running.
If you hear loud noises or observe labored operation,
this indicates that the Tip Seal or main O-ring are
possibly out of place.
2. Disassemble and repair as necessary.
The pump is now ready to return to service.
1
2
3
4
5
6
7
8
9
10
1. Front Cowling Bolts; M8 (3)
2. Exhaust Adapter (NW16)
3. Front Cowling
4. Frame Bolts; M5 (4)
5. Scroll Housing
6. Tip Seals
7. Main O-ring Parker No. 2-168
8. Locating Pins (2)
9. Orbiting Scroll
10. Frame
NOTE
Newly installed Tip Seals may require
several hours of run time to seat prop-
erly and enable the pump to meet speed
and base pressure specifications.