Varian 947 Instruction Manual - Draf
Service Pendant Hand-Held Terminal
DRAF
T 2/4/02
9
[SHIFT]
SET
GR XFR
SHOW
Sets the value of the Gross Leak Transfer Point.
Enter X.XE
−
X (the desired value), followed by SHIFT, then the
function key.
Example: 5.0E
−
3 [SHIFT] SET GR XFR (sets Gross Leak
Transfer Point to 500 mTorr).
SET
FN XFR
SHOW
Displays the value of the Fine Leak Transfer Point.
[SHIFT]
SET
FN XFR
SHOW
Sets the value of the Fine Leak Transfer Point.
Enter X.XE
−
X (the desired value), followed by SHIFT, then the
function key.
Example: 5.0E
−
2 [SHIFT] SET GR XFR (sets Fine Leak
Transfer Point to 50 mTorr).
VER
B’LITE
Switches the display backlight. If on, turns it off. If off, turns it on.
[SHIFT]
VER
B’LITE
Displays the version, date and checksum of the installed software.
V FOC
SHOW
RPLR
Displays the value of the Repeller Voltage in the Ion Source.
[SHIFT]
V FOC
SHOW
RPLR
Displays the value of the Variable Focus Voltage in the Ion Source.
EMIS
SHOW
GAIN
Displays the value of the System Gain in the format:
?GAIN X.X ok
[SHIFT]
EMIS
SHOW
GAIN
Displays the value of the Emission Current in the Ion Source in the
format:
?EMISSION CURRENT X.XXX ok
TURBO
SHOW
ION V
Displays the value of the Ion Voltage in the Ion Source in the
format:
?ION CHAMBER XXX.X ok
[SHIFT]
TURBO
SHOW
ION V
Displays the status of the Turbo Pump in the leak detector in the
format:
?turbo
turbo Ready
(meaning the turbo is up to speed)
turbo No Fault
(meaning no fault condition present)
turbo speed Slow
ok (Slow or Fast)
PRSRS
SHOW
VLV ST
Displays the present valve mode of the leak detector as VENT,
FINE TEST, or GROSS TEST.
Table 2 Glossary of Input and Data Keys (continued)